DE3140446C2 - Feuchtefühler und Verfahren zu seiner Herstellung - Google Patents
Feuchtefühler und Verfahren zu seiner HerstellungInfo
- Publication number
- DE3140446C2 DE3140446C2 DE19813140446 DE3140446A DE3140446C2 DE 3140446 C2 DE3140446 C2 DE 3140446C2 DE 19813140446 DE19813140446 DE 19813140446 DE 3140446 A DE3140446 A DE 3140446A DE 3140446 C2 DE3140446 C2 DE 3140446C2
- Authority
- DE
- Germany
- Prior art keywords
- sensor according
- film
- sensor
- hygroscopic
- insulating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title description 6
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000000758 substrate Substances 0.000 claims abstract description 17
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 24
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 claims description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- -1 polyethylene fluoride Polymers 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 claims description 2
- 229910000397 disodium phosphate Inorganic materials 0.000 claims description 2
- 235000019800 disodium phosphate Nutrition 0.000 claims description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 125000003158 alcohol group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910017053 inorganic salt Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19690280A | 1980-10-14 | 1980-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3140446A1 DE3140446A1 (de) | 1982-06-09 |
| DE3140446C2 true DE3140446C2 (de) | 1985-11-14 |
Family
ID=22727213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19813140446 Expired DE3140446C2 (de) | 1980-10-14 | 1981-10-12 | Feuchtefühler und Verfahren zu seiner Herstellung |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5793246A (https=) |
| CA (1) | CA1180761A (https=) |
| DE (1) | DE3140446C2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01217148A (ja) * | 1988-02-25 | 1989-08-30 | Sanyo Electric Co Ltd | 風向変更装置 |
| GB9908696D0 (en) * | 1999-04-17 | 1999-06-09 | Chandler Robert W | High impedance sensor apparatus and method for detecting fluids |
| DE102009025325A1 (de) * | 2009-06-15 | 2010-12-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Coulometrischer Feuchtesensor mit Wechselspannungsquelle |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3703697A (en) * | 1971-06-23 | 1972-11-21 | Honeywell Inc | Relative humidity sensor |
-
1981
- 1981-10-12 DE DE19813140446 patent/DE3140446C2/de not_active Expired
- 1981-10-13 CA CA000387824A patent/CA1180761A/en not_active Expired
- 1981-10-14 JP JP56162890A patent/JPS5793246A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| CA1180761A (en) | 1985-01-08 |
| JPS6322545B2 (https=) | 1988-05-12 |
| DE3140446A1 (de) | 1982-06-09 |
| JPS5793246A (en) | 1982-06-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69326199T2 (de) | Gassensor und seine herstellung | |
| EP3155871B1 (de) | Planares heizelement mit einer ptc-widerstandsstruktur | |
| DE69414728T2 (de) | Filterorgan mit verteiltem Element und Herstellungsverfahren | |
| DE2826515C2 (https=) | ||
| DE3140753C2 (de) | Vorrichtung zum Messen des elektrischen Oberflächenwiderstandes eines Gegenstandes | |
| DE3630393C2 (de) | Widerstandsthermometer | |
| DE1598401C3 (de) | Gerät zur Anzeige der Konzentration eines Anteils eines Gasgemisches, beruhend auf der Eigenschwingungsänderung eines piezoelektrischen Kristalls | |
| DE69213665T2 (de) | Kapazitiver Sensor mit leitender Frontseite, zur Bildung einer Kondensatorarmatur und einem mineralisierten abgeschirmten Koaxialkabel | |
| CH629301A5 (de) | Einrichtung zur messung der standhoehe von elektrisch leitenden fluessigkeiten. | |
| DE1852237U (de) | Fuehlerelement fuer einen hygrostaten. | |
| DE69419471T2 (de) | Kapazitiver Feuchtesensor, insbesondere für Radiosondenbenutzug , sowie Verfahren zu dessen Herstellung | |
| DE2344008B2 (de) | Meßgerät zum Messen von Veränderungen der physikalischen Eigenschaften eines magnetisch oder elektrisch leitenden Untersuchungsobjekts | |
| DE3140446C2 (de) | Feuchtefühler und Verfahren zu seiner Herstellung | |
| DE2029065A1 (de) | Elektrisches Widerstandsthermometer | |
| DE112019003625T5 (de) | Varistor-Passivierungsschicht und Verfahren zu ihrer Herstellung | |
| DE68918617T2 (de) | Elektrochemischer Fühler und Verfahren. | |
| DE3515035C2 (https=) | ||
| DE3886011T2 (de) | Sicherheitssystem und ein signaltragendes Glied dafür. | |
| DE3405442C1 (de) | Meßwiderstand | |
| DE69026790T2 (de) | Leitfähigkeitsmessgerät | |
| DE1514250A1 (de) | Verbesserungen an oder fuer Kondensatoren | |
| DE69735378T2 (de) | Verfahren zur herstellung eines bauelements mit mehrfacher schutzfunktion | |
| DE2837518C2 (https=) | ||
| DE2420120B2 (de) | Messvorrichtung | |
| DE972845C (de) | Mehrschichtfolie zur Herstellung gedruckter Schaltungen oder gedruckter Schaltelemente |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8181 | Inventor (new situation) |
Free format text: MOTCHENBACHER, CURTIS D., MINNETONKA, MINN., US NICHOLAS, MERLE E., MINNEAPOLIS, MINN., US |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |