DE2631914A1 - Ionengetterpumpe - Google Patents
IonengetterpumpeInfo
- Publication number
- DE2631914A1 DE2631914A1 DE19762631914 DE2631914A DE2631914A1 DE 2631914 A1 DE2631914 A1 DE 2631914A1 DE 19762631914 DE19762631914 DE 19762631914 DE 2631914 A DE2631914 A DE 2631914A DE 2631914 A1 DE2631914 A1 DE 2631914A1
- Authority
- DE
- Germany
- Prior art keywords
- sublimator
- anode
- reflection electrode
- electron source
- getter pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 150000002500 ions Chemical class 0.000 description 16
- 239000000463 material Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BG3056175 | 1975-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2631914A1 true DE2631914A1 (de) | 1977-02-03 |
Family
ID=3901446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762631914 Withdrawn DE2631914A1 (de) | 1975-07-17 | 1976-07-15 | Ionengetterpumpe |
Country Status (6)
| Country | Link |
|---|---|
| CS (1) | CS185078B1 (enExample) |
| DD (1) | DD125057A1 (enExample) |
| DE (1) | DE2631914A1 (enExample) |
| FR (1) | FR2318498A1 (enExample) |
| HU (1) | HU172253B (enExample) |
| PL (1) | PL116557B1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9057362B2 (en) * | 2011-09-28 | 2015-06-16 | The Boeing Company | Sublimation pump and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3330472A (en) * | 1965-10-01 | 1967-07-11 | Nat Res Corp | Vacuum device |
| US3510712A (en) * | 1967-10-20 | 1970-05-05 | Varian Associates | Electron orbiting getter vacuum pump employing a time varying magnetic field |
-
1976
- 1976-07-13 DD DD19383176A patent/DD125057A1/xx unknown
- 1976-07-15 DE DE19762631914 patent/DE2631914A1/de not_active Withdrawn
- 1976-07-16 FR FR7621881A patent/FR2318498A1/fr not_active Withdrawn
- 1976-07-16 HU HU76II00000242A patent/HU172253B/hu not_active IP Right Cessation
- 1976-07-17 PL PL19125976A patent/PL116557B1/pl unknown
- 1976-07-19 CS CS476976A patent/CS185078B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DD125057A1 (enExample) | 1977-03-30 |
| FR2318498A1 (fr) | 1977-02-11 |
| CS185078B1 (en) | 1978-09-15 |
| HU172253B (hu) | 1978-07-28 |
| PL116557B1 (en) | 1981-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8139 | Disposal/non-payment of the annual fee |