JPS5531582A - Free polishing device - Google Patents

Free polishing device

Info

Publication number
JPS5531582A
JPS5531582A JP8158379A JP8158379A JPS5531582A JP S5531582 A JPS5531582 A JP S5531582A JP 8158379 A JP8158379 A JP 8158379A JP 8158379 A JP8158379 A JP 8158379A JP S5531582 A JPS5531582 A JP S5531582A
Authority
JP
Japan
Prior art keywords
polishing device
free polishing
free
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8158379A
Other languages
English (en)
Other versions
JPS6234509B2 (ja
Inventor
Esu Bashi Jiyagutaa
Jiei Raianzu Binsento
Menderu Eritsuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5531582A publication Critical patent/JPS5531582A/ja
Publication of JPS6234509B2 publication Critical patent/JPS6234509B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP8158379A 1978-08-15 1979-06-29 Free polishing device Granted JPS5531582A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93370578A 1978-08-15 1978-08-15

Publications (2)

Publication Number Publication Date
JPS5531582A true JPS5531582A (en) 1980-03-05
JPS6234509B2 JPS6234509B2 (ja) 1987-07-27

Family

ID=25464383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8158379A Granted JPS5531582A (en) 1978-08-15 1979-06-29 Free polishing device

Country Status (5)

Country Link
EP (1) EP0008360B1 (ja)
JP (1) JPS5531582A (ja)
CA (1) CA1106611A (ja)
DE (1) DE2961004D1 (ja)
IT (1) IT1163691B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121565U (ja) * 1981-01-22 1981-09-16
JP2010221316A (ja) * 2009-03-23 2010-10-07 Fujibo Holdings Inc 研磨布
JP2011230219A (ja) * 2010-04-27 2011-11-17 Sumco Corp ウェーハの研磨方法、研磨パッド、研磨装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5533923A (en) * 1995-04-10 1996-07-09 Applied Materials, Inc. Chemical-mechanical polishing pad providing polishing unformity
US6081959A (en) * 1996-07-01 2000-07-04 Umbrell; Richard Buffer centering system
US6105197A (en) * 1998-04-14 2000-08-22 Umbrell; Richard T. Centering system for buffing pad
US6298518B1 (en) 1998-04-14 2001-10-09 Richard T. Umbrell Heat dissipating buffing pad
DE10004578C1 (de) * 2000-02-03 2001-07-26 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe mit polierter Kante
DE102004010379A1 (de) * 2004-03-03 2005-09-22 Schott Ag Verfahren zur Herstellung von Wafern mit defektarmen Oberflächen, die Verwendung solcher Wafer und damit erhaltene elektronische Bauteile

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363695A (en) * 1976-11-17 1978-06-07 Hitachi Ltd Method of finish polishing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7010086A (ja) * 1969-07-18 1971-01-20
US3715842A (en) * 1970-07-02 1973-02-13 Tizon Chem Corp Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces
NL7114274A (ja) * 1970-10-21 1972-04-25
US3691694A (en) * 1970-11-02 1972-09-19 Ibm Wafer polishing machine
DE2305188A1 (de) * 1973-02-02 1974-08-08 Wacker Chemitronic Verfahren zur herstellung von polierten halbleiteroberflaechen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363695A (en) * 1976-11-17 1978-06-07 Hitachi Ltd Method of finish polishing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121565U (ja) * 1981-01-22 1981-09-16
JPS639406Y2 (ja) * 1981-01-22 1988-03-19
JP2010221316A (ja) * 2009-03-23 2010-10-07 Fujibo Holdings Inc 研磨布
JP2011230219A (ja) * 2010-04-27 2011-11-17 Sumco Corp ウェーハの研磨方法、研磨パッド、研磨装置

Also Published As

Publication number Publication date
CA1106611A (en) 1981-08-11
DE2961004D1 (en) 1981-12-24
IT7924956A0 (it) 1979-08-07
EP0008360B1 (de) 1981-10-14
IT1163691B (it) 1987-04-08
EP0008360A1 (de) 1980-03-05
JPS6234509B2 (ja) 1987-07-27

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