DE3009163A1 - Messwertaufnehmer fuer druck - Google Patents

Messwertaufnehmer fuer druck

Info

Publication number
DE3009163A1
DE3009163A1 DE19803009163 DE3009163A DE3009163A1 DE 3009163 A1 DE3009163 A1 DE 3009163A1 DE 19803009163 DE19803009163 DE 19803009163 DE 3009163 A DE3009163 A DE 3009163A DE 3009163 A1 DE3009163 A1 DE 3009163A1
Authority
DE
Germany
Prior art keywords
carrier
face
membrane
semiconductor
piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19803009163
Other languages
German (de)
English (en)
Other versions
DE3009163C2 (https=
Inventor
Reiner Dipl.-Phys. 7500 Karlsruhe Krause
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to DE19803009163 priority Critical patent/DE3009163A1/de
Priority to JP3446181A priority patent/JPS56142431A/ja
Publication of DE3009163A1 publication Critical patent/DE3009163A1/de
Application granted granted Critical
Publication of DE3009163C2 publication Critical patent/DE3009163C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19803009163 1980-03-10 1980-03-10 Messwertaufnehmer fuer druck Granted DE3009163A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19803009163 DE3009163A1 (de) 1980-03-10 1980-03-10 Messwertaufnehmer fuer druck
JP3446181A JPS56142431A (en) 1980-03-10 1981-03-10 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803009163 DE3009163A1 (de) 1980-03-10 1980-03-10 Messwertaufnehmer fuer druck

Publications (2)

Publication Number Publication Date
DE3009163A1 true DE3009163A1 (de) 1981-09-24
DE3009163C2 DE3009163C2 (https=) 1989-03-09

Family

ID=6096770

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803009163 Granted DE3009163A1 (de) 1980-03-10 1980-03-10 Messwertaufnehmer fuer druck

Country Status (2)

Country Link
JP (1) JPS56142431A (https=)
DE (1) DE3009163A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0140992A1 (de) * 1983-11-10 1985-05-15 Kristal Instrumente AG Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer
DE4207848A1 (de) * 1992-03-12 1993-09-16 Jenoptik Jena Gmbh Einrichtung zur kraft- und druckmessung in mindestens einer komponente

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889873A (ja) * 1981-11-24 1983-05-28 Nippon Denso Co Ltd 半導体圧力変換器
JP4685662B2 (ja) * 2005-03-03 2011-05-18 エア・ウォーター株式会社 ガス分離方法およびそれに用いる装置
EP2184576B1 (en) 2007-08-27 2019-05-15 Hitachi, Ltd. Semiconductor strain sensor
JP2009053005A (ja) * 2007-08-27 2009-03-12 Hitachi Metals Ltd 半導体歪センサーおよび半導体歪センサーの取付け方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2248004A1 (de) * 1971-10-01 1973-04-19 Hitachi Ltd Halbleiter-druckwandler
DE2617731B2 (de) * 1976-04-23 1978-09-14 Siemens Ag, 1000 Berlin Und 8000 Muenchen Miniaturdruckmeßwandler

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2248004A1 (de) * 1971-10-01 1973-04-19 Hitachi Ltd Halbleiter-druckwandler
DE2617731B2 (de) * 1976-04-23 1978-09-14 Siemens Ag, 1000 Berlin Und 8000 Muenchen Miniaturdruckmeßwandler

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0140992A1 (de) * 1983-11-10 1985-05-15 Kristal Instrumente AG Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer
US4675643A (en) * 1983-11-10 1987-06-23 Kristal Instrumente Ag Pressure transducer utilizing a transduction element
DE4207848A1 (de) * 1992-03-12 1993-09-16 Jenoptik Jena Gmbh Einrichtung zur kraft- und druckmessung in mindestens einer komponente

Also Published As

Publication number Publication date
DE3009163C2 (https=) 1989-03-09
JPS56142431A (en) 1981-11-06

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee