DE3261906D1 - Synthesis of silicon nitride - Google Patents

Synthesis of silicon nitride

Info

Publication number
DE3261906D1
DE3261906D1 DE8282102743T DE3261906T DE3261906D1 DE 3261906 D1 DE3261906 D1 DE 3261906D1 DE 8282102743 T DE8282102743 T DE 8282102743T DE 3261906 T DE3261906 T DE 3261906T DE 3261906 D1 DE3261906 D1 DE 3261906D1
Authority
DE
Germany
Prior art keywords
synthesis
silicon nitride
nitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282102743T
Other languages
English (en)
Inventor
Kimihiko Sato
Kunihiko Terase
Hitoshi Kijimuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Application granted granted Critical
Publication of DE3261906D1 publication Critical patent/DE3261906D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
DE8282102743T 1981-04-21 1982-03-31 Synthesis of silicon nitride Expired DE3261906D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56059164A JPS57175711A (en) 1981-04-21 1981-04-21 Synthesis of silicon nitride

Publications (1)

Publication Number Publication Date
DE3261906D1 true DE3261906D1 (en) 1985-02-28

Family

ID=13105456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282102743T Expired DE3261906D1 (en) 1981-04-21 1982-03-31 Synthesis of silicon nitride

Country Status (5)

Country Link
US (1) US4399115A (de)
EP (1) EP0063272B1 (de)
JP (1) JPS57175711A (de)
CA (1) CA1192377A (de)
DE (1) DE3261906D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60151273A (ja) * 1984-01-19 1985-08-09 トヨタ自動車株式会社 セラミツク被膜付き金属化合物の微粉末の製造方法
DE3536933A1 (de) * 1985-10-17 1987-04-23 Bayer Ag Verbessertes siliciumnitrid und verfahren zu dessen herstellung
JPS62223009A (ja) * 1986-03-20 1987-10-01 Ube Ind Ltd α−サイアロン粉末の製法
US4891339A (en) * 1987-10-23 1990-01-02 Aerochem Research Laboratories, Inc. Process and apparatus for the flame preparation of ceramic powders
US4769064A (en) * 1988-01-21 1988-09-06 The United States Of America As Represented By The United States Department Of Energy Method for synthesizing ultrafine powder materials
US4914063A (en) * 1988-04-04 1990-04-03 The United States Of America As Represented By The United States Department Of Energy Process for producing organic products containing silicon, hydrogen, nitrogen, and carbon by the direct reaction between elemental silicon and organic amines
SU1696385A1 (ru) * 1988-05-24 1991-12-07 Институт структурной макрокинетики АН СССР Способ получени нитрида кремни
FI82231C (fi) * 1988-11-30 1991-02-11 Kemira Oy Foerfarande foer framstaellning av keramraomaterial.
US5227195A (en) * 1989-04-04 1993-07-13 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
US5149514A (en) * 1989-04-04 1992-09-22 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
US5178844A (en) * 1990-04-03 1993-01-12 Phillips Petroleum Company Method and apparatus for producing nitride products
US5219537A (en) * 1990-04-03 1993-06-15 Phillips Petroleum Company Production of nitride products
US5171734A (en) * 1991-04-22 1992-12-15 Sri International Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition
DE4113884A1 (de) * 1991-04-27 1992-10-29 Hoechst Ag Verfahren zur herstellung von siliciumnitrid mit kleiner kristallitgroesse
GB9306802D0 (en) * 1993-04-01 1993-05-26 Tioxide Specialties Ltd Process for the production of silicon nitride
DE102006021960A1 (de) * 2006-05-10 2007-11-15 Sincono Ag Ölhaltige Sande und Schiefer und ihre Gemische als Ausgangssubstanzen zur Darstellung von kristallinem Silizium und Wasserstoffgas sowie zur Herstellung von Siliziumnitrid, Siliziumcarbid und Silanen
EP1857640A3 (de) 2006-05-10 2010-05-05 Silicon Fire AG Neuartiger kaskadierter Kraftwerksprozess und Verfahren zum Bereitstellen von reversibel einsetzbaren Wasserstoffträgern in einem solchen Kraftwerksprozess
CA2672168A1 (en) * 2006-12-18 2008-06-26 Silicon Fire Ag Novel cascaded power plant process and method for providing reversibly usable hydrogen carriers in such a power plant process
CN101920961B (zh) * 2009-06-09 2013-09-04 内蒙古神舟硅业有限责任公司 一种去除三氯氢硅中磷硼杂质的工艺

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE639087A (de) * 1962-10-23
GB1050932A (de) * 1963-05-30
DE1259851B (de) * 1965-04-15 1968-02-01 Bayer Ag Verfahren zur Herstellung von anorganischen, festen Produkten durch Gasphasenreaktion
US3726643A (en) * 1970-04-09 1973-04-10 I Khim Fiz Akademii Nauk Method of producing refractory carbides,borides,silicides,sulfides,and nitrides of metals of groups iv,v,and vi of the periodic system
GB1432559A (en) * 1972-12-04 1976-04-22 Advanced Materials Eng Treatment of permeable refractory or metal materials
US4145224A (en) * 1974-11-22 1979-03-20 Gte Sylvania Incorporated Method for enhancing the crystallization rate of high purity amorphous Si3 N4 powder, powders produced thereby and products therefrom
JPS54145400A (en) * 1978-05-08 1979-11-13 Ube Ind Ltd Production of metal nitride powder
JPS5913442B2 (ja) * 1980-01-11 1984-03-29 東ソー株式会社 高純度の型窒化珪素の製造法
US4289801A (en) * 1980-05-21 1981-09-15 United Technologies Corporation Method for producing fine grained pyrolytic silicon nitride

Also Published As

Publication number Publication date
CA1192377A (en) 1985-08-27
EP0063272A1 (de) 1982-10-27
EP0063272B1 (de) 1985-01-16
JPS57175711A (en) 1982-10-28
US4399115A (en) 1983-08-16

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee