DE3120696A1 - "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte" - Google Patents

"verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Info

Publication number
DE3120696A1
DE3120696A1 DE19813120696 DE3120696A DE3120696A1 DE 3120696 A1 DE3120696 A1 DE 3120696A1 DE 19813120696 DE19813120696 DE 19813120696 DE 3120696 A DE3120696 A DE 3120696A DE 3120696 A1 DE3120696 A1 DE 3120696A1
Authority
DE
Germany
Prior art keywords
nozzles
transport
orientation
vacuum
error compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19813120696
Other languages
German (de)
English (en)
Inventor
Erich Dipl.-Phys. Adler
Eberhard Dipl.-Phys. DDR 6902 Jena-Lobeda Weiland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH filed Critical Jenoptik Jena GmbH
Publication of DE3120696A1 publication Critical patent/DE3120696A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19813120696 1980-06-02 1981-05-23 "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte" Withdrawn DE3120696A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80221504A DD151387A1 (de) 1980-06-02 1980-06-02 Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte

Publications (1)

Publication Number Publication Date
DE3120696A1 true DE3120696A1 (de) 1982-03-18

Family

ID=5524464

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813120696 Withdrawn DE3120696A1 (de) 1980-06-02 1981-05-23 "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Country Status (3)

Country Link
DD (1) DD151387A1 (enExample)
DE (1) DE3120696A1 (enExample)
FR (1) FR2483377A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996026875A1 (en) * 1995-02-28 1996-09-06 Samsung Electronics Co., Ltd. Method and apparatus for transporting lead frame, and in-line system using them
DE102021117430A1 (de) 2021-07-06 2023-01-12 Homag Gmbh Vorrichtung und Verfahren zur Bewegung von Werkstücken

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
FR2620113B1 (fr) * 1987-08-11 1989-11-17 Commissariat Energie Atomique Transporteur de tranches empilables dans des cassettes
IT1238402B (it) * 1990-05-11 1993-07-26 Gd Spa Unita' di alimentazione di prodotti ad una macchina operatrice

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3797889A (en) 1971-12-30 1974-03-19 Texas Instruments Inc Workpiece alignment system
US3865254A (en) 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument
US3890508A (en) 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system
US3902615A (en) 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system
DD123848A1 (enExample) 1976-01-19 1977-01-19

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3797889A (en) 1971-12-30 1974-03-19 Texas Instruments Inc Workpiece alignment system
US3902615A (en) 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system
US3865254A (en) 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument
US3890508A (en) 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system
DD123848A1 (enExample) 1976-01-19 1977-01-19

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996026875A1 (en) * 1995-02-28 1996-09-06 Samsung Electronics Co., Ltd. Method and apparatus for transporting lead frame, and in-line system using them
US5987722A (en) * 1995-02-28 1999-11-23 Samsung Electronics Co., Ltd. Apparatus for transporting lead frames
DE102021117430A1 (de) 2021-07-06 2023-01-12 Homag Gmbh Vorrichtung und Verfahren zur Bewegung von Werkstücken

Also Published As

Publication number Publication date
FR2483377B1 (enExample) 1984-12-14
DD151387A1 (de) 1981-10-14
FR2483377A1 (fr) 1981-12-04

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee