DE2364790C2 - Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente - Google Patents
Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-BauelementeInfo
- Publication number
- DE2364790C2 DE2364790C2 DE19732364790 DE2364790A DE2364790C2 DE 2364790 C2 DE2364790 C2 DE 2364790C2 DE 19732364790 DE19732364790 DE 19732364790 DE 2364790 A DE2364790 A DE 2364790A DE 2364790 C2 DE2364790 C2 DE 2364790C2
- Authority
- DE
- Germany
- Prior art keywords
- station
- workpiece
- plate
- transport
- transport device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 239000004065 semiconductor Substances 0.000 title claims description 19
- 239000000969 carrier Substances 0.000 claims description 10
- 238000012806 monitoring device Methods 0.000 claims description 2
- 230000032258 transport Effects 0.000 description 60
- 238000000034 method Methods 0.000 description 28
- 229920002120 photoresistant polymer Polymers 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 13
- 230000003647 oxidation Effects 0.000 description 12
- 238000007254 oxidation reaction Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 10
- 238000001465 metallisation Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000001035 drying Methods 0.000 description 9
- 239000000872 buffer Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000011179 visual inspection Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000012432 intermediate storage Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
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- 238000011068 loading method Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
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- 229910052710 silicon Inorganic materials 0.000 description 3
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- 230000007423 decrease Effects 0.000 description 2
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- 239000003973 paint Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00319563A US3850105A (en) | 1972-12-29 | 1972-12-29 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
| US00329494A US3845286A (en) | 1973-02-05 | 1973-02-05 | Manufacturing control system for processing workpieces |
| US329920A US3889355A (en) | 1973-02-05 | 1973-02-05 | Continuous processing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2364790A1 DE2364790A1 (de) | 1974-07-04 |
| DE2364790C2 true DE2364790C2 (de) | 1985-11-28 |
Family
ID=27406059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732364790 Expired DE2364790C2 (de) | 1972-12-29 | 1973-12-27 | Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente |
Country Status (6)
| Country | Link |
|---|---|
| CH (1) | CH566843A5 (enrdf_load_stackoverflow) |
| DE (1) | DE2364790C2 (enrdf_load_stackoverflow) |
| ES (1) | ES421844A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2212965A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1451668A (enrdf_load_stackoverflow) |
| NL (1) | NL184986C (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3714497A1 (de) * | 1986-05-29 | 1987-12-03 | Ford Werke Ag | Automatische foerderanlage mit laufkatzen |
| DE19821389B4 (de) * | 1998-02-12 | 2010-02-18 | Claas Fertigungstechnik Gmbh | Verfahren und Vorrichtung zum Handling von Werkstücken |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4571685A (en) * | 1982-06-23 | 1986-02-18 | Nec Corporation | Production system for manufacturing semiconductor devices |
| JPS60184678A (ja) * | 1984-03-02 | 1985-09-20 | Canon Inc | 真空処理装置 |
| EP0162703A3 (en) * | 1984-05-23 | 1987-02-04 | Machine Technology Inc. | Modular processing apparatus and modules for use therewith |
| JPS6126229A (ja) * | 1984-07-16 | 1986-02-05 | Oki Electric Ind Co Ltd | 半導体装置の製造装置 |
| JP2598305B2 (ja) * | 1988-06-06 | 1997-04-09 | 日東電工株式会社 | 半導体ウエハの処理システム |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE635201A (enrdf_load_stackoverflow) * | 1962-07-20 | |||
| AT288112B (de) * | 1966-05-12 | 1971-02-25 | Molins Machine Co Ltd | Werkzeugmaschinenanlage mit einem zentralen Steuergerät |
| US3543392A (en) * | 1967-12-15 | 1970-12-01 | Cincinnati Milacron Inc | Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools |
-
1973
- 1973-11-28 FR FR7343094A patent/FR2212965A5/fr not_active Expired
- 1973-12-07 GB GB5680673A patent/GB1451668A/en not_active Expired
- 1973-12-20 CH CH1797473A patent/CH566843A5/xx not_active IP Right Cessation
- 1973-12-27 DE DE19732364790 patent/DE2364790C2/de not_active Expired
- 1973-12-28 NL NL7317755A patent/NL184986C/xx not_active IP Right Cessation
- 1973-12-28 ES ES421844A patent/ES421844A1/es not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3714497A1 (de) * | 1986-05-29 | 1987-12-03 | Ford Werke Ag | Automatische foerderanlage mit laufkatzen |
| DE19821389B4 (de) * | 1998-02-12 | 2010-02-18 | Claas Fertigungstechnik Gmbh | Verfahren und Vorrichtung zum Handling von Werkstücken |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2212965A5 (enrdf_load_stackoverflow) | 1974-07-26 |
| ES421844A1 (es) | 1976-05-01 |
| NL184986C (nl) | 1989-12-18 |
| AU6308273A (en) | 1975-06-05 |
| DE2364790A1 (de) | 1974-07-04 |
| CH566843A5 (enrdf_load_stackoverflow) | 1975-09-30 |
| NL184986B (nl) | 1989-07-17 |
| NL7317755A (enrdf_load_stackoverflow) | 1974-07-02 |
| GB1451668A (en) | 1976-10-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8125 | Change of the main classification |
Ipc: B65G 47/50 |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |