DE3377011D1 - Fixed slit type photoelectric microscope - Google Patents

Fixed slit type photoelectric microscope

Info

Publication number
DE3377011D1
DE3377011D1 DE8383304052T DE3377011T DE3377011D1 DE 3377011 D1 DE3377011 D1 DE 3377011D1 DE 8383304052 T DE8383304052 T DE 8383304052T DE 3377011 T DE3377011 T DE 3377011T DE 3377011 D1 DE3377011 D1 DE 3377011D1
Authority
DE
Germany
Prior art keywords
type photoelectric
slit type
fixed slit
photoelectric microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383304052T
Other languages
English (en)
Inventor
Toshiaki Shinozaki
Ichiro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3377011D1 publication Critical patent/DE3377011D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE8383304052T 1982-08-25 1983-07-12 Fixed slit type photoelectric microscope Expired DE3377011D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57147054A JPS5936220A (ja) 1982-08-25 1982-08-25 固定スリット型光電顕微鏡

Publications (1)

Publication Number Publication Date
DE3377011D1 true DE3377011D1 (en) 1988-07-14

Family

ID=15421454

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383304052T Expired DE3377011D1 (en) 1982-08-25 1983-07-12 Fixed slit type photoelectric microscope

Country Status (5)

Country Link
US (1) US4560278A (de)
EP (1) EP0102714B1 (de)
JP (1) JPS5936220A (de)
DD (1) DD210130A5 (de)
DE (1) DE3377011D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62247319A (ja) * 1986-04-01 1987-10-28 Hamamatsu Photonics Kk 光学活性を示す物質の像形成方法及び装置
US5841577A (en) * 1996-02-16 1998-11-24 Carnegie Mellon University Light microscope having acousto-optic tunable filters
JP5189301B2 (ja) * 2007-03-12 2013-04-24 オリンパス株式会社 レーザー走査型顕微鏡
JP7195525B2 (ja) * 2018-08-24 2022-12-26 国立研究開発法人理化学研究所 光切替器および観察装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE378834C (de) * 1922-04-05 1923-08-03 Heinrich Hanemann Metallmikroskop
DE1296396B (de) * 1965-07-24 1969-05-29 Leitz Ernst Gmbh Optisches Mehrzweckmessgeraet
FR1532660A (fr) * 1967-06-09 1968-07-12 Genevoise Instr Physique Microscope photoélectrique
DE1915680B2 (de) * 1969-03-27 1973-03-08 Ernst Leitz Gmbh, 6330 Wetzlar Fotometer fuer beobachtungsinstrumente, insbesondere mikroskope
JPS503355A (de) * 1973-05-11 1975-01-14
US3943359A (en) * 1973-06-15 1976-03-09 Hitachi, Ltd. Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
US3990798A (en) * 1975-03-07 1976-11-09 Bell Telephone Laboratories, Incorporated Method and apparatus for aligning mask and wafer
NL7606548A (nl) * 1976-06-17 1977-12-20 Philips Nv Werkwijze en inrichting voor het uitrichten van een i.c.-patroon ten opzichte van een halfgelei- dend substraat.
JPS5311385A (en) * 1976-07-19 1978-02-01 Brother Ind Ltd Process for cutting paper
DD139902A1 (de) * 1978-12-19 1980-01-23 Hermann Beyer Doppelbrechendes bauelement fuer polarisierende interferenzapparate

Also Published As

Publication number Publication date
DD210130A5 (de) 1984-05-30
EP0102714A2 (de) 1984-03-14
JPS5936220A (ja) 1984-02-28
JPS6325282B2 (de) 1988-05-25
US4560278A (en) 1985-12-24
EP0102714B1 (de) 1988-06-08
EP0102714A3 (en) 1986-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee