DE3002643C2 - Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten - Google Patents
Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie SchutzschichtenInfo
- Publication number
- DE3002643C2 DE3002643C2 DE3002643A DE3002643A DE3002643C2 DE 3002643 C2 DE3002643 C2 DE 3002643C2 DE 3002643 A DE3002643 A DE 3002643A DE 3002643 A DE3002643 A DE 3002643A DE 3002643 C2 DE3002643 C2 DE 3002643C2
- Authority
- DE
- Germany
- Prior art keywords
- workpieces
- starting compound
- vacuum chamber
- chamber
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011241 protective layer Substances 0.000 title claims description 18
- 239000011248 coating agent Substances 0.000 title claims description 14
- 238000000576 coating method Methods 0.000 title claims description 14
- 229910052751 metal Inorganic materials 0.000 title claims description 8
- 239000002184 metal Substances 0.000 title claims description 8
- 239000007858 starting material Substances 0.000 claims description 25
- 239000010410 layer Substances 0.000 claims description 7
- 230000000379 polymerizing effect Effects 0.000 claims description 2
- 230000000977 initiatory effect Effects 0.000 claims 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 16
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- XRWSZZJLZRKHHD-WVWIJVSJSA-N asunaprevir Chemical compound O=C([C@@H]1C[C@H](CN1C(=O)[C@@H](NC(=O)OC(C)(C)C)C(C)(C)C)OC1=NC=C(C2=CC=C(Cl)C=C21)OC)N[C@]1(C(=O)NS(=O)(=O)C2CC2)C[C@H]1C=C XRWSZZJLZRKHHD-WVWIJVSJSA-N 0.000 description 3
- 229940125961 compound 24 Drugs 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MFLCLMHBOLWTHH-UHFFFAOYSA-N Panial Natural products COc1ccc2C=CC(=O)Oc2c1C(O)C=C(/C)C=O MFLCLMHBOLWTHH-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/30—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors
- F21S41/37—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors characterised by their material, surface treatment or coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
- F21V7/24—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by the material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
- F21V7/28—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7937775A GB2062013B (en) | 1979-10-31 | 1979-10-31 | Coating reflecting surfaces with organic layer by glow discharge |
| DE3002643A DE3002643C2 (de) | 1979-10-31 | 1980-01-25 | Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten |
| FR8003322A FR2476142A1 (fr) | 1979-10-31 | 1980-02-14 | Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7937775A GB2062013B (en) | 1979-10-31 | 1979-10-31 | Coating reflecting surfaces with organic layer by glow discharge |
| DE3002643A DE3002643C2 (de) | 1979-10-31 | 1980-01-25 | Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten |
| FR8003322A FR2476142A1 (fr) | 1979-10-31 | 1980-02-14 | Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3002643A1 DE3002643A1 (de) | 1981-09-10 |
| DE3002643C2 true DE3002643C2 (de) | 1987-03-26 |
Family
ID=27188453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3002643A Expired DE3002643C2 (de) | 1979-10-31 | 1980-01-25 | Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3002643C2 (enExample) |
| FR (1) | FR2476142A1 (enExample) |
| GB (1) | GB2062013B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4778721A (en) * | 1986-07-09 | 1988-10-18 | Battelle Memorial Institute | Method of forming abrasion-resistant plasma coatings and resulting articles |
| GB8708436D0 (en) * | 1987-04-08 | 1987-05-13 | British Telecomm | Reagent source |
| DE19608158C1 (de) * | 1996-03-04 | 1997-08-28 | Dresden Vakuumtech Gmbh | Verfahren und Einrichtung zur Hochfrequenz-Plasmapolymerisation |
| DE19704947A1 (de) * | 1997-02-10 | 1998-08-13 | Leybold Systems Gmbh | Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten |
| EP0962260B1 (en) * | 1998-05-28 | 2005-01-05 | Ulvac, Inc. | Material evaporation system |
| DE69836039T2 (de) * | 1998-05-28 | 2007-12-06 | ULVAC, Inc., Chigasaki | Verdampfungsquelle für organisches Material |
| US6275649B1 (en) | 1998-06-01 | 2001-08-14 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus |
| US6473564B1 (en) | 2000-01-07 | 2002-10-29 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of manufacturing thin organic film |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES355157A1 (es) * | 1967-06-08 | 1969-11-16 | Western Electric Co | Procedimiento para producir un revestimiento de polimero sobre un sustrato. |
| DD99612A1 (enExample) * | 1972-11-10 | 1973-08-20 | ||
| DE2620878A1 (de) * | 1975-05-13 | 1976-11-25 | Lucas Industries Ltd | Verfahren zur ablagerung eines metalls und eines kunstharzmaterials auf einem substrat und verfahren zur herstellung einer lampe |
| DE2536013A1 (de) * | 1975-08-13 | 1977-03-03 | Bosch Gmbh Robert | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
| DE2537416B2 (de) * | 1975-08-22 | 1977-06-30 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur herstellung einer schutzschicht auf der oberflaeche optischer reflektoren |
| SE435297B (sv) * | 1975-08-22 | 1984-09-17 | Bosch Gmbh Robert | Optiska reflektorer framstellda genom att reflektorytan belegges med ett skyddsskikt |
| CA1077787A (en) * | 1975-11-21 | 1980-05-20 | National Aeronautics And Space Administration | Abrasion resistant coatings for plastic surfaces |
-
1979
- 1979-10-31 GB GB7937775A patent/GB2062013B/en not_active Expired
-
1980
- 1980-01-25 DE DE3002643A patent/DE3002643C2/de not_active Expired
- 1980-02-14 FR FR8003322A patent/FR2476142A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2062013B (en) | 1984-07-04 |
| FR2476142B1 (enExample) | 1982-03-12 |
| DE3002643A1 (de) | 1981-09-10 |
| FR2476142A1 (fr) | 1981-08-21 |
| GB2062013A (en) | 1981-05-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted | ||
| 8339 | Ceased/non-payment of the annual fee |