DE2230650C2 - Verfahren und Vorrichtung zur optischen Untersuchung einer Oberfläche - Google Patents
Verfahren und Vorrichtung zur optischen Untersuchung einer OberflächeInfo
- Publication number
- DE2230650C2 DE2230650C2 DE2230650A DE2230650A DE2230650C2 DE 2230650 C2 DE2230650 C2 DE 2230650C2 DE 2230650 A DE2230650 A DE 2230650A DE 2230650 A DE2230650 A DE 2230650A DE 2230650 C2 DE2230650 C2 DE 2230650C2
- Authority
- DE
- Germany
- Prior art keywords
- light
- screen
- camera
- video signals
- bundles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 23
- 230000003287 optical effect Effects 0.000 title claims description 13
- 238000005286 illumination Methods 0.000 claims description 14
- 230000001427 coherent effect Effects 0.000 claims description 11
- 230000002452 interceptive effect Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000000875 corresponding effect Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000012634 optical imaging Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011410 subtraction method Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/164—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by holographic interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Holo Graphy (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2921371A GB1392448A (en) | 1971-06-22 | 1971-06-22 | Optical indpection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2230650A1 DE2230650A1 (de) | 1972-12-28 |
| DE2230650C2 true DE2230650C2 (de) | 1983-09-22 |
Family
ID=10287949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2230650A Expired DE2230650C2 (de) | 1971-06-22 | 1972-06-22 | Verfahren und Vorrichtung zur optischen Untersuchung einer Oberfläche |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3816649A (enExample) |
| AU (1) | AU471611B2 (enExample) |
| CA (1) | CA985039A (enExample) |
| DE (1) | DE2230650C2 (enExample) |
| FR (1) | FR2143204B1 (enExample) |
| GB (1) | GB1392448A (enExample) |
| IT (1) | IT960440B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4108062A1 (de) * | 1991-03-13 | 1992-09-17 | Man Technologie Gmbh | Vorrichtung zur interferometrischen messung von objekten |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1460861A (en) * | 1974-03-05 | 1977-01-06 | Nat Res Dev | Interferrometers |
| US4025195A (en) * | 1974-07-22 | 1977-05-24 | Itek Corporation | Image subtraction/addition system |
| GB1593284A (en) * | 1977-03-15 | 1981-07-15 | Nat Res Dev | Optical inspection |
| US4277127A (en) * | 1979-12-03 | 1981-07-07 | The United States Of America As Represented By The Secretary Of The Army | Dopler extended depth of field imaging system with coherent object illumination |
| US4425039A (en) | 1982-05-07 | 1984-01-10 | Industrial Holographics, Inc. | Apparatus for the practice of double exposure interferometric non-destructive testing |
| US4620223A (en) * | 1982-09-03 | 1986-10-28 | Industrial Holographics, Inc. | Interferometric deformation analysis system |
| DE3426056A1 (de) * | 1983-07-16 | 1985-01-24 | Leicester Polytechnic, Leicester | Verfahren und vorrichtung zur kontrolle von textilien |
| GB8331248D0 (en) * | 1983-11-23 | 1983-12-29 | Kearney & Trecker Marwin Ltd | Inspecting articles |
| GB8522820D0 (en) * | 1985-09-16 | 1985-10-23 | Montgomery P C | Interferometric measurement |
| GB8529429D0 (en) * | 1985-11-29 | 1986-01-08 | Preater R W T | Test apparatus |
| US4747683A (en) * | 1986-01-17 | 1988-05-31 | Eye Research Institute Of Retina Foundation | Method and device for in vivo wetting determinations |
| US4818110A (en) * | 1986-05-06 | 1989-04-04 | Kla Instruments Corporation | Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like |
| US4815856A (en) * | 1986-06-05 | 1989-03-28 | Storage Technology Partners Ii | Method and apparatus for measuring the absolute thickness of dust defocus layers |
| GB8613635D0 (en) * | 1986-06-05 | 1986-07-09 | Tyrer J R | Optical inspection |
| US4887899A (en) * | 1987-12-07 | 1989-12-19 | Hung Yau Y | Apparatus and method for electronic analysis of test objects |
| US4913547A (en) * | 1988-01-29 | 1990-04-03 | Moran Steven E | Optically phased-locked speckle pattern interferometer |
| US5004345A (en) * | 1988-12-05 | 1991-04-02 | Hung Yau Y | Dual-lens shearing interferometer |
| US5094528A (en) * | 1990-05-25 | 1992-03-10 | Laser Technology, Inc. | Apparatus and method for performing electronic shearography |
| DE4039972A1 (de) * | 1990-12-14 | 1992-06-17 | Man Technologie Gmbh | Verfahren und einrichtung zur erfassung der oberflaechendeformation von bauteilen mittels elektronischer speckle-interferometrie |
| US5245409A (en) * | 1991-11-27 | 1993-09-14 | Arvin Industries, Inc. | Tube seam weld inspection device |
| US5671042A (en) * | 1992-02-18 | 1997-09-23 | Illinois Institute Of Technology | Holomoire strain analyzer |
| US5257089A (en) * | 1992-06-15 | 1993-10-26 | United Technologies Corporation | Optical head for shearography |
| GB2309777B (en) * | 1996-02-05 | 2000-09-06 | Secretary Trade Ind Brit | Interferometer |
| DE19650325A1 (de) * | 1996-12-04 | 1998-06-10 | Ettemeyer Gmbh & Co Mes Und Pr | Verfahren und Vorrichtung zur Ermittlung von Verformungen und Dehnungen an gekrümmten Körpern |
| US6188483B1 (en) | 1997-12-03 | 2001-02-13 | Dr. Ettemeyer Gmbh & Co. | Method and apparatus for determining deformation and elongation on curved bodies |
| US6580514B1 (en) * | 1999-04-28 | 2003-06-17 | Nec Corporation | Non-contact silicon melt surface evaluation method and system |
| US20030067537A1 (en) * | 2001-10-04 | 2003-04-10 | Myers Kenneth J. | System and method for three-dimensional data acquisition |
| FR2849245B1 (fr) * | 2002-12-20 | 2006-02-24 | Thales Sa | Procede d'authentification et d'identification optique d'objets et dispositif de mise en oeuvre |
| US7436504B2 (en) * | 2003-09-10 | 2008-10-14 | Shear Graphics, Llc | Non-destructive testing and imaging |
| GB0809037D0 (en) * | 2008-05-19 | 2008-06-25 | Renishaw Plc | Video Probe |
| CN110793453B (zh) * | 2019-10-10 | 2021-02-26 | 北京科技大学 | 适用于三维曲面异形结构的简易快速人工散斑制备方法 |
-
1971
- 1971-06-22 GB GB2921371A patent/GB1392448A/en not_active Expired
-
1972
- 1972-06-19 US US00264007A patent/US3816649A/en not_active Expired - Lifetime
- 1972-06-21 IT IT69005/72A patent/IT960440B/it active
- 1972-06-21 CA CA145,293A patent/CA985039A/en not_active Expired
- 1972-06-21 FR FR727222379A patent/FR2143204B1/fr not_active Expired
- 1972-06-22 DE DE2230650A patent/DE2230650C2/de not_active Expired
- 1972-06-22 AU AU43752/72A patent/AU471611B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4108062A1 (de) * | 1991-03-13 | 1992-09-17 | Man Technologie Gmbh | Vorrichtung zur interferometrischen messung von objekten |
Also Published As
| Publication number | Publication date |
|---|---|
| AU4375272A (en) | 1974-01-03 |
| CA985039A (en) | 1976-03-09 |
| DE2230650A1 (de) | 1972-12-28 |
| GB1392448A (en) | 1975-04-30 |
| FR2143204A1 (enExample) | 1973-02-02 |
| US3816649A (en) | 1974-06-11 |
| FR2143204B1 (enExample) | 1973-07-13 |
| IT960440B (it) | 1973-11-20 |
| AU471611B2 (en) | 1976-04-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8126 | Change of the secondary classification |
Ipc: G01B 11/30 |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |