DE3070561D1 - Ion implanted reverse-conducting thyristor - Google Patents

Ion implanted reverse-conducting thyristor

Info

Publication number
DE3070561D1
DE3070561D1 DE8080107602T DE3070561T DE3070561D1 DE 3070561 D1 DE3070561 D1 DE 3070561D1 DE 8080107602 T DE8080107602 T DE 8080107602T DE 3070561 T DE3070561 T DE 3070561T DE 3070561 D1 DE3070561 D1 DE 3070561D1
Authority
DE
Germany
Prior art keywords
ion implanted
conducting thyristor
reverse
implanted reverse
thyristor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8080107602T
Other languages
German (de)
English (en)
Inventor
John Bartko
Earl Stauffer Schlegel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of DE3070561D1 publication Critical patent/DE3070561D1/de
Expired legal-status Critical Current

Links

Classifications

    • H10P30/21
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/141Anode or cathode regions of thyristors; Collector or emitter regions of gated bipolar-mode devices, e.g. of IGBTs
    • H10D62/142Anode regions of thyristors or collector regions of gated bipolar-mode devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/192Base regions of thyristors
    • H10D62/206Cathode base regions of thyristors
    • H10P30/204
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/084Ion implantation of compound devices
DE8080107602T 1979-12-05 1980-12-04 Ion implanted reverse-conducting thyristor Expired DE3070561D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/100,680 US4278476A (en) 1979-12-05 1979-12-05 Method of making ion implanted reverse-conducting thyristor

Publications (1)

Publication Number Publication Date
DE3070561D1 true DE3070561D1 (en) 1985-05-30

Family

ID=22280989

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8080107602T Expired DE3070561D1 (en) 1979-12-05 1980-12-04 Ion implanted reverse-conducting thyristor

Country Status (7)

Country Link
US (1) US4278476A (Direct)
EP (1) EP0030370B1 (Direct)
JP (1) JPS5693366A (Direct)
BR (1) BR8007898A (Direct)
CA (1) CA1144285A (Direct)
DE (1) DE3070561D1 (Direct)
IN (1) IN152658B (Direct)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4320571A (en) * 1980-10-14 1982-03-23 International Rectifier Corporation Stencil mask process for high power, high speed controlled rectifiers
EP0074133B1 (de) * 1981-08-25 1987-01-28 BBC Aktiengesellschaft Brown, Boveri & Cie. Thyristor
JPS5860577A (ja) * 1981-10-07 1983-04-11 Hitachi Ltd 半導体装置
US4623910A (en) 1982-09-24 1986-11-18 Risberg Robert L Semiconductor device
DE3404834A1 (de) * 1984-02-08 1985-08-08 Hahn-Meitner-Institut für Kernforschung Berlin GmbH, 1000 Berlin Halbleiter-leistungsbauelement, insbesondere thyristor und gridistor, sowie verfahren zu dessen herstellung
JP2579979B2 (ja) * 1987-02-26 1997-02-12 株式会社東芝 半導体素子の製造方法
JPH0642542B2 (ja) * 1988-04-08 1994-06-01 株式会社東芝 高耐圧半導体装置の製造方法
US5136344A (en) * 1988-11-02 1992-08-04 Universal Energy Systems, Inc. High energy ion implanted silicon on insulator structure
DE4121375A1 (de) * 1991-06-28 1993-01-14 Asea Brown Boveri Abschaltbares leistungshalbleiter-bauelement sowie verfahren zu dessen herstellung
US5426059A (en) * 1994-05-26 1995-06-20 Queyssac; Daniel G. Method of making vertically stacked bipolar semiconductor structure
US6787816B1 (en) * 2000-09-01 2004-09-07 Rensselaer Polytechnic Institute Thyristor having one or more doped layers
KR100934829B1 (ko) * 2008-02-15 2009-12-31 주식회사 하이닉스반도체 사이리스터 및 그 제조방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3324359A (en) * 1963-09-30 1967-06-06 Gen Electric Four layer semiconductor switch with the third layer defining a continuous, uninterrupted internal junction
US3428870A (en) * 1965-07-29 1969-02-18 Gen Electric Semiconductor devices
US3622382A (en) * 1969-05-05 1971-11-23 Ibm Semiconductor isolation structure and method of producing
US3641403A (en) * 1970-05-25 1972-02-08 Mitsubishi Electric Corp Thyristor with degenerate semiconductive region
US3662382A (en) * 1970-11-09 1972-05-09 Camera And Instr Corp Keyboard controlled electrical code-signal generator system
US4049478A (en) * 1971-05-12 1977-09-20 Ibm Corporation Utilization of an arsenic diffused emitter in the fabrication of a high performance semiconductor device
US4009059A (en) * 1972-01-08 1977-02-22 Mitsubishi Denki Kabushiki Kaisha Reverse conducting thyristor and process for producing the same
FR2274140A1 (fr) * 1974-06-04 1976-01-02 Alsthom Cgee Thyristor a conduction inverse
CH579827A5 (Direct) * 1974-11-04 1976-09-15 Bbc Brown Boveri & Cie
CH580339A5 (Direct) * 1974-12-23 1976-09-30 Bbc Brown Boveri & Cie
US4038106A (en) * 1975-04-30 1977-07-26 Rca Corporation Four-layer trapatt diode and method for making same
US4080620A (en) * 1975-11-17 1978-03-21 Westinghouse Electric Corporation Reverse switching rectifier and method for making same
US4111720A (en) * 1977-03-31 1978-09-05 International Business Machines Corporation Method for forming a non-epitaxial bipolar integrated circuit
US4168990A (en) * 1977-04-04 1979-09-25 International Rectifier Corporation Hot implantation at 1100°-1300° C. for forming non-gaussian impurity profile

Also Published As

Publication number Publication date
EP0030370B1 (en) 1985-04-24
CA1144285A (en) 1983-04-05
BR8007898A (pt) 1981-06-16
JPS5693366A (en) 1981-07-28
EP0030370A2 (en) 1981-06-17
EP0030370A3 (en) 1981-09-16
US4278476A (en) 1981-07-14
IN152658B (Direct) 1984-03-03

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee