DE29619077U1 - Zweifrequenz-Laserwegmeßsystem - Google Patents

Zweifrequenz-Laserwegmeßsystem

Info

Publication number
DE29619077U1
DE29619077U1 DE29619077U DE29619077U DE29619077U1 DE 29619077 U1 DE29619077 U1 DE 29619077U1 DE 29619077 U DE29619077 U DE 29619077U DE 29619077 U DE29619077 U DE 29619077U DE 29619077 U1 DE29619077 U1 DE 29619077U1
Authority
DE
Germany
Prior art keywords
measuring system
position measuring
dual frequency
frequency laser
laser position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29619077U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JENAER MESTECHNIK GmbH
Original Assignee
JENAER MESTECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JENAER MESTECHNIK GmbH filed Critical JENAER MESTECHNIK GmbH
Priority to DE29619077U priority Critical patent/DE29619077U1/de
Publication of DE29619077U1 publication Critical patent/DE29619077U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
DE29619077U 1996-11-02 1996-11-02 Zweifrequenz-Laserwegmeßsystem Expired - Lifetime DE29619077U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29619077U DE29619077U1 (de) 1996-11-02 1996-11-02 Zweifrequenz-Laserwegmeßsystem

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29619077U DE29619077U1 (de) 1996-11-02 1996-11-02 Zweifrequenz-Laserwegmeßsystem

Publications (1)

Publication Number Publication Date
DE29619077U1 true DE29619077U1 (de) 1997-02-20

Family

ID=8031426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29619077U Expired - Lifetime DE29619077U1 (de) 1996-11-02 1996-11-02 Zweifrequenz-Laserwegmeßsystem

Country Status (1)

Country Link
DE (1) DE29619077U1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19851307A1 (de) * 1998-10-08 2000-04-13 Z & F Zoller & Froehlich Gmbh System und Verfahren zum Ermitteln mindestens einer physikalischen Größe
DE102007025037B3 (de) * 2007-05-29 2008-12-18 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Ermitteln eines Frequenz- und/oder Phasenunterschieds

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19851307A1 (de) * 1998-10-08 2000-04-13 Z & F Zoller & Froehlich Gmbh System und Verfahren zum Ermitteln mindestens einer physikalischen Größe
DE19851307B4 (de) * 1998-10-08 2007-12-27 Zoller & Fröhlich GmbH System und Verfahren zum Ermitteln mindestens einer physikalischen Größe
DE102007025037B3 (de) * 2007-05-29 2008-12-18 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Ermitteln eines Frequenz- und/oder Phasenunterschieds

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Legal Events

Date Code Title Description
R086 Non-binding declaration of licensing interest
R207 Utility model specification

Effective date: 19970403

R150 Term of protection extended to 6 years

Effective date: 20000223

R151 Term of protection extended to 8 years

Effective date: 20030617

R158 Lapse of ip right after 8 years

Effective date: 20050601