DE2201194B2 - Interferometer-System zur Abstandsmessung eines beweglichen Bauteils - Google Patents

Interferometer-System zur Abstandsmessung eines beweglichen Bauteils

Info

Publication number
DE2201194B2
DE2201194B2 DE2201194A DE2201194A DE2201194B2 DE 2201194 B2 DE2201194 B2 DE 2201194B2 DE 2201194 A DE2201194 A DE 2201194A DE 2201194 A DE2201194 A DE 2201194A DE 2201194 B2 DE2201194 B2 DE 2201194B2
Authority
DE
Germany
Prior art keywords
light beam
reflector
beam splitter
interferometer
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE2201194A
Other languages
German (de)
English (en)
Other versions
DE2201194A1 (de
Inventor
Richard R. Saratoga Baldwin
Gary B. Cupertino Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE2201194A1 publication Critical patent/DE2201194A1/de
Publication of DE2201194B2 publication Critical patent/DE2201194B2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE2201194A 1971-02-01 1972-01-12 Interferometer-System zur Abstandsmessung eines beweglichen Bauteils Granted DE2201194B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (2)

Publication Number Publication Date
DE2201194A1 DE2201194A1 (de) 1972-08-17
DE2201194B2 true DE2201194B2 (de) 1973-01-04

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2201194A Granted DE2201194B2 (de) 1971-02-01 1972-01-12 Interferometer-System zur Abstandsmessung eines beweglichen Bauteils

Country Status (6)

Country Link
CA (1) CA950657A (enExample)
DE (1) DE2201194B2 (enExample)
FR (1) FR2124998A5 (enExample)
GB (1) GB1375091A (enExample)
IT (1) IT950612B (enExample)
SE (1) SE383780B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3421213A1 (de) * 1984-06-07 1985-12-12 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-zweifrequenz-laserinterferometer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3069083D1 (en) * 1980-12-02 1984-10-04 Heidenhain Gmbh Dr Johannes Process for incrementally measuring geometrical dimensions, and devices to perform the process
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3421213A1 (de) * 1984-06-07 1985-12-12 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-zweifrequenz-laserinterferometer

Also Published As

Publication number Publication date
SE383780B (sv) 1976-03-29
CA950657A (en) 1974-07-09
FR2124998A5 (enExample) 1972-09-22
DE2201194A1 (de) 1972-08-17
GB1375091A (enExample) 1974-11-27
IT950612B (it) 1973-06-20
AU3752271A (en) 1973-09-27

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977