DE3321580A1 - Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor - Google Patents

Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor

Info

Publication number
DE3321580A1
DE3321580A1 DE19833321580 DE3321580A DE3321580A1 DE 3321580 A1 DE3321580 A1 DE 3321580A1 DE 19833321580 DE19833321580 DE 19833321580 DE 3321580 A DE3321580 A DE 3321580A DE 3321580 A1 DE3321580 A1 DE 3321580A1
Authority
DE
Germany
Prior art keywords
temperature
differential pressure
pressure sensor
liquid
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19833321580
Other languages
German (de)
English (en)
Other versions
DE3321580C2 (en, 2012
Inventor
Volker Dr. 2110 Buchholz Graeger
Reiner Dr. 2085 Quickborn Orlowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Priority to DE19833321580 priority Critical patent/DE3321580A1/de
Publication of DE3321580A1 publication Critical patent/DE3321580A1/de
Application granted granted Critical
Publication of DE3321580C2 publication Critical patent/DE3321580C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE19833321580 1983-06-15 1983-06-15 Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor Granted DE3321580A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19833321580 DE3321580A1 (de) 1983-06-15 1983-06-15 Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833321580 DE3321580A1 (de) 1983-06-15 1983-06-15 Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor

Publications (2)

Publication Number Publication Date
DE3321580A1 true DE3321580A1 (de) 1984-12-20
DE3321580C2 DE3321580C2 (en, 2012) 1989-03-02

Family

ID=6201543

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833321580 Granted DE3321580A1 (de) 1983-06-15 1983-06-15 Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor

Country Status (1)

Country Link
DE (1) DE3321580A1 (en, 2012)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340834A1 (de) * 1983-11-11 1985-05-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur konstanthaltung der temperaturabhaengigen empfindlichkeit eines differenzdruckmessgeraetes
DE3414896A1 (de) * 1984-04-19 1985-10-24 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur verringerung der temperaturabhaengigkeit eines kapazitiven einkammerdifferenzdrucksensors
DE3519390A1 (de) * 1984-05-31 1985-12-12 Vaisala Oy, Helsinki Verfahren zur messung von kapazitaeten, insbesondere von kleinen kapazitaeten, unter verwendung zweier referenzen
DE3504329A1 (de) * 1985-02-08 1986-08-14 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdruckmessgeraet
DE3523104A1 (de) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind
EP0420105A3 (en) * 1989-09-28 1991-09-04 Endress U. Hauser Gmbh U. Co. Differential pressure measuring device
EP0421394A3 (en) * 1989-10-06 1991-09-18 Endress U. Hauser Gmbh U. Co. Differential pressure measuring device
EP0524550A1 (de) * 1991-07-25 1993-01-27 Fibronix Sensoren GmbH Gasgefüllter Relativdrucksensor
DE4224524A1 (de) * 1991-07-26 1993-01-28 Fuji Electric Co Ltd Elektrostatischer kapazitaetstyp-differenzdruckdetektor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2048488A (en) * 1979-04-26 1980-12-10 Rosemount Eng Co Ltd Differential pressure sensing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2048488A (en) * 1979-04-26 1980-12-10 Rosemount Eng Co Ltd Differential pressure sensing apparatus

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340834A1 (de) * 1983-11-11 1985-05-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur konstanthaltung der temperaturabhaengigen empfindlichkeit eines differenzdruckmessgeraetes
DE3414896A1 (de) * 1984-04-19 1985-10-24 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur verringerung der temperaturabhaengigkeit eines kapazitiven einkammerdifferenzdrucksensors
DE3519390A1 (de) * 1984-05-31 1985-12-12 Vaisala Oy, Helsinki Verfahren zur messung von kapazitaeten, insbesondere von kleinen kapazitaeten, unter verwendung zweier referenzen
DE3504329A1 (de) * 1985-02-08 1986-08-14 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdruckmessgeraet
DE3523104A1 (de) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind
EP0420105A3 (en) * 1989-09-28 1991-09-04 Endress U. Hauser Gmbh U. Co. Differential pressure measuring device
US5097712A (en) * 1989-09-28 1992-03-24 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
EP0421394A3 (en) * 1989-10-06 1991-09-18 Endress U. Hauser Gmbh U. Co. Differential pressure measuring device
US5111698A (en) * 1989-10-06 1992-05-12 Endress U. Hauser Gmbh U. Co. Differential pressure measuring apparatus
EP0524550A1 (de) * 1991-07-25 1993-01-27 Fibronix Sensoren GmbH Gasgefüllter Relativdrucksensor
DE4224524A1 (de) * 1991-07-26 1993-01-28 Fuji Electric Co Ltd Elektrostatischer kapazitaetstyp-differenzdruckdetektor

Also Published As

Publication number Publication date
DE3321580C2 (en, 2012) 1989-03-02

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENVEC MESS- UND REGELTECHNIK GMBH + CO, 34123 KASS

8327 Change in the person/name/address of the patent owner

Owner name: ENVEC MESS- UND REGELTECHNIK GMBH + CO., 79576 WEI

8327 Change in the person/name/address of the patent owner

Owner name: ENDRESS + HAUSER GMBH + CO., 79689 MAULBURG, DE

8327 Change in the person/name/address of the patent owner

Owner name: ENDRESS + HAUSER GMBH + CO. KG, 79689 MAULBURG, DE