DE2961004D1 - Device and method for the polishing of loose workpieces - Google Patents
Device and method for the polishing of loose workpiecesInfo
- Publication number
- DE2961004D1 DE2961004D1 DE7979102456T DE2961004T DE2961004D1 DE 2961004 D1 DE2961004 D1 DE 2961004D1 DE 7979102456 T DE7979102456 T DE 7979102456T DE 2961004 T DE2961004 T DE 2961004T DE 2961004 D1 DE2961004 D1 DE 2961004D1
- Authority
- DE
- Germany
- Prior art keywords
- polishing
- workpieces
- loose
- loose workpieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US93370578A | 1978-08-15 | 1978-08-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2961004D1 true DE2961004D1 (en) | 1981-12-24 |
Family
ID=25464383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE7979102456T Expired DE2961004D1 (en) | 1978-08-15 | 1979-07-16 | Device and method for the polishing of loose workpieces |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0008360B1 (de) |
JP (1) | JPS5531582A (de) |
CA (1) | CA1106611A (de) |
DE (1) | DE2961004D1 (de) |
IT (1) | IT1163691B (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS639406Y2 (de) * | 1981-01-22 | 1988-03-19 | ||
US5533923A (en) * | 1995-04-10 | 1996-07-09 | Applied Materials, Inc. | Chemical-mechanical polishing pad providing polishing unformity |
US6081959A (en) * | 1996-07-01 | 2000-07-04 | Umbrell; Richard | Buffer centering system |
US6105197A (en) * | 1998-04-14 | 2000-08-22 | Umbrell; Richard T. | Centering system for buffing pad |
US6298518B1 (en) | 1998-04-14 | 2001-10-09 | Richard T. Umbrell | Heat dissipating buffing pad |
DE10004578C1 (de) * | 2000-02-03 | 2001-07-26 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Halbleiterscheibe mit polierter Kante |
DE102004010379A1 (de) * | 2004-03-03 | 2005-09-22 | Schott Ag | Verfahren zur Herstellung von Wafern mit defektarmen Oberflächen, die Verwendung solcher Wafer und damit erhaltene elektronische Bauteile |
JP5421628B2 (ja) * | 2009-03-23 | 2014-02-19 | 富士紡ホールディングス株式会社 | 研磨布および研磨布の製造方法 |
JP5545536B2 (ja) * | 2010-04-27 | 2014-07-09 | 株式会社Sumco | ウェーハの研磨方法、研磨パッド、研磨装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7010086A (de) * | 1969-07-18 | 1971-01-20 | ||
US3715842A (en) * | 1970-07-02 | 1973-02-13 | Tizon Chem Corp | Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces |
NL7114274A (de) * | 1970-10-21 | 1972-04-25 | ||
US3691694A (en) * | 1970-11-02 | 1972-09-19 | Ibm | Wafer polishing machine |
DE2305188A1 (de) * | 1973-02-02 | 1974-08-08 | Wacker Chemitronic | Verfahren zur herstellung von polierten halbleiteroberflaechen |
JPS5363695A (en) * | 1976-11-17 | 1978-06-07 | Hitachi Ltd | Method of finish polishing |
-
1979
- 1979-06-29 JP JP8158379A patent/JPS5531582A/ja active Granted
- 1979-07-12 CA CA331,675A patent/CA1106611A/en not_active Expired
- 1979-07-16 EP EP79102456A patent/EP0008360B1/de not_active Expired
- 1979-07-16 DE DE7979102456T patent/DE2961004D1/de not_active Expired
- 1979-08-07 IT IT24956/79A patent/IT1163691B/it active
Also Published As
Publication number | Publication date |
---|---|
CA1106611A (en) | 1981-08-11 |
IT7924956A0 (it) | 1979-08-07 |
EP0008360B1 (de) | 1981-10-14 |
IT1163691B (it) | 1987-04-08 |
JPS5531582A (en) | 1980-03-05 |
EP0008360A1 (de) | 1980-03-05 |
JPS6234509B2 (de) | 1987-07-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8339 | Ceased/non-payment of the annual fee |