DE2364790C2 - Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente - Google Patents

Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente

Info

Publication number
DE2364790C2
DE2364790C2 DE19732364790 DE2364790A DE2364790C2 DE 2364790 C2 DE2364790 C2 DE 2364790C2 DE 19732364790 DE19732364790 DE 19732364790 DE 2364790 A DE2364790 A DE 2364790A DE 2364790 C2 DE2364790 C2 DE 2364790C2
Authority
DE
Germany
Prior art keywords
station
workpiece
plate
transport
transport device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19732364790
Other languages
German (de)
English (en)
Other versions
DE2364790A1 (de
Inventor
Jesse Aronstein
William Eugene Harding
Arkady Poughkeepsie N.Y. Leoff
John Joseph Fishkill N.Y. Murphy
Winfield Scott Wappingers Falls N.Y. Ruder
Philip Morris Poughkeepsie N.Y. Zeiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00319563A external-priority patent/US3850105A/en
Priority claimed from US329920A external-priority patent/US3889355A/en
Priority claimed from US00329494A external-priority patent/US3845286A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2364790A1 publication Critical patent/DE2364790A1/de
Application granted granted Critical
Publication of DE2364790C2 publication Critical patent/DE2364790C2/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
DE19732364790 1972-12-29 1973-12-27 Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente Expired DE2364790C2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US00319563A US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system
US329920A US3889355A (en) 1973-02-05 1973-02-05 Continuous processing system
US00329494A US3845286A (en) 1973-02-05 1973-02-05 Manufacturing control system for processing workpieces

Publications (2)

Publication Number Publication Date
DE2364790A1 DE2364790A1 (de) 1974-07-04
DE2364790C2 true DE2364790C2 (de) 1985-11-28

Family

ID=27406059

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732364790 Expired DE2364790C2 (de) 1972-12-29 1973-12-27 Steuereinrichtung für eine Transporteinrichtung zur Herstellung und Bearbeitung von kleinen gleichartigen Werkstücken nach Art planarer Halbleiter-Bauelemente

Country Status (6)

Country Link
CH (1) CH566843A5 (US20110232667A1-20110929-C00004.png)
DE (1) DE2364790C2 (US20110232667A1-20110929-C00004.png)
ES (1) ES421844A1 (US20110232667A1-20110929-C00004.png)
FR (1) FR2212965A5 (US20110232667A1-20110929-C00004.png)
GB (1) GB1451668A (US20110232667A1-20110929-C00004.png)
NL (1) NL184986C (US20110232667A1-20110929-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3714497A1 (de) * 1986-05-29 1987-12-03 Ford Werke Ag Automatische foerderanlage mit laufkatzen
DE19821389B4 (de) * 1998-02-12 2010-02-18 Claas Fertigungstechnik Gmbh Verfahren und Vorrichtung zum Handling von Werkstücken

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
JPS60184678A (ja) * 1984-03-02 1985-09-20 Canon Inc 真空処理装置
EP0162703A3 (en) * 1984-05-23 1987-02-04 Machine Technology Inc. Modular processing apparatus and modules for use therewith
JPS6126229A (ja) * 1984-07-16 1986-02-05 Oki Electric Ind Co Ltd 半導体装置の製造装置
JP2598305B2 (ja) * 1988-06-06 1997-04-09 日東電工株式会社 半導体ウエハの処理システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE635201A (US20110232667A1-20110929-C00004.png) * 1962-07-20
AT288112B (de) * 1966-05-12 1971-02-25 Molins Machine Co Ltd Werkzeugmaschinenanlage mit einem zentralen Steuergerät
US3543392A (en) * 1967-12-15 1970-12-01 Cincinnati Milacron Inc Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3714497A1 (de) * 1986-05-29 1987-12-03 Ford Werke Ag Automatische foerderanlage mit laufkatzen
DE19821389B4 (de) * 1998-02-12 2010-02-18 Claas Fertigungstechnik Gmbh Verfahren und Vorrichtung zum Handling von Werkstücken

Also Published As

Publication number Publication date
DE2364790A1 (de) 1974-07-04
FR2212965A5 (US20110232667A1-20110929-C00004.png) 1974-07-26
AU6308273A (en) 1975-06-05
CH566843A5 (US20110232667A1-20110929-C00004.png) 1975-09-30
NL184986B (nl) 1989-07-17
ES421844A1 (es) 1976-05-01
NL7317755A (US20110232667A1-20110929-C00004.png) 1974-07-02
GB1451668A (en) 1976-10-06
NL184986C (nl) 1989-12-18

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Legal Events

Date Code Title Description
8125 Change of the main classification

Ipc: B65G 47/50

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee