DE3464804D1 - Electron-beam method for testing semiconductor structures - Google Patents

Electron-beam method for testing semiconductor structures

Info

Publication number
DE3464804D1
DE3464804D1 DE8484114671T DE3464804T DE3464804D1 DE 3464804 D1 DE3464804 D1 DE 3464804D1 DE 8484114671 T DE8484114671 T DE 8484114671T DE 3464804 T DE3464804 T DE 3464804T DE 3464804 D1 DE3464804 D1 DE 3464804D1
Authority
DE
Germany
Prior art keywords
electron
semiconductor structures
beam method
testing semiconductor
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484114671T
Other languages
German (de)
English (en)
Inventor
George Vasilievich Lukianoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24299974&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3464804(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3464804D1 publication Critical patent/DE3464804D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
DE8484114671T 1984-01-30 1984-12-04 Electron-beam method for testing semiconductor structures Expired DE3464804D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/575,353 US4575630A (en) 1984-01-30 1984-01-30 Electron-beam testing of semiconductor wafers

Publications (1)

Publication Number Publication Date
DE3464804D1 true DE3464804D1 (en) 1987-08-20

Family

ID=24299974

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484114671T Expired DE3464804D1 (en) 1984-01-30 1984-12-04 Electron-beam method for testing semiconductor structures

Country Status (4)

Country Link
US (1) US4575630A (enExample)
EP (1) EP0151720B1 (enExample)
JP (1) JPS60165734A (enExample)
DE (1) DE3464804D1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4665313A (en) * 1985-06-28 1987-05-12 International Business Machines Corporation Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment
US4721910A (en) * 1986-09-12 1988-01-26 American Telephone And Telegraph Company, At&T Bell Laboratories High speed circuit measurements using photoemission sampling
US5460034A (en) * 1992-07-21 1995-10-24 The United States Of America As Represented By The Secretary Of The Air Force Method for measuring and analyzing surface roughness on semiconductor laser etched facets
JPH09184715A (ja) * 1995-12-28 1997-07-15 Hitachi Ltd パターン形状検査装置
KR100544222B1 (ko) * 1997-01-13 2006-04-28 어플라이드 머티어리얼스, 인코포레이티드 웨이퍼의 결함을 검출하는 방법 및 장치
US6504393B1 (en) 1997-07-15 2003-01-07 Applied Materials, Inc. Methods and apparatus for testing semiconductor and integrated circuit structures
US6252412B1 (en) 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
US6232787B1 (en) * 1999-01-08 2001-05-15 Schlumberger Technologies, Inc. Microstructure defect detection
JP4312910B2 (ja) * 1999-12-02 2009-08-12 株式会社日立製作所 レビューｓｅｍ
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
JP4034500B2 (ja) * 2000-06-19 2008-01-16 株式会社日立製作所 半導体装置の検査方法及び検査装置、及びそれを用いた半導体装置の製造方法
US7528614B2 (en) * 2004-12-22 2009-05-05 Applied Materials, Inc. Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772520A (en) * 1972-03-21 1973-11-13 Us Air Force Method for the investigation of thin films on a semiconductor substrate in a scanning electron microscope
US3984683A (en) * 1975-05-27 1976-10-05 Rca Corporation Apparatus and method for analyzing biological cells for malignancy
US4056716A (en) * 1976-06-30 1977-11-01 International Business Machines Corporation Defect inspection of objects such as electronic circuits
US4238686A (en) * 1979-09-05 1980-12-09 Bell Telephone Laboratories, Incorporated Method of analyzing localized nonuniformities in luminescing materials
US4417203A (en) 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics

Also Published As

Publication number Publication date
EP0151720A1 (en) 1985-08-21
JPS60165734A (ja) 1985-08-28
JPH0248139B2 (enExample) 1990-10-24
EP0151720B1 (en) 1987-07-15
US4575630A (en) 1986-03-11

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation