DE2113966A1 - Teilreflektierender Spiegel und Verfahren zu seiner Herstellung - Google Patents
Teilreflektierender Spiegel und Verfahren zu seiner HerstellungInfo
- Publication number
- DE2113966A1 DE2113966A1 DE19712113966 DE2113966A DE2113966A1 DE 2113966 A1 DE2113966 A1 DE 2113966A1 DE 19712113966 DE19712113966 DE 19712113966 DE 2113966 A DE2113966 A DE 2113966A DE 2113966 A1 DE2113966 A1 DE 2113966A1
- Authority
- DE
- Germany
- Prior art keywords
- reflective
- areas
- pattern
- mirror
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 36
- 230000008569 process Effects 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims description 76
- 230000005855 radiation Effects 0.000 claims description 42
- 229920002120 photoresistant polymer Polymers 0.000 claims description 28
- 239000011521 glass Substances 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 238000003486 chemical etching Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 11
- 239000011241 protective layer Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000012787 harvest procedure Methods 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical class Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/147—Beam splitting or combining systems operating by reflection only using averaging effects by spatially variable reflectivity on a microscopic level, e.g. polka dots, chequered or discontinuous patterns, or rapidly moving surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2167670A | 1970-03-23 | 1970-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2113966A1 true DE2113966A1 (de) | 1971-10-07 |
Family
ID=21805530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712113966 Pending DE2113966A1 (de) | 1970-03-23 | 1971-03-23 | Teilreflektierender Spiegel und Verfahren zu seiner Herstellung |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2113966A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2083504B3 (enrdf_load_stackoverflow) |
| NL (1) | NL7103684A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3126938A1 (de) * | 1981-07-08 | 1983-01-27 | Heinz-Wolfgang Dipl.-Ing. 8000 München Köhler | Vorrichtung zur bild-auswertung |
| EP0122364A1 (en) * | 1981-02-24 | 1984-10-24 | The Commonwealth Of Australia | A mirror for a spectrophotometer |
| EP0144611A1 (de) * | 1983-10-27 | 1985-06-19 | M.A.N. Technologie GmbH | Strahlenteiler |
| EP0276337A1 (de) * | 1987-01-24 | 1988-08-03 | Dr.-Ing. Rudolf Hell GmbH | Blendenanordnung zur optoelektronischen Abtastung von Vorlagen |
| EP0380197A1 (en) * | 1989-01-23 | 1990-08-01 | Kowa Company Ltd. | Ophthalmic measurement apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19627417C1 (de) * | 1996-07-08 | 1997-10-23 | Daimler Benz Ag | Außenspiegel an einem Kraftfahrzeug |
-
1971
- 1971-03-18 NL NL7103684A patent/NL7103684A/xx unknown
- 1971-03-23 FR FR7110085A patent/FR2083504B3/fr not_active Expired
- 1971-03-23 DE DE19712113966 patent/DE2113966A1/de active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0122364A1 (en) * | 1981-02-24 | 1984-10-24 | The Commonwealth Of Australia | A mirror for a spectrophotometer |
| DE3126938A1 (de) * | 1981-07-08 | 1983-01-27 | Heinz-Wolfgang Dipl.-Ing. 8000 München Köhler | Vorrichtung zur bild-auswertung |
| DE3126938C3 (de) * | 1981-07-08 | 1989-03-16 | Köhler, Heinz-Wolfgang, Dipl.-Ing., 8000 München | Vorrichtung zur Bild-Auswertung |
| EP0144611A1 (de) * | 1983-10-27 | 1985-06-19 | M.A.N. Technologie GmbH | Strahlenteiler |
| EP0276337A1 (de) * | 1987-01-24 | 1988-08-03 | Dr.-Ing. Rudolf Hell GmbH | Blendenanordnung zur optoelektronischen Abtastung von Vorlagen |
| US4812913A (en) * | 1987-01-24 | 1989-03-14 | Dr. Ing. Rudolf Hell Gmbh | Diaphragm arrangement for opto-electronic scanning of originals |
| EP0380197A1 (en) * | 1989-01-23 | 1990-08-01 | Kowa Company Ltd. | Ophthalmic measurement apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2083504A3 (enrdf_load_stackoverflow) | 1971-12-17 |
| FR2083504B3 (enrdf_load_stackoverflow) | 1973-12-28 |
| NL7103684A (enrdf_load_stackoverflow) | 1971-09-27 |
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