DE2309181A1 - Mit elektronenstrahlabtastung arbeitende analysevorrichtung - Google Patents
Mit elektronenstrahlabtastung arbeitende analysevorrichtungInfo
- Publication number
- DE2309181A1 DE2309181A1 DE19732309181 DE2309181A DE2309181A1 DE 2309181 A1 DE2309181 A1 DE 2309181A1 DE 19732309181 DE19732309181 DE 19732309181 DE 2309181 A DE2309181 A DE 2309181A DE 2309181 A1 DE2309181 A1 DE 2309181A1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- deflection
- mirror
- analysis device
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 31
- 238000004458 analytical method Methods 0.000 title claims description 12
- 238000004804 winding Methods 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 7
- 239000000523 sample Substances 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7206290A FR2173436A5 (US06826419-20041130-M00005.png) | 1972-02-24 | 1972-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2309181A1 true DE2309181A1 (de) | 1973-10-11 |
Family
ID=9094061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732309181 Pending DE2309181A1 (de) | 1972-02-24 | 1973-02-23 | Mit elektronenstrahlabtastung arbeitende analysevorrichtung |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS4898891A (US06826419-20041130-M00005.png) |
| DE (1) | DE2309181A1 (US06826419-20041130-M00005.png) |
| FR (1) | FR2173436A5 (US06826419-20041130-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020225453A3 (en) * | 2019-05-09 | 2020-12-30 | Attolight AG | Cathodoluminescence electron microscope |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2498767A1 (fr) * | 1981-01-23 | 1982-07-30 | Cameca | Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement |
| US4810077A (en) * | 1986-02-13 | 1989-03-07 | Spectra-Tech, Inc. | Grazing angle microscope |
| FR2596863B1 (fr) * | 1986-04-07 | 1988-06-17 | Centre Nat Rech Scient | Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique |
| EP0254128A3 (de) * | 1986-07-25 | 1990-01-03 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe |
| JPS6354057U (US06826419-20041130-M00005.png) * | 1986-09-27 | 1988-04-11 | ||
| GB8707516D0 (en) * | 1987-03-30 | 1987-05-07 | Vg Instr Group | Surface analysis |
| DE102009015341A1 (de) * | 2009-03-27 | 2010-10-07 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur optischen Untersuchung von Proben |
| US11227743B2 (en) | 2019-08-20 | 2022-01-18 | Attolight AG | Accurate wavelength calibration in cathodoluminescence SEM |
| US11782001B2 (en) | 2020-12-04 | 2023-10-10 | Attolight AG | Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements |
| TWI808554B (zh) | 2020-12-04 | 2023-07-11 | 亞光股份有限公司 | 使用陰極發光測量判別半導體材料中的位錯類型和密度的裝置與方法 |
| TWI836325B (zh) | 2021-01-19 | 2024-03-21 | 瑞士商亞光股份有限公司 | 陰極發光顯微鏡、使用該顯微鏡檢查晶圓的方法及操作該顯微鏡的方法 |
-
1972
- 1972-02-24 FR FR7206290A patent/FR2173436A5/fr not_active Expired
-
1973
- 1973-02-23 DE DE19732309181 patent/DE2309181A1/de active Pending
- 1973-02-23 JP JP48021429A patent/JPS4898891A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020225453A3 (en) * | 2019-05-09 | 2020-12-30 | Attolight AG | Cathodoluminescence electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4898891A (US06826419-20041130-M00005.png) | 1973-12-14 |
| FR2173436A5 (US06826419-20041130-M00005.png) | 1973-10-05 |
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