DE2627862C2 - Elektronenstrahler - Google Patents

Elektronenstrahler

Info

Publication number
DE2627862C2
DE2627862C2 DE2627862A DE2627862A DE2627862C2 DE 2627862 C2 DE2627862 C2 DE 2627862C2 DE 2627862 A DE2627862 A DE 2627862A DE 2627862 A DE2627862 A DE 2627862A DE 2627862 C2 DE2627862 C2 DE 2627862C2
Authority
DE
Germany
Prior art keywords
cathode
radiator according
rods
insulating body
heating wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2627862A
Other languages
German (de)
English (en)
Other versions
DE2627862A1 (de
Inventor
Paul Saint Maur Val de Marne Dumonte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sciaky SAS
Original Assignee
Sciaky SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sciaky SAS filed Critical Sciaky SAS
Publication of DE2627862A1 publication Critical patent/DE2627862A1/de
Application granted granted Critical
Publication of DE2627862C2 publication Critical patent/DE2627862C2/de
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315Electron-beam or ion-beam tubes for localised treatment of objects for welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
DE2627862A 1975-06-23 1976-06-22 Elektronenstrahler Expired DE2627862C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7519604A FR2315766A1 (fr) 1975-06-23 1975-06-23 Canon a electrons

Publications (2)

Publication Number Publication Date
DE2627862A1 DE2627862A1 (de) 1977-01-13
DE2627862C2 true DE2627862C2 (de) 1986-01-23

Family

ID=9156881

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2627862A Expired DE2627862C2 (de) 1975-06-23 1976-06-22 Elektronenstrahler

Country Status (4)

Country Link
US (1) US4057746A (enExample)
DE (1) DE2627862C2 (enExample)
FR (1) FR2315766A1 (enExample)
GB (1) GB1556405A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19537229C1 (de) * 1995-10-06 1997-01-30 Saechsische Elektronenstrahl G Strahlerzeuger für eine Axial-Elektronenkanone

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4340837A (en) * 1980-01-10 1982-07-20 The United States Of America As Represented By The Secretary Of The Air Force Low volume, lightweight, high voltage electron gun
DE3029624A1 (de) * 1980-08-05 1982-03-11 Fa. Carl Zeiss, 7920 Heidenheim Hochspannungsdurchfuehrung
EP0196710A1 (en) * 1985-03-28 1986-10-08 Koninklijke Philips Electronics N.V. Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt cylinder unit
DE3534792A1 (de) * 1985-09-30 1987-04-02 Leybold Heraeus Gmbh & Co Kg Elektronenstrahlerzeuger mit einer direkt und einer indirekt beheizbaren katode
CA1286769C (en) * 1988-01-07 1991-07-23 Hans Joachim Kolpin Electron gun design
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
US8159118B2 (en) * 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
UA113827C2 (xx) * 2016-09-07 2017-03-10 Аксіальна електронна гармата

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE842375C (de) * 1950-09-08 1952-06-26 Siemens Ag Elektronenroehre mit Gluehkathode
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
FR1348046A (fr) * 1962-02-17 1964-01-04 Heraeus Gmbh W C Cathode incandescente
BE635590A (enExample) * 1962-07-30
NL6513665A (enExample) * 1965-10-22 1967-04-24
GB1161877A (en) * 1965-11-03 1969-08-20 Emi Ltd Improvements relating to Electron Discharged Devices, especially Klystrons.
GB1163530A (en) * 1965-12-14 1969-09-10 Steigerwald Strahltech Electron beam generating apparatus
FR1514813A (fr) * 1967-03-17 1968-02-23 Lokomotivbau Elektrotech Dispositif cathodique à cathode massive à grande surface en hexaborure de lanthanepour générateur de rayons électroniques
US3609400A (en) * 1969-11-03 1971-09-28 Philco Ford Corp Plural electron gun assembly
US3681643A (en) * 1970-10-15 1972-08-01 Philips Corp Cathode-system in which the cathode is supported by prestressed wires

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19537229C1 (de) * 1995-10-06 1997-01-30 Saechsische Elektronenstrahl G Strahlerzeuger für eine Axial-Elektronenkanone

Also Published As

Publication number Publication date
GB1556405A (en) 1979-11-21
FR2315766A1 (fr) 1977-01-21
FR2315766B1 (enExample) 1980-08-29
US4057746A (en) 1977-11-08
DE2627862A1 (de) 1977-01-13

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee