DE2552263A1 - Verfahren zum pruefen von strukturen - Google Patents

Verfahren zum pruefen von strukturen

Info

Publication number
DE2552263A1
DE2552263A1 DE19752552263 DE2552263A DE2552263A1 DE 2552263 A1 DE2552263 A1 DE 2552263A1 DE 19752552263 DE19752552263 DE 19752552263 DE 2552263 A DE2552263 A DE 2552263A DE 2552263 A1 DE2552263 A1 DE 2552263A1
Authority
DE
Germany
Prior art keywords
electromagnetic radiation
correlator
radiation
image plane
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19752552263
Other languages
German (de)
English (en)
Inventor
Egon Dipl Phys Dr Greiner
Karl-Heinz Dipl Phys Moeckel
Guenter Dipl Ing Thorwirth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH filed Critical Jenoptik Jena GmbH
Publication of DE2552263A1 publication Critical patent/DE2552263A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE19752552263 1975-02-24 1975-11-21 Verfahren zum pruefen von strukturen Withdrawn DE2552263A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD184353A DD119481A1 (enExample) 1975-02-24 1975-02-24

Publications (1)

Publication Number Publication Date
DE2552263A1 true DE2552263A1 (de) 1976-09-02

Family

ID=5499271

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752552263 Withdrawn DE2552263A1 (de) 1975-02-24 1975-11-21 Verfahren zum pruefen von strukturen

Country Status (3)

Country Link
US (1) US4158502A (enExample)
DD (1) DD119481A1 (enExample)
DE (1) DE2552263A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0535564A1 (en) * 1991-09-30 1993-04-07 Matsushita Electric Industrial Co., Ltd. Fourier transform lens assembly and optical information processor employing same

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4511219A (en) * 1982-06-15 1985-04-16 The United States Of America As Represented By The Secretary Of The Air Force Kalman filter preprocessor
US5107351A (en) * 1990-02-16 1992-04-21 Grumman Aerospace Corporation Image enhanced optical correlator system
IL107601A (en) * 1992-12-21 1997-09-30 Johnson & Johnson Vision Prod Illumination and imaging subsystems for a lens inspection system
US5769227A (en) * 1994-04-01 1998-06-23 Insight, Inc. Box container systems and display frames with two-dimensional multiple view optics
US5930033A (en) * 1997-08-13 1999-07-27 Marine Biological Labortory Slit scan centrifuge microscope
SG87848A1 (en) 1998-11-05 2002-04-16 Johnson & Johnson Vision Prod Missing lens detection system and method
US6246062B1 (en) 1998-11-05 2001-06-12 Johnson & Johnson Vision Care, Inc. Missing lens detection system and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743423A (en) * 1972-05-03 1973-07-03 Westinghouse Electric Corp Intensity spatial filter having uniformly spaced filter elements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0535564A1 (en) * 1991-09-30 1993-04-07 Matsushita Electric Industrial Co., Ltd. Fourier transform lens assembly and optical information processor employing same
US5383056A (en) * 1991-09-30 1995-01-17 Matsushita Electric Industrial Co., Ltd. Fourier transform lens assembly and optical information processor employing same
US5526191A (en) * 1991-09-30 1996-06-11 Matsushita Electric Industrial Co., Ltd. Fourier transform lens assembly

Also Published As

Publication number Publication date
DD119481A1 (enExample) 1976-04-20
US4158502A (en) 1979-06-19

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination