DE3346455A1 - Interferometer - Google Patents

Interferometer

Info

Publication number
DE3346455A1
DE3346455A1 DE19833346455 DE3346455A DE3346455A1 DE 3346455 A1 DE3346455 A1 DE 3346455A1 DE 19833346455 DE19833346455 DE 19833346455 DE 3346455 A DE3346455 A DE 3346455A DE 3346455 A1 DE3346455 A1 DE 3346455A1
Authority
DE
Germany
Prior art keywords
interferometer
reflector
axis
mirror
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19833346455
Other languages
German (de)
English (en)
Inventor
Volker Dipl.-Ing. 8031 Eching Tank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsches Zentrum fuer Luft und Raumfahrt eV
Original Assignee
Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Zentrum fuer Luft und Raumfahrt eV filed Critical Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority to DE19833346455 priority Critical patent/DE3346455A1/de
Priority to EP84113859A priority patent/EP0146768B1/de
Priority to DE8484113859T priority patent/DE3476583D1/de
Priority to DD27116684A priority patent/DD228353A5/de
Priority to US06/683,871 priority patent/US4652130A/en
Priority to JP27055184A priority patent/JPS60157027A/ja
Publication of DE3346455A1 publication Critical patent/DE3346455A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE19833346455 1983-12-22 1983-12-22 Interferometer Withdrawn DE3346455A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19833346455 DE3346455A1 (de) 1983-12-22 1983-12-22 Interferometer
EP84113859A EP0146768B1 (de) 1983-12-22 1984-11-16 Interferometer
DE8484113859T DE3476583D1 (en) 1983-12-22 1984-11-16 Interferometer
DD27116684A DD228353A5 (de) 1983-12-22 1984-12-19 Interferometer
US06/683,871 US4652130A (en) 1983-12-22 1984-12-20 Method of and arrangement for an interferometer
JP27055184A JPS60157027A (ja) 1983-12-22 1984-12-21 マイケルソン原理による干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833346455 DE3346455A1 (de) 1983-12-22 1983-12-22 Interferometer

Publications (1)

Publication Number Publication Date
DE3346455A1 true DE3346455A1 (de) 1985-07-11

Family

ID=6217734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833346455 Withdrawn DE3346455A1 (de) 1983-12-22 1983-12-22 Interferometer

Country Status (3)

Country Link
JP (1) JPS60157027A (cs)
DD (1) DD228353A5 (cs)
DE (1) DE3346455A1 (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3826149A1 (de) * 1988-08-01 1990-02-08 Deutsche Forsch Luft Raumfahrt Einrichtung zur messung des drehwinkels oder der winkelstellung eines rotierenden objektes
EP0443477A1 (de) * 1990-02-21 1991-08-28 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson zur Erzeugung optischer Wegunterschiede
DE4136300C1 (en) * 1991-11-04 1993-02-25 Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De Michelson type interferometer using single rotating retroreflector - with aperture receiving split light beam halves deflected against each other by mirrors
DE4215871A1 (de) * 1992-05-14 1993-11-18 Deutsche Forsch Luft Raumfahrt Interferometer nach Michelson
US5341207A (en) * 1991-08-30 1994-08-23 Deutsche Forschungsanstalt Fur Luft - Und Raumfahrt E.V. Michelson interferometer
EP0924499A1 (de) * 1997-12-20 1999-06-23 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130723A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
JP4994991B2 (ja) * 2007-08-06 2012-08-08 株式会社ミツトヨ 微細形状測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3005520C2 (de) * 1980-02-14 1983-05-05 Kayser-Threde GmbH, 8000 München Zweistrahl-Interferometer zur Fourierspektroskopie

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3826149A1 (de) * 1988-08-01 1990-02-08 Deutsche Forsch Luft Raumfahrt Einrichtung zur messung des drehwinkels oder der winkelstellung eines rotierenden objektes
EP0443477A1 (de) * 1990-02-21 1991-08-28 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson zur Erzeugung optischer Wegunterschiede
US5341207A (en) * 1991-08-30 1994-08-23 Deutsche Forschungsanstalt Fur Luft - Und Raumfahrt E.V. Michelson interferometer
DE4136300C1 (en) * 1991-11-04 1993-02-25 Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De Michelson type interferometer using single rotating retroreflector - with aperture receiving split light beam halves deflected against each other by mirrors
DE4215871A1 (de) * 1992-05-14 1993-11-18 Deutsche Forsch Luft Raumfahrt Interferometer nach Michelson
EP0924499A1 (de) * 1997-12-20 1999-06-23 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson

Also Published As

Publication number Publication date
JPS60157027A (ja) 1985-08-17
JPH058769B2 (cs) 1993-02-03
DD228353A5 (de) 1985-10-09

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: DEUTSCHE FORSCHUNGSANSTALT FUER LUFT- UND RAUMFAHR

8130 Withdrawal