DE3070953D1 - Improved shock and vibration isolation system - Google Patents
Improved shock and vibration isolation systemInfo
- Publication number
- DE3070953D1 DE3070953D1 DE8080105865T DE3070953T DE3070953D1 DE 3070953 D1 DE3070953 D1 DE 3070953D1 DE 8080105865 T DE8080105865 T DE 8080105865T DE 3070953 T DE3070953 T DE 3070953T DE 3070953 D1 DE3070953 D1 DE 3070953D1
- Authority
- DE
- Germany
- Prior art keywords
- vibration isolation
- isolation system
- improved shock
- shock
- improved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
- F16F15/0275—Control of stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M7/00—Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/083,769 US4336917A (en) | 1979-10-11 | 1979-10-11 | Shock and vibration isolation system |
US06/083,770 US4328941A (en) | 1979-10-11 | 1979-10-11 | Shock and vibration isolation system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3070953D1 true DE3070953D1 (en) | 1985-09-12 |
Family
ID=26769719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8080105865T Expired DE3070953D1 (en) | 1979-10-11 | 1980-09-26 | Improved shock and vibration isolation system |
Country Status (2)
Country | Link |
---|---|
EP (2) | EP0027195B1 (de) |
DE (1) | DE3070953D1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3135180A1 (de) * | 1981-09-05 | 1983-04-14 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Einrichtung zum linearen fuehren eines abtasters |
US4750405A (en) * | 1983-08-30 | 1988-06-14 | The Perkin-Elmer Corporation | Vibration and shock isolation apparatus |
DE3480664D1 (de) * | 1983-08-30 | 1990-01-11 | Perkin Elmer Corp | Anordnung zum nivellieren einer oberflaeche. |
US4730541A (en) * | 1986-06-03 | 1988-03-15 | Technical Manufacturing Corporation | Non contacting electro-pneumatic servo for vibration isolation |
GB8816188D0 (en) * | 1988-07-07 | 1988-11-16 | Marconi Gec Ltd | Mounting for machinery |
DE68922798T2 (de) * | 1988-08-02 | 1995-11-16 | Canon Kk | Montierverfahren. |
JP2728898B2 (ja) * | 1988-10-05 | 1998-03-18 | キヤノン株式会社 | 露光装置 |
DE8900312U1 (de) * | 1989-01-12 | 1989-05-11 | Lindauer Dornier Gmbh, 8990 Lindau, De | |
DE4110250C2 (de) * | 1991-03-28 | 1994-11-03 | Spectrospin Ag | Schwingungsdämpfende Halterung |
JP4109747B2 (ja) * | 1998-05-07 | 2008-07-02 | キヤノン株式会社 | アクティブ除振装置および露光装置 |
ES2872931T3 (es) | 2013-12-06 | 2021-11-03 | Itt Mfg Enterprises Llc | Conjunto de aislamiento sísmico |
EP3177850B1 (de) | 2014-09-24 | 2019-07-24 | Siemens Aktiengesellschaft | Dämpfungs- und tragevorrichtung für elektrische ausrüstungen |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2956761A (en) * | 1957-09-12 | 1960-10-18 | Weber Instr Company | Self-levelling and weighing device |
GB917521A (en) * | 1957-11-19 | 1963-02-06 | Yarrow & Company Ltd | Improvements in and relating to vibration isolators |
FR1190712A (fr) * | 1957-12-13 | 1959-10-14 | Vibru | Socle antivibratile |
DK116700A (de) * | 1963-07-12 | |||
US3189303A (en) * | 1963-09-06 | 1965-06-15 | Willis A Boothe | Pneumatic system for machinery support |
US3281101A (en) * | 1964-05-18 | 1966-10-25 | Wright Barry Corp | Levelable load mount |
US3701499A (en) * | 1968-04-08 | 1972-10-31 | Wright Barry Corp | Active fluid isolation system |
US3606233A (en) * | 1968-04-22 | 1971-09-20 | Bolt Beranek & Newman | Vibration isolation system |
US3606365A (en) * | 1969-11-03 | 1971-09-20 | Budd Co | Active suspension system for a vehicle |
US3703999A (en) * | 1969-12-12 | 1972-11-28 | Actron Ind Inc | Wide band stabilizer |
US3674368A (en) * | 1970-05-11 | 1972-07-04 | Johannsmeier Karl Heinz | Out of contact optical alignment and exposure apparatus |
GB1400389A (en) * | 1971-06-23 | 1975-07-16 | Ass Elect Ind | Arrangements for supporting a mass with vibration isolation |
US3807678A (en) * | 1972-09-19 | 1974-04-30 | Lord Corp | System for controlling the transmission of energy between spaced members |
IT997639B (it) * | 1973-07-23 | 1975-12-30 | Wright Barry Corp | Perfezionamento nei sistemi di supporto ad isolamento delle vibrazioni |
US4033541A (en) * | 1975-05-30 | 1977-07-05 | Mcdonnell Douglas Corporation | Torque rejection soft mounted platform |
JPS5281823A (en) * | 1975-12-26 | 1977-07-08 | Toyota Central Res & Dev Lab Inc | Control system for suspension device of vehicle |
DE2642522A1 (de) * | 1976-09-22 | 1978-03-23 | Werner Dr Ing Heinze | Luftfeder |
JPS5447581A (en) * | 1977-09-22 | 1979-04-14 | Hitachi Ltd | Mask aligner |
GB1600390A (en) * | 1977-10-25 | 1981-10-14 | British Railways Board | Active suspensions for vehicles |
US4198159A (en) * | 1978-12-29 | 1980-04-15 | International Business Machines Corporation | Optical alignment system in projection printing |
-
1980
- 1980-09-26 EP EP19800105865 patent/EP0027195B1/de not_active Expired
- 1980-09-26 EP EP19830108003 patent/EP0103188B1/de not_active Expired
- 1980-09-26 DE DE8080105865T patent/DE3070953D1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0027195A2 (de) | 1981-04-22 |
EP0027195B1 (de) | 1985-08-07 |
EP0027195A3 (en) | 1981-05-06 |
EP0103188B1 (de) | 1986-12-03 |
EP0103188A2 (de) | 1984-03-21 |
EP0103188A3 (en) | 1984-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |