DE3016748C2 - - Google Patents
Info
- Publication number
- DE3016748C2 DE3016748C2 DE3016748A DE3016748A DE3016748C2 DE 3016748 C2 DE3016748 C2 DE 3016748C2 DE 3016748 A DE3016748 A DE 3016748A DE 3016748 A DE3016748 A DE 3016748A DE 3016748 C2 DE3016748 C2 DE 3016748C2
- Authority
- DE
- Germany
- Prior art keywords
- plate
- piezoelectric
- layer
- electromechanical transducer
- elasticity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 26
- 239000004917 carbon fiber Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 description 22
- 239000000835 fiber Substances 0.000 description 13
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000010287 polarization Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000011365 complex material Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54054266A JPS6048112B2 (ja) | 1979-05-02 | 1979-05-02 | 電気・機械変換素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3016748A1 DE3016748A1 (de) | 1980-11-13 |
DE3016748C2 true DE3016748C2 (US07655688-20100202-C00010.png) | 1988-10-06 |
Family
ID=12965758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19803016748 Granted DE3016748A1 (de) | 1979-05-02 | 1980-04-30 | Elektromechanischer wandler |
Country Status (8)
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3010580A1 (de) * | 1980-03-19 | 1981-09-24 | Siemens AG, 1000 Berlin und 8000 München | Aktuator fuer video-bandgeraet |
DE3223801A1 (de) * | 1982-06-25 | 1983-12-29 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung eines piezoelektrischen stellgliedes |
DE3240884A1 (de) * | 1982-11-05 | 1984-05-10 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Keramisches bistabiles biegeelement |
DE3425290A1 (de) * | 1984-07-10 | 1986-01-16 | Atlas Fahrzeugtechnik GmbH, 5980 Werdohl | Piezokeramische ventilplatte und verfahren zu deren herstellung |
FR2567705B1 (fr) * | 1984-07-13 | 1986-11-14 | Thomson Csf | Transducteur piezoelectrique et capteur de pression utilisant un tel transducteur |
US4833659A (en) * | 1984-12-27 | 1989-05-23 | Westinghouse Electric Corp. | Sonar apparatus |
US4769570A (en) * | 1986-04-07 | 1988-09-06 | Toshiba Ceramics Co., Ltd. | Piezo-electric device |
JPS63237044A (ja) * | 1987-03-25 | 1988-10-03 | Minolta Camera Co Ltd | 電歪シヤツタ−駆動装置 |
JPS6420756U (US07655688-20100202-C00010.png) * | 1987-07-27 | 1989-02-01 | ||
JPH02164284A (ja) * | 1988-04-12 | 1990-06-25 | Tomio Kotaki | 超音波アクチュエータ |
US5037208A (en) * | 1989-04-06 | 1991-08-06 | Branson Ultrasonics Corporation | Immersible transducer assembly |
DE3935474A1 (de) * | 1989-06-22 | 1991-01-03 | Hoechst Ceram Tec Ag | Piezoelektrischer biegewandler und seine verwendung |
JPH04216409A (ja) * | 1990-12-18 | 1992-08-06 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JPH05218517A (ja) * | 1992-02-06 | 1993-08-27 | Murata Mfg Co Ltd | 圧電バイモルフ型アクチュエータ |
US5424596A (en) * | 1992-10-05 | 1995-06-13 | Trw Inc. | Activated structure |
US6420819B1 (en) | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
JPH10211701A (ja) * | 1996-11-06 | 1998-08-11 | Seiko Epson Corp | 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法 |
US5834882A (en) * | 1996-12-11 | 1998-11-10 | Face International Corp. | Multi-layer piezoelectric transformer |
DE19732513C2 (de) * | 1997-07-29 | 2002-04-11 | Eurocopter Deutschland | Verfahren zur Herstellung einer Verbundstruktur |
US5942838A (en) * | 1997-08-19 | 1999-08-24 | The Hong Kong University Of Science & Technology | Rotary motor driven by a piezoelectric composite laminate |
ATE345583T1 (de) * | 1997-09-30 | 2006-12-15 | Argillon Gmbh | Piezoelektrisches element |
EP1089353B1 (en) * | 1999-10-01 | 2006-11-08 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
DE10023556A1 (de) * | 2000-05-15 | 2001-11-29 | Festo Ag & Co | Piezo-Biegewandler sowie Verwendung desselben |
DE10025561A1 (de) | 2000-05-24 | 2001-12-06 | Siemens Ag | Energieautarker Hochfrequenzsender |
US20040012308A1 (en) * | 2000-06-21 | 2004-01-22 | Michael Riedel | Piezo-electric bending transducer |
EP1168463A1 (de) * | 2000-06-23 | 2002-01-02 | DORNIER GmbH | Faserverbundwerkstoff mit darin integriertem piezoelektrischem Sensor oder Aktor |
FR2810686B1 (fr) * | 2000-06-23 | 2002-10-11 | Thomson Marconi Sonar Sas | Dispositif antivibratoire pour paroi |
DE10040994C2 (de) * | 2000-08-18 | 2003-12-24 | Univ Dresden Tech | Anordnung zur Erzeugung von Schall im nieder- bis hochfrequenten Bereich |
WO2003005388A2 (en) | 2001-07-03 | 2003-01-16 | Face Bradbury R | Self-powered switch initiation system |
DE20202297U1 (de) * | 2001-09-07 | 2002-08-29 | Drei-S-Werk Präzisionswerkzeuge GmbH & Co Fertigungs-KG, 91126 Schwabach | Flacher Aktor oder Sensor mit interner Vorspannung |
DE10150128C2 (de) | 2001-10-11 | 2003-10-02 | Enocean Gmbh | Drahtloses Sensorsystem |
US6888291B2 (en) * | 2002-10-31 | 2005-05-03 | The Boeing Company | Electrical system for electrostrictive bimorph actuator |
CN100568568C (zh) | 2004-04-23 | 2009-12-09 | 新加坡科技研究局 | 微机电装置 |
US7497133B2 (en) * | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
ATE389241T1 (de) * | 2005-11-25 | 2008-03-15 | Festo Ag & Co | Piezo-biegewandler |
US8481335B2 (en) * | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
US7992431B2 (en) | 2006-11-28 | 2011-08-09 | Drexel University | Piezoelectric microcantilevers and uses in atomic force microscopy |
EP2100125A4 (en) | 2006-11-28 | 2012-02-15 | Univ Drexel | PIEZOELECTRIC MICROCANTILEVER SENSORS FOR BIOSENSORS |
JP2010518380A (ja) | 2007-02-01 | 2010-05-27 | ドレクセル・ユニバーシティー | センサー用途向けハンドヘルド型位相シフト検出器 |
US20080211353A1 (en) * | 2007-03-02 | 2008-09-04 | Charles Erklin Seeley | High temperature bimorph actuator |
WO2009079154A2 (en) | 2007-11-23 | 2009-06-25 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
WO2009126378A2 (en) | 2008-03-11 | 2009-10-15 | Drexel University | Enhanced detection sensitivity with piezoelectric microcantilever sensors |
CN102066928B (zh) * | 2008-05-16 | 2015-08-05 | 德瑞索大学 | 评估组织的系统和方法 |
US8722427B2 (en) * | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
US20110086368A1 (en) * | 2009-10-08 | 2011-04-14 | Drexel University | Method for immune response detection |
US8659211B1 (en) * | 2011-09-26 | 2014-02-25 | Image Acoustics, Inc. | Quad and dual cantilever transduction apparatus |
DE102013205626A1 (de) * | 2013-03-28 | 2014-10-02 | Siemens Aktiengesellschaft | Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul |
US9882115B2 (en) | 2015-04-02 | 2018-01-30 | The Boeing Company | Integrated compliant boundary for piezoelectric bimorph actuator |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2518793A (en) * | 1944-04-10 | 1950-08-15 | Helen Keller | Crystal mounting |
US3447217A (en) * | 1964-02-05 | 1969-06-03 | Hitachi Ltd | Method of producing ceramic piezoelectric vibrator |
CH429228A (de) * | 1964-12-10 | 1967-01-31 | Kistler Instrumente Ag | Piezoelektrischer Einbaukörper zum Einbau in einen piezoelektrischen Wandler |
GB1278996A (en) * | 1968-11-06 | 1972-06-21 | Motorola Inc | Bender bimorph construction |
US3631383A (en) * | 1969-07-25 | 1971-12-28 | Bendix Corp | Piezoelectric transducer configuration |
US3622815A (en) * | 1970-03-25 | 1971-11-23 | Motorola Inc | High reliability ceramic bender |
US3629625A (en) * | 1970-09-17 | 1971-12-21 | Motorola Inc | Piezoelectric bender bilayer with flexible corrugated center vane |
US4047060A (en) * | 1971-09-07 | 1977-09-06 | Motorola, Inc. | Acoustic transducer with elastomeric coupling |
US3979565A (en) * | 1975-08-11 | 1976-09-07 | Westinghouse Electric Corporation | Metal enclosed transducer assembly |
GB2026232B (en) * | 1978-06-02 | 1982-11-17 | Murata Manufacturing Co | Peizoelectric device |
-
1979
- 1979-05-02 JP JP54054266A patent/JPS6048112B2/ja not_active Expired
-
1980
- 1980-04-24 US US06/143,339 patent/US4349762A/en not_active Expired - Lifetime
- 1980-04-28 NL NL8002472A patent/NL8002472A/nl not_active Application Discontinuation
- 1980-04-28 CA CA000350753A patent/CA1154862A/en not_active Expired
- 1980-04-30 FR FR8009867A patent/FR2455840A1/fr active Granted
- 1980-04-30 DE DE19803016748 patent/DE3016748A1/de active Granted
- 1980-04-30 GB GB8014165A patent/GB2052151B/en not_active Expired
- 1980-05-02 AT AT0234480A patent/AT369574B/de active
Also Published As
Publication number | Publication date |
---|---|
FR2455840B1 (US07655688-20100202-C00010.png) | 1985-03-22 |
FR2455840A1 (fr) | 1980-11-28 |
JPS6048112B2 (ja) | 1985-10-25 |
CA1154862A (en) | 1983-10-04 |
GB2052151A (en) | 1981-01-21 |
DE3016748A1 (de) | 1980-11-13 |
GB2052151B (en) | 1983-04-27 |
JPS55146989A (en) | 1980-11-15 |
NL8002472A (nl) | 1980-11-04 |
US4349762A (en) | 1982-09-14 |
AT369574B (de) | 1983-01-10 |
ATA234480A (de) | 1982-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3016748C2 (US07655688-20100202-C00010.png) | ||
DE19816909C2 (de) | Betätigungsglied mit Piezoelement sowie dieses Betätigungselement einsetzender Kopfpositionierungsmechanismus | |
DE2828148C2 (de) | Biegeanordnung | |
DE3012830C2 (US07655688-20100202-C00010.png) | ||
DE69635870T2 (de) | Wandler aus elektroaktivem metall-keramik-komposit | |
DE69316693T2 (de) | Piezoelektrische Kopfbetätigungsvorrichtung | |
DE3046535A1 (de) | Elektromechanischer wandler | |
DE2333813C3 (de) | Ebene Magnetkopfanordnung mit mehreren flachen Magnetkopfstrukturen | |
DE3418409C2 (US07655688-20100202-C00010.png) | ||
DE3881178T2 (de) | Mechanische verstaerkungsanordnung fuer piezoelektrische elemente. | |
DE19954020A1 (de) | Verfahren zur Herstellung eines piezoelektrischen Wandlers | |
DE3150801A1 (de) | Ringlaser-oszillationsantrieb | |
DE69022465T2 (de) | Statischer Lese-Magnetkopf. | |
DE3134480C2 (US07655688-20100202-C00010.png) | ||
DE2328484A1 (de) | Verfahren zur herstellung von magnetischen wandlerkoepfen | |
DE3888257T2 (de) | Informationsaufzeichnungsplatten. | |
DE3532615A1 (de) | Anordnung in einem hydrophon | |
DE2457816C3 (de) | Künstliche linse (ür elektromagnetische Wellen und Verfahren zu deren Herstellung | |
DE69319808T2 (de) | Schwimmender Magnetkopf | |
DE3610998A1 (de) | Duennfilm-magnetkopf | |
DE2260972A1 (de) | Magnetaufzeichnungskopf | |
WO1992002961A1 (de) | Kontaktierung eines piezoelektrischen biegewandlers | |
EP0036187A1 (de) | Aktuator für Video-Bandgerät | |
DE19704389A1 (de) | Aktor aus Einzelelementen | |
DE69223855T2 (de) | Mittel zum Montieren eines länglichen Körpers |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN |