DE2249297A1 - - Google Patents

Info

Publication number
DE2249297A1
DE2249297A1 DE19722249297 DE2249297A DE2249297A1 DE 2249297 A1 DE2249297 A1 DE 2249297A1 DE 19722249297 DE19722249297 DE 19722249297 DE 2249297 A DE2249297 A DE 2249297A DE 2249297 A1 DE2249297 A1 DE 2249297A1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19722249297
Other languages
German (de)
Other versions
DE2249297B1 (de
DE2249297C2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE2116190A priority Critical patent/DE2116190C3/de
Application filed filed Critical
Priority to DE2249297A priority patent/DE2249297C2/de
Priority to BE2053075A priority patent/BE805124R/xx
Priority to FR7335159A priority patent/FR2202169B2/fr
Priority to GB4590573A priority patent/GB1381835A/en
Priority to US404677A priority patent/US3891536A/en
Publication of DE2249297B1 publication Critical patent/DE2249297B1/de
Publication of DE2249297A1 publication Critical patent/DE2249297A1/de
Application granted granted Critical
Publication of DE2249297C2 publication Critical patent/DE2249297C2/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE2249297A 1971-04-02 1972-10-07 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung Expired DE2249297C2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE2116190A DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung
DE2249297A DE2249297C2 (de) 1971-04-02 1972-10-07 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung
BE2053075A BE805124R (en) 1972-10-07 1973-09-21 Cathode sputtering chamber for large plates - with trolley supported cathodes
FR7335159A FR2202169B2 (https=) 1972-10-07 1973-10-02
GB4590573A GB1381835A (en) 1972-10-07 1973-10-02 Coating of large plates of glass ceramics plstics and the like by cathodic sputtering
US404677A US3891536A (en) 1972-10-07 1973-10-09 Sputter-coating apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2116190A DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung
DE2249297A DE2249297C2 (de) 1971-04-02 1972-10-07 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Publications (3)

Publication Number Publication Date
DE2249297B1 DE2249297B1 (de) 1973-11-15
DE2249297A1 true DE2249297A1 (https=) 1973-11-15
DE2249297C2 DE2249297C2 (de) 1980-07-10

Family

ID=33453366

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2116190A Expired DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung
DE2249297A Expired DE2249297C2 (de) 1971-04-02 1972-10-07 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE2116190A Expired DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Country Status (1)

Country Link
DE (2) DE2116190C3 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2653736A1 (de) * 1976-11-26 1978-06-01 Bosch Gmbh Robert Verfahren und vorrichtung zur kontinuierlichen beschichtung von glas- oder keramiksubstraten mittels kathodenzerstaeubung
DE2844491C2 (de) * 1978-10-12 1983-04-14 Leybold-Heraeus GmbH, 5000 Köln Vakuum-Beschichtungsanlage mit einer Einrichtung zum kontinuierlichen Substrattransport
US4399014A (en) * 1980-05-03 1983-08-16 Engle Frank W Plasma reactor and method therefor
US4289598A (en) * 1980-05-03 1981-09-15 Technics, Inc. Plasma reactor and method therefor
DE3041551A1 (de) * 1980-11-04 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Elektroden fuer plasma-aetzanlage

Also Published As

Publication number Publication date
DE2249297B1 (de) 1973-11-15
DE2116190C3 (de) 1979-08-30
DE2249297C2 (de) 1980-07-10
DE2116190B2 (de) 1973-05-17
DE2116190A1 (de) 1972-10-19

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Legal Events

Date Code Title Description
B1 Publication of the examined application without previous publication of unexamined application
C2 Grant after previous publication (2nd publication)