DE2104837A1 - Vorrichtung zum Messen einer relati ven Verschiebung eines Gegenstandes - Google Patents
Vorrichtung zum Messen einer relati ven Verschiebung eines GegenstandesInfo
- Publication number
- DE2104837A1 DE2104837A1 DE19712104837 DE2104837A DE2104837A1 DE 2104837 A1 DE2104837 A1 DE 2104837A1 DE 19712104837 DE19712104837 DE 19712104837 DE 2104837 A DE2104837 A DE 2104837A DE 2104837 A1 DE2104837 A1 DE 2104837A1
- Authority
- DE
- Germany
- Prior art keywords
- partial
- partial beam
- mirror
- optical element
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 14
- 230000010287 polarization Effects 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 11
- 101150086776 FAM3C gene Proteins 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 241000234282 Allium Species 0.000 description 1
- 235000002732 Allium cepa var. cepa Nutrition 0.000 description 1
- 101100025811 Caenorhabditis elegans hch-1 gene Proteins 0.000 description 1
- 241001649081 Dina Species 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7001770A NL7001770A (enExample) | 1970-02-07 | 1970-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2104837A1 true DE2104837A1 (de) | 1971-08-19 |
Family
ID=19809274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712104837 Pending DE2104837A1 (de) | 1970-02-07 | 1971-02-02 | Vorrichtung zum Messen einer relati ven Verschiebung eines Gegenstandes |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3666371A (enExample) |
| CA (1) | CA923694A (enExample) |
| CH (1) | CH529991A (enExample) |
| DE (1) | DE2104837A1 (enExample) |
| FR (1) | FR2078261A5 (enExample) |
| NL (1) | NL7001770A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0219127A3 (en) * | 1985-10-16 | 1989-10-25 | Hitachi, Ltd. | Method of and apparatus for optically measuring displacement |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS567006A (en) * | 1979-06-22 | 1981-01-24 | Ibm | Method of extending measurement range of interference |
| JPS61219802A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | 変位の光学的測定装置 |
-
1970
- 1970-02-07 NL NL7001770A patent/NL7001770A/xx unknown
-
1971
- 1971-02-02 DE DE19712104837 patent/DE2104837A1/de active Pending
- 1971-02-03 CA CA104356A patent/CA923694A/en not_active Expired
- 1971-02-04 CH CH167571A patent/CH529991A/de not_active IP Right Cessation
- 1971-02-04 US US112722A patent/US3666371A/en not_active Expired - Lifetime
- 1971-02-05 FR FR7103939A patent/FR2078261A5/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0219127A3 (en) * | 1985-10-16 | 1989-10-25 | Hitachi, Ltd. | Method of and apparatus for optically measuring displacement |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7001770A (enExample) | 1971-08-10 |
| FR2078261A5 (enExample) | 1971-11-05 |
| CA923694A (en) | 1973-04-03 |
| US3666371A (en) | 1972-05-30 |
| CH529991A (de) | 1972-10-31 |
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