DE3471918D1 - Tellurides - Google Patents
TelluridesInfo
- Publication number
- DE3471918D1 DE3471918D1 DE8484306997T DE3471918T DE3471918D1 DE 3471918 D1 DE3471918 D1 DE 3471918D1 DE 8484306997 T DE8484306997 T DE 8484306997T DE 3471918 T DE3471918 T DE 3471918T DE 3471918 D1 DE3471918 D1 DE 3471918D1
- Authority
- DE
- Germany
- Prior art keywords
- tellurides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
- C01B19/007—Tellurides or selenides of metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
- C23C16/306—AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8327994 | 1983-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3471918D1 true DE3471918D1 (en) | 1988-07-14 |
Family
ID=10550449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484306997T Expired DE3471918D1 (en) | 1983-10-19 | 1984-10-10 | Tellurides |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0140625B1 (de) |
JP (1) | JPS60169563A (de) |
DE (1) | DE3471918D1 (de) |
DK (1) | DK501084A (de) |
GB (1) | GB2148945B (de) |
NO (1) | NO844142L (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2203757B (en) * | 1987-04-16 | 1991-05-22 | Philips Electronic Associated | Electronic device manufacture |
WO1989001988A1 (en) * | 1987-08-31 | 1989-03-09 | Santa Barbara Research Center | In-situ generation of volatile compounds for chemical vapor deposition |
US4885067A (en) * | 1987-08-31 | 1989-12-05 | Santa Barbara Research Center | In-situ generation of volatile compounds for chemical vapor deposition |
US8377341B2 (en) | 2007-04-24 | 2013-02-19 | Air Products And Chemicals, Inc. | Tellurium (Te) precursors for making phase change memory materials |
US7960205B2 (en) | 2007-11-27 | 2011-06-14 | Air Products And Chemicals, Inc. | Tellurium precursors for GST films in an ALD or CVD process |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2671739A (en) * | 1949-06-22 | 1954-03-09 | Bell Telephone Labor Inc | Plating with sulfides, selenides, and tellurides of chromium, molybdenum, and tungsten |
DE976126C (de) * | 1951-01-24 | 1963-04-04 | Walter Dr Gieseke | Verfahren und Vorrichtung zur Herstellung von kristallinen Metallsulfiden, -seleniden oder -telluriden mit Halbleitereigenschaften |
NL231057A (de) * | 1957-09-03 | |||
CH472509A (de) * | 1965-07-09 | 1969-05-15 | Ibm | Verfahren zur Herstellung dünner Schichten von Chalkogeniden der Lanthaniden |
US3657006A (en) * | 1969-11-06 | 1972-04-18 | Peter D Fisher | Method and apparatus for depositing doped and undoped glassy chalcogenide films at substantially atmospheric pressure |
US3664866A (en) * | 1970-04-08 | 1972-05-23 | North American Rockwell | Composite, method for growth of ii{11 {14 vi{11 {0 compounds on substrates, and process for making composition for the compounds |
US3808035A (en) * | 1970-12-09 | 1974-04-30 | M Stelter | Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like |
US3761308A (en) * | 1971-11-22 | 1973-09-25 | Ibm | Preparation of photoconductive films |
GB2078695B (en) * | 1980-05-27 | 1984-06-20 | Secr Defence | Cadmium mercury telluride deposition |
-
1984
- 1984-10-10 DE DE8484306997T patent/DE3471918D1/de not_active Expired
- 1984-10-10 GB GB08425592A patent/GB2148945B/en not_active Expired
- 1984-10-10 EP EP84306997A patent/EP0140625B1/de not_active Expired
- 1984-10-17 NO NO844142A patent/NO844142L/no unknown
- 1984-10-19 DK DK501084A patent/DK501084A/da not_active Application Discontinuation
- 1984-10-19 JP JP59221106A patent/JPS60169563A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0140625B1 (de) | 1988-06-08 |
EP0140625A1 (de) | 1985-05-08 |
DK501084A (da) | 1985-04-20 |
GB2148945A (en) | 1985-06-05 |
NO844142L (no) | 1985-04-22 |
GB8425592D0 (en) | 1984-11-14 |
DK501084D0 (da) | 1984-10-19 |
JPS60169563A (ja) | 1985-09-03 |
GB2148945B (en) | 1987-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |