CA923694A - Apparatus for measuring the relative displacement of an object - Google Patents
Apparatus for measuring the relative displacement of an objectInfo
- Publication number
- CA923694A CA923694A CA104356A CA104356A CA923694A CA 923694 A CA923694 A CA 923694A CA 104356 A CA104356 A CA 104356A CA 104356 A CA104356 A CA 104356A CA 923694 A CA923694 A CA 923694A
- Authority
- CA
- Canada
- Prior art keywords
- measuring
- relative displacement
- displacement
- relative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7001770A NL7001770A (en) | 1970-02-07 | 1970-02-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA923694A true CA923694A (en) | 1973-04-03 |
Family
ID=19809274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA104356A Expired CA923694A (en) | 1970-02-07 | 1971-02-03 | Apparatus for measuring the relative displacement of an object |
Country Status (6)
Country | Link |
---|---|
US (1) | US3666371A (en) |
CA (1) | CA923694A (en) |
CH (1) | CH529991A (en) |
DE (1) | DE2104837A1 (en) |
FR (1) | FR2078261A5 (en) |
NL (1) | NL7001770A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS567006A (en) * | 1979-06-22 | 1981-01-24 | Ibm | Method of extending measurement range of interference |
JPS61219802A (en) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | Apparatus for optical measurement of displacement |
JPS6288902A (en) * | 1985-10-16 | 1987-04-23 | Hitachi Ltd | Optical measuring instrument for displacement |
-
1970
- 1970-02-07 NL NL7001770A patent/NL7001770A/xx unknown
-
1971
- 1971-02-02 DE DE19712104837 patent/DE2104837A1/en active Pending
- 1971-02-03 CA CA104356A patent/CA923694A/en not_active Expired
- 1971-02-04 US US112722A patent/US3666371A/en not_active Expired - Lifetime
- 1971-02-04 CH CH167571A patent/CH529991A/en not_active IP Right Cessation
- 1971-02-05 FR FR7103939A patent/FR2078261A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7001770A (en) | 1971-08-10 |
FR2078261A5 (en) | 1971-11-05 |
CH529991A (en) | 1972-10-31 |
US3666371A (en) | 1972-05-30 |
DE2104837A1 (en) | 1971-08-19 |
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