DE3483926D1 - Halbleiter-differenzdruckwandler. - Google Patents

Halbleiter-differenzdruckwandler.

Info

Publication number
DE3483926D1
DE3483926D1 DE8484104945T DE3483926T DE3483926D1 DE 3483926 D1 DE3483926 D1 DE 3483926D1 DE 8484104945 T DE8484104945 T DE 8484104945T DE 3483926 T DE3483926 T DE 3483926T DE 3483926 D1 DE3483926 D1 DE 3483926D1
Authority
DE
Germany
Prior art keywords
differential pressure
pressure converter
semiconductor differential
semiconductor
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484104945T
Other languages
English (en)
Inventor
Tomoyuki Tobita
Yoshimi Yamamoto
Akira Nagasu
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13666417&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3483926(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3483926D1 publication Critical patent/DE3483926D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE8484104945T 1983-05-04 1984-05-03 Halbleiter-differenzdruckwandler. Expired - Lifetime DE3483926D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58078601A JPS59203936A (ja) 1983-05-04 1983-05-04 半導体差圧発信器

Publications (1)

Publication Number Publication Date
DE3483926D1 true DE3483926D1 (de) 1991-02-21

Family

ID=13666417

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484104945T Expired - Lifetime DE3483926D1 (de) 1983-05-04 1984-05-03 Halbleiter-differenzdruckwandler.

Country Status (4)

Country Link
US (1) US4546653A (de)
EP (1) EP0127776B2 (de)
JP (1) JPS59203936A (de)
DE (1) DE3483926D1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3443419A1 (de) * 1984-11-26 1986-05-28 Siemens AG, 1000 Berlin und 8000 München Druckdifferenz-messgeraet mit einem halbleiter-drucksensor
US4766769A (en) * 1985-06-05 1988-08-30 The Foxboro Company Differential-pressure measuring apparatus with improved arrangement for coupling pressures to a semiconductor sensor
US4693121A (en) * 1985-06-05 1987-09-15 The Foxboro Company Differential-pressure measuring apparatus with improved overpressure protection
US4668889A (en) * 1986-06-06 1987-05-26 Adams Donald L Static overpressure protection system for differential pressure transducer
JPH01300032A (ja) * 1988-05-25 1989-12-04 Japan Electron Control Syst Co Ltd 電子制御燃料噴射式内燃機関の始動制御装置
JP3166477B2 (ja) * 1994-05-10 2001-05-14 富士電機株式会社 差圧検出装置
US7093495B2 (en) * 2003-07-28 2006-08-22 Cts Corporation Pressure sensor
US6997059B2 (en) * 2003-10-07 2006-02-14 Cts Corporation Pressure sensor
US7240558B2 (en) * 2003-11-19 2007-07-10 Cts Corporation Pressure sensor
US7188529B2 (en) * 2005-01-25 2007-03-13 Yokogawa Electric Corporation Differential pressure measuring apparatus
DE102006057829A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
CN105157907A (zh) * 2015-07-13 2015-12-16 南京盛业达电子有限公司 一种具有过载保护功能的差压传感器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1025881B (it) * 1974-11-21 1978-08-30 Nuovo Pignone Spa Sistema di protezione alle sovra pressioni di un sensore a wafer di siligio di un trasmettitore di pressione differenziale
DE2712846A1 (de) * 1976-03-24 1977-11-24 Ict Instr Inc Messumformer zum messen von druckunterschieden
JPS5944575B2 (ja) * 1977-02-10 1984-10-30 株式会社東芝 圧力伝送器
JPS5687194A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS5687195A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter

Also Published As

Publication number Publication date
US4546653A (en) 1985-10-15
JPS59203936A (ja) 1984-11-19
EP0127776B1 (de) 1991-01-16
EP0127776A2 (de) 1984-12-12
EP0127776A3 (en) 1988-09-14
EP0127776B2 (de) 1995-05-24

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee