DE2123135A1 - 'ftnsomi !frischer Druck-Aufnehmer - Google Patents

'ftnsomi !frischer Druck-Aufnehmer

Info

Publication number
DE2123135A1
DE2123135A1 DE19712123135 DE2123135A DE2123135A1 DE 2123135 A1 DE2123135 A1 DE 2123135A1 DE 19712123135 DE19712123135 DE 19712123135 DE 2123135 A DE2123135 A DE 2123135A DE 2123135 A1 DE2123135 A1 DE 2123135A1
Authority
DE
Germany
Prior art keywords
membrane
smaller
main
resistors
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712123135
Other languages
German (de)
English (en)
Inventor
Ladislav Dipl.-Ing.; Pospishil Karel Dipl.-Ing.; Prag. P Tomanec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Czech Academy of Sciences CAS
Original Assignee
Czech Academy of Sciences CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CS187371A external-priority patent/CS148689B3/cs
Application filed by Czech Academy of Sciences CAS filed Critical Czech Academy of Sciences CAS
Publication of DE2123135A1 publication Critical patent/DE2123135A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE19712123135 1970-05-14 1971-05-11 'ftnsomi !frischer Druck-Aufnehmer Pending DE2123135A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CS335270 1970-05-14
CS187371A CS148689B3 (enExample) 1971-03-15 1971-03-15

Publications (1)

Publication Number Publication Date
DE2123135A1 true DE2123135A1 (de) 1971-11-18

Family

ID=25745516

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712123135 Pending DE2123135A1 (de) 1970-05-14 1971-05-11 'ftnsomi !frischer Druck-Aufnehmer

Country Status (5)

Country Link
US (1) US3683698A (enExample)
DE (1) DE2123135A1 (enExample)
DK (1) DK127449B (enExample)
NL (1) NL7106601A (enExample)
SE (1) SE364565B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6643976B2 (en) 2001-03-26 2003-11-11 First Sensor Technology Gmbh Pressure sensor device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3930412A (en) * 1975-01-03 1976-01-06 Kulite Semiconductor Products, Inc. Electrically scanned pressure transducer configurations
US4347745A (en) * 1980-12-22 1982-09-07 Bourns Instruments, Inc. Pressure measuring apparatus
US4395915A (en) * 1981-10-06 1983-08-02 Bourns Instruments, Inc. Pressure measuring apparatus
US5058435A (en) * 1989-06-22 1991-10-22 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5184515A (en) * 1989-06-22 1993-02-09 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537319A (en) * 1968-07-26 1970-11-03 Gen Electric Silicon diaphragm with optimized integral strain gages

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6643976B2 (en) 2001-03-26 2003-11-11 First Sensor Technology Gmbh Pressure sensor device
DE10114862B3 (de) * 2001-03-26 2006-07-13 First Sensor Technology Gmbh Drucksensoreinrichtung
DE10114862B9 (de) * 2001-03-26 2007-04-26 First Sensor Technology Gmbh Drucksensoreinrichtung

Also Published As

Publication number Publication date
US3683698A (en) 1972-08-15
NL7106601A (enExample) 1971-11-16
DK127449B (da) 1973-11-05
SE364565B (enExample) 1974-02-25

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