DE2457474C3 - Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper - Google Patents

Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper

Info

Publication number
DE2457474C3
DE2457474C3 DE2457474A DE2457474A DE2457474C3 DE 2457474 C3 DE2457474 C3 DE 2457474C3 DE 2457474 A DE2457474 A DE 2457474A DE 2457474 A DE2457474 A DE 2457474A DE 2457474 C3 DE2457474 C3 DE 2457474C3
Authority
DE
Germany
Prior art keywords
layer
percent
weight
refractive index
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2457474A
Other languages
German (de)
English (en)
Other versions
DE2457474B2 (de
DE2457474A1 (de
Inventor
Gerhard Dipl.-Phys. Dr. 6450 Hanau Kienel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE2457474A priority Critical patent/DE2457474C3/de
Priority to IT29829/75A priority patent/IT1051763B/it
Priority to GB5008475A priority patent/GB1466640A/en
Priority to FR7537345A priority patent/FR2293719A1/fr
Publication of DE2457474A1 publication Critical patent/DE2457474A1/de
Publication of DE2457474B2 publication Critical patent/DE2457474B2/de
Application granted granted Critical
Publication of DE2457474C3 publication Critical patent/DE2457474C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
    • C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Filters (AREA)
  • Physical Vapour Deposition (AREA)
DE2457474A 1974-12-05 1974-12-05 Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper Expired DE2457474C3 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE2457474A DE2457474C3 (de) 1974-12-05 1974-12-05 Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper
IT29829/75A IT1051763B (it) 1974-12-05 1975-11-28 Processo per la preparazione di strati atti a diminuire la riflessione con effetto di interferenza e corpi ottici prodotti da questo processo
GB5008475A GB1466640A (en) 1974-12-05 1975-12-05 Multiple layer of anti-reflection coatings for optical purposes
FR7537345A FR2293719A1 (fr) 1974-12-05 1975-12-05 Procede de preparation de systemes multicouches permettant d'attenuer les reflets, par un effet d'interferences, et les elements optiques prepares par ce procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2457474A DE2457474C3 (de) 1974-12-05 1974-12-05 Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper

Publications (3)

Publication Number Publication Date
DE2457474A1 DE2457474A1 (de) 1976-06-10
DE2457474B2 DE2457474B2 (de) 1978-02-09
DE2457474C3 true DE2457474C3 (de) 1978-10-19

Family

ID=5932558

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2457474A Expired DE2457474C3 (de) 1974-12-05 1974-12-05 Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper

Country Status (4)

Country Link
DE (1) DE2457474C3 (nl)
FR (1) FR2293719A1 (nl)
GB (1) GB1466640A (nl)
IT (1) IT1051763B (nl)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3009533C2 (de) * 1980-03-12 1986-11-06 D. Swarovski & Co., Wattens, Tirol Belag mit mittlerem Brechwert, Verfahren zu dessen Herstellung und Verwendung des Belages
DE3026703C2 (de) * 1980-07-15 1983-01-27 Will Wetzlar Gmbh, 6330 Wetzlar Verfahren zur Herstellung eines Antireflexbelages auf einem transparenten Material, wie einem optischen Glas
DE3302827A1 (de) * 1983-01-28 1984-08-02 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum herstellen von optischen elementen mit interferenzschichten
JPH0642003B2 (ja) * 1983-09-20 1994-06-01 オリンパス光学工業株式会社 光学部品の反射防止膜とその形成方法
ES2077562T3 (es) * 1987-07-22 1995-12-01 Philips Electronics Nv Filtro de interferencia optico.
JP2561946B2 (ja) * 1988-08-31 1996-12-11 ホーヤ株式会社 多層膜裏面反射鏡
US5170291A (en) * 1989-12-19 1992-12-08 Leybold Aktiengesellschaft Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating
DE4117256A1 (de) * 1989-12-19 1992-12-03 Leybold Ag Belag, bestehend aus einem optisch wirkenden schichtsystem, fuer substrate, wobei das schichtsystem insbesondere eine hohe antireflexwirkung aufweist
US5318830A (en) * 1991-05-29 1994-06-07 Central Glass Company, Limited Glass pane with reflectance reducing coating
JP3014208B2 (ja) * 1992-02-27 2000-02-28 三菱電機株式会社 半導体光素子
WO1997008357A1 (en) * 1995-08-30 1997-03-06 Nashua Corporation Anti-reflective coating
WO1998035245A1 (en) * 1997-02-11 1998-08-13 Mcdonnell Douglas Corporation High efficiency anti-reflectance coating and associated fabrication method
WO1998055414A1 (fr) * 1997-06-03 1998-12-10 Nippon Sheet Glass Co., Ltd. Article en verre a reflectance faible et son procede de preparation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185020A (en) 1961-09-07 1965-05-25 Optical Coating Laboratory Inc Three layer anti-reflection coating
US3604784A (en) 1969-01-21 1971-09-14 Bausch & Lomb Antireflection coatings
US3695910A (en) 1969-01-21 1972-10-03 Anthony W Louderback Method of applying a multilayer antireflection coating to a substrate
DE2210505A1 (de) 1972-03-04 1973-09-20 Zeiss Carl Fa Verfahren zur herstellung einer entspiegelungsschicht auf optischen elementen aus transparentem thermisch empfindlichem material, insbesondere aus kunststoff

Also Published As

Publication number Publication date
FR2293719A1 (fr) 1976-07-02
DE2457474B2 (de) 1978-02-09
FR2293719B1 (nl) 1978-12-08
IT1051763B (it) 1981-05-20
GB1466640A (en) 1977-03-09
DE2457474A1 (de) 1976-06-10

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee