DE2027459A1 - Verfahren zur Kontrolle von Diffusions - Google Patents
Verfahren zur Kontrolle von DiffusionsInfo
- Publication number
- DE2027459A1 DE2027459A1 DE19702027459 DE2027459A DE2027459A1 DE 2027459 A1 DE2027459 A1 DE 2027459A1 DE 19702027459 DE19702027459 DE 19702027459 DE 2027459 A DE2027459 A DE 2027459A DE 2027459 A1 DE2027459 A1 DE 2027459A1
- Authority
- DE
- Germany
- Prior art keywords
- base
- transistors
- diffusion
- test structure
- structures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 title claims description 21
- 238000000034 method Methods 0.000 title claims description 13
- 239000002800 charge carrier Substances 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000002019 doping agent Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Bipolar Transistors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702027459 DE2027459A1 (de) | 1970-06-04 | 1970-06-04 | Verfahren zur Kontrolle von Diffusions |
| FR7115064A FR2094024B1 (enExample) | 1970-06-04 | 1971-04-20 | |
| GB04189/71A GB1283004A (en) | 1970-06-04 | 1971-05-11 | Monitoring diffusion processes in the manufacture of semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702027459 DE2027459A1 (de) | 1970-06-04 | 1970-06-04 | Verfahren zur Kontrolle von Diffusions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2027459A1 true DE2027459A1 (de) | 1971-12-16 |
Family
ID=5773017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702027459 Pending DE2027459A1 (de) | 1970-06-04 | 1970-06-04 | Verfahren zur Kontrolle von Diffusions |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2027459A1 (enExample) |
| FR (1) | FR2094024B1 (enExample) |
| GB (1) | GB1283004A (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3487276A (en) * | 1966-11-15 | 1969-12-30 | Westinghouse Electric Corp | Thyristor having improved operating characteristics at high temperature |
-
1970
- 1970-06-04 DE DE19702027459 patent/DE2027459A1/de active Pending
-
1971
- 1971-04-20 FR FR7115064A patent/FR2094024B1/fr not_active Expired
- 1971-05-11 GB GB04189/71A patent/GB1283004A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1283004A (en) | 1972-07-26 |
| FR2094024B1 (enExample) | 1974-09-27 |
| FR2094024A1 (enExample) | 1972-02-04 |
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