DE3380616D1 - Process for selectively cutting an electrical conductive layer by irradiation with an energy beam - Google Patents

Process for selectively cutting an electrical conductive layer by irradiation with an energy beam

Info

Publication number
DE3380616D1
DE3380616D1 DE8383301534T DE3380616T DE3380616D1 DE 3380616 D1 DE3380616 D1 DE 3380616D1 DE 8383301534 T DE8383301534 T DE 8383301534T DE 3380616 T DE3380616 T DE 3380616T DE 3380616 D1 DE3380616 D1 DE 3380616D1
Authority
DE
Germany
Prior art keywords
irradiation
conductive layer
energy beam
electrical conductive
selectively cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383301534T
Other languages
German (de)
English (en)
Inventor
Tsutomu Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3380616D1 publication Critical patent/DE3380616D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/49—Adaptable interconnections, e.g. fuses or antifuses
    • H10W20/493—Fuses, i.e. interconnections changeable from conductive to non-conductive
    • H10W20/494—Fuses, i.e. interconnections changeable from conductive to non-conductive changeable by the use of an external beam, e.g. laser beam or ion beam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/067—Manufacture or treatment of conductive parts of the interconnections by modifying the pattern of conductive parts
    • H10W20/068—Manufacture or treatment of conductive parts of the interconnections by modifying the pattern of conductive parts by using a laser, e.g. laser cutting or laser direct writing
DE8383301534T 1982-03-30 1983-03-18 Process for selectively cutting an electrical conductive layer by irradiation with an energy beam Expired DE3380616D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57052100A JPS58169940A (ja) 1982-03-30 1982-03-30 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
DE3380616D1 true DE3380616D1 (en) 1989-10-26

Family

ID=12905422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383301534T Expired DE3380616D1 (en) 1982-03-30 1983-03-18 Process for selectively cutting an electrical conductive layer by irradiation with an energy beam

Country Status (4)

Country Link
US (1) US4476375A (https=)
EP (1) EP0090565B1 (https=)
JP (1) JPS58169940A (https=)
DE (1) DE3380616D1 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154146A (ja) * 1984-12-27 1986-07-12 Toshiba Corp 半導体装置の製造方法
US4604513A (en) * 1985-05-07 1986-08-05 Lim Basilio Y Combination of a laser and a controller for trimming a metallized dielectric film capacitor
US4681795A (en) * 1985-06-24 1987-07-21 The United States Of America As Represented By The Department Of Energy Planarization of metal films for multilevel interconnects
US4745258A (en) * 1985-08-27 1988-05-17 Mitsubishi Denki Kabushiki Kaisha Apparatus for laser-cutting metal interconnections in a semiconductor device
JPH0628290B2 (ja) * 1985-10-09 1994-04-13 三菱電機株式会社 回路用ヒューズを備えた半導体装置
US5329152A (en) * 1986-11-26 1994-07-12 Quick Technologies Ltd. Ablative etch resistant coating for laser personalization of integrated circuits
JPS63262621A (ja) * 1987-04-21 1988-10-28 Alps Electric Co Ltd 薄膜トランジスタアレイのトリミング方法
DE3741706A1 (de) * 1987-12-09 1989-06-22 Asea Brown Boveri Verfahren zur herstellung von spiralfoermigen duennfilm-flachspulen
DE3834361A1 (de) * 1988-10-10 1990-04-12 Lsi Logic Products Gmbh Anschlussrahmen fuer eine vielzahl von anschluessen
JPH02112890A (ja) * 1988-10-20 1990-04-25 Showa Denko Kk ダイヤモンドの切断方法
US4962294A (en) * 1989-03-14 1990-10-09 International Business Machines Corporation Method and apparatus for causing an open circuit in a conductive line
US5102830A (en) * 1990-07-24 1992-04-07 Micron Technology, Inc. Integrated circuit fabrication process for preventing overprocessing during a laser scan
JPH05235170A (ja) * 1992-02-24 1993-09-10 Nec Corp 半導体装置
US5963825A (en) * 1992-08-26 1999-10-05 Hyundai Electronics America Method of fabrication of semiconductor fuse with polysilicon plate
JPH06218700A (ja) * 1993-01-21 1994-08-09 Matsushita Electric Ind Co Ltd 導線の切断方法及びコイル部品
US5374590A (en) * 1993-04-28 1994-12-20 International Business Machines Corporation Fabrication and laser deletion of microfuses
TW279229B (en) * 1994-12-29 1996-06-21 Siemens Ag Double density fuse bank for the laser break-link programming of an integrated-circuit
US5747868A (en) * 1995-06-26 1998-05-05 Alliance Semiconductor Corporation Laser fusible link structure for semiconductor devices
US5759428A (en) * 1996-03-15 1998-06-02 International Business Machines Corporation Method of laser cutting a metal line on an MR head
GB2338201A (en) * 1998-06-13 1999-12-15 Exitech Ltd Laser drilling of holes in materials
DE19924153B4 (de) * 1999-05-26 2006-02-09 Infineon Technologies Ag Schaltungsanordnung zur Reparatur eines Halbleiterspeichers
US6650519B1 (en) 1999-08-17 2003-11-18 Seagate Technology Llc ESD protection by a high-to-low resistance shunt
US6432760B1 (en) * 2000-12-28 2002-08-13 Infineon Technologies Ag Method and structure to reduce the damage associated with programming electrical fuses
JP2003200279A (ja) * 2001-10-24 2003-07-15 Seiko Epson Corp 基板の電気配線切断方法及びその装置、並びに電子デバイスの製造方法及びその装置
JP4006994B2 (ja) * 2001-12-18 2007-11-14 株式会社リコー 立体構造体の加工方法、立体形状品の製造方法及び立体構造体
FR2921752B1 (fr) * 2007-10-01 2009-11-13 Aplinov Procede de chauffage d'une plaque par un flux lumineux.
FR2938116B1 (fr) * 2008-11-04 2011-03-11 Aplinov Procede et dispositif de chauffage d'une couche d'une plaque par amorcage et flux lumineux.
CN107283075B (zh) * 2017-08-02 2019-01-15 武汉华星光电半导体显示技术有限公司 改善激光切割工艺中倒角区域缺陷的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2705444A1 (de) * 1977-02-09 1978-08-10 Siemens Ag Verfahren zur lokal begrenzten erwaermung eines festkoerpers
US4272775A (en) * 1978-07-03 1981-06-09 National Semiconductor Corporation Laser trim protection process and structure
US4238839A (en) * 1979-04-19 1980-12-09 National Semiconductor Corporation Laser programmable read only memory
JPS5847596Y2 (ja) * 1979-09-05 1983-10-29 富士通株式会社 半導体装置
JPS5860560A (ja) * 1981-10-07 1983-04-11 Toshiba Corp 半導体装置の冗長回路およびそのフユ−ズ部切断方法
JPS5948543B2 (ja) * 1981-10-13 1984-11-27 株式会社東芝 半導体装置

Also Published As

Publication number Publication date
EP0090565A2 (en) 1983-10-05
US4476375A (en) 1984-10-09
EP0090565B1 (en) 1989-09-20
JPS6412095B2 (https=) 1989-02-28
EP0090565A3 (en) 1985-06-19
JPS58169940A (ja) 1983-10-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee