DE3513033C2 - - Google Patents
Info
- Publication number
- DE3513033C2 DE3513033C2 DE19853513033 DE3513033A DE3513033C2 DE 3513033 C2 DE3513033 C2 DE 3513033C2 DE 19853513033 DE19853513033 DE 19853513033 DE 3513033 A DE3513033 A DE 3513033A DE 3513033 C2 DE3513033 C2 DE 3513033C2
- Authority
- DE
- Germany
- Prior art keywords
- carrier
- heating element
- resistance heating
- thickness
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 38
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 18
- 239000003054 catalyst Substances 0.000 claims description 15
- 238000007084 catalytic combustion reaction Methods 0.000 claims description 9
- 230000004888 barrier function Effects 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000012876 carrier material Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002504 iridium compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853513033 DE3513033A1 (de) | 1984-05-05 | 1985-04-11 | Sensor fuer die katalytische verbrennung |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3416657 | 1984-05-05 | ||
| DE19853513033 DE3513033A1 (de) | 1984-05-05 | 1985-04-11 | Sensor fuer die katalytische verbrennung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3513033A1 DE3513033A1 (de) | 1985-11-21 |
| DE3513033C2 true DE3513033C2 (enrdf_load_stackoverflow) | 1991-10-24 |
Family
ID=25820924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853513033 Granted DE3513033A1 (de) | 1984-05-05 | 1985-04-11 | Sensor fuer die katalytische verbrennung |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3513033A1 (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3723052A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Herstellung von inerten, katalytisch wirksamen oder gassensitiven keramikschichten fuer gassensoren |
| DE3839414A1 (de) * | 1988-11-22 | 1990-05-23 | Siemens Ag | Sensoranordnung zum nachweis von gasen durch exotherme katalytische reaktionen |
| EP0421158A1 (de) * | 1989-10-02 | 1991-04-10 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Katalytischer Gassensor und Verfahren zum Herstellen desselben |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3844023A1 (de) * | 1988-12-27 | 1990-06-28 | Hartmann & Braun Ag | Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung |
| US5265417A (en) * | 1993-01-07 | 1993-11-30 | Ford Motor Company | Method and apparatus for determining the hydrocarbon conversion efficiency of a catalytic converter |
| DE102020101163A1 (de) | 2020-01-20 | 2021-07-22 | Vaillant Gmbh | Sensorverschaltung |
| DE102021114416A1 (de) | 2021-06-04 | 2022-12-08 | Vaillant Gmbh | Leckagedetektion |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52122192A (en) * | 1976-04-07 | 1977-10-14 | Matsushita Electric Ind Co Ltd | Combustible gas detecting element |
| JPS5618750A (en) * | 1979-07-25 | 1981-02-21 | Ricoh Co Ltd | Gas detector |
-
1985
- 1985-04-11 DE DE19853513033 patent/DE3513033A1/de active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3723052A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Herstellung von inerten, katalytisch wirksamen oder gassensitiven keramikschichten fuer gassensoren |
| DE3839414A1 (de) * | 1988-11-22 | 1990-05-23 | Siemens Ag | Sensoranordnung zum nachweis von gasen durch exotherme katalytische reaktionen |
| EP0421158A1 (de) * | 1989-10-02 | 1991-04-10 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Katalytischer Gassensor und Verfahren zum Herstellen desselben |
| DE3932880A1 (de) * | 1989-10-02 | 1991-04-11 | Fraunhofer Ges Forschung | Katalytischer gassensor und verfahren zum herstellen desselben |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3513033A1 (de) | 1985-11-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted | ||
| 8339 | Ceased/non-payment of the annual fee |