DE202012102763U1 - Replaceable treatment basin for wet-chemical processes - Google Patents

Abstract

Device for the wet chemical treatment of substrates with a treatment liquid (F) with the formation of gaseous substances (G) emerging from the treatment liquid (F), comprising a double-walled and exchangeable treatment basin (1), its outer wall (2) and inner wall (3) below Formation of an intermediate space (4) are spaced from each other, and a container (5) arranged below the treatment basin (1) for receiving the gaseous substances (G) and / or treatment liquid (F) that have escaped from the treatment basin (1) and which pass through the interspace (4) can be diverted into the receptacle (5), as well as a seal (9) provided in a transition area between the outer wall (2) of the treatment basin (1) and the receptacle (5) for shielding the gaseous substances (G ) and / or treatment liquid (F) with respect to the environment (U), the seal (9) being a liquid-based seal, the formation of which is provided by Bere Establishing a liquid collection volume (F1; F2) is enabled in the transition area.

Description

introduction

The invention relates to a treatment tank for the wet-chemical treatment of substrates with a treatment liquid to form emerging from the treatment liquid gaseous substances. More specifically, the invention relates to an exchangeable treatment basin.

State of the art and disadvantages

For wet-chemical treatment of objects such. As silicon substrates (wafers), for example, the removal (etching), the coating or even the cleaning of such substrates, usually treatment tanks are used, which receive the corresponding treatment liquids. Depending on the desired treatment, these are etching liquids, coating liquids (eg electrolytes), or cleaning liquids. The substrates are then either stacked in a basin, where they remain during the treatment time ("batch processing"), or they are transported in a continuous process through or along the treatment liquid ("inline processing").

Examples of equipment suitable for the batchwise treatment of substrates are, for. B. from the US 5,000,827 and DE 10 2007 020 449 known. These show a so-called overflow reactor for treating a substrate arranged above the reactor housing. By means of a pump conveyed treatment liquid flows upwardly through the reactor housing, wherein between the substrate and the upper end of the reactor housing, a distance is provided, so that an annular gap is formed, which is formed as an overflow.

Common to most types of treatment is the formation of gaseous reaction products and / or vapors, hereinafter referred to as gaseous substances. These gaseous substances can pose a health hazard to operators when they enter the ambient air. In any case, they entail a loss of treatment liquid of the corresponding basin, and they can lead to contamination of adjacent treatment liquids. Therefore, a picking up and in particular a return of these gaseous substances and / or their condensates is urgently required or desired.

Another problem is the treatment liquid itself, as it reaches, as in so-called overflow basin, up to the top of such a basin. By intentional or random fluctuations of the liquid level, treatment liquid can leave the treatment tank. While fluid running directly over the edge runs down the outer wall of the pool, splashes of liquid can also overcome other distances and possibly cause damage there. In addition, due to evaporation or continuous (post-) reaction of the liquid flowing down, gaseous substances which should not escape into the environment also escape from it. Therefore, suction devices that only act upwards often provide unsatisfactory protection.

Therefore, such pools are known which are designed double-walled. The resulting on the surface of the treatment liquid gaseous substances and overflowing or over-spraying treatment liquids are discharged through the gap of the double wall down, the removal can passively (by gravity) and / or active (by suction) can be done. Below the basin there is a receptacle into which the liquid seeps, or in which the gaseous substances condense and are either disposed of as liquid or recycled to the treatment tank. It will be understood that a seal must be provided between the outer wall of the basin and the receptacle below to prevent the escape of gaseous substances and liquids through the gap ("sealing gap") between these components. Typically, non-permeable (gas-tight) solid seals are used for this purpose. These need to form a sufficient sealing effect a high contact pressure, which is to provide only by means of screws or the like.

So-called "liquid-based seals" are also known in which, instead of a solid, a liquid fulfills the sealing function. In the DE-PS 281 482 a gas container with a vertically movable bell is shown as a lid, wherein the seal between the moving parts is a gas-tight liquid-based seal. Since the gap is movable, the provision of a gas-tight liquid film in this gap is difficult. In addition, the use of a specific sealing liquid is required.

It may also be necessary to replace a treatment tank due to a change in process order, due to periodic inspection work, or due to short-term maintenance. For this purpose, a whole series of measures are usually required, of which in particular the release of the treatment tank from the container for receiving, and the safe lifting of the pelvis to emphasize. The use of the seals described above makes it necessary to loosen a plurality of screws, which is time-consuming and (in the subsequent affixing of the exchange basin) also prone to error. Also, an accurate and careful lifting of the basin, as well as a precise positioning of the exchange basin is necessary to ensure the desired sealing effect permanently.

Object of the invention and solution

The invention therefore has the object to provide a device with a seal, which allows a simple and safe replacement of a treatment tank for wet-chemical processes. In addition, the solution should be as inexpensive as possible.

The object is achieved by a device according to claim 1. Further advantageous embodiments are given in the dependent claims and the figures.

description

The device according to the invention is used for the wet-chemical treatment of substrates with a treatment liquid. By definition, such treatment includes not only chemical removal or coating, but also cleaning or merely transporting the substrates through or along the treatment liquid. Typically, however, the treatment is to form gaseous substances exiting the treatment liquid.

According to the invention, the device comprises a double-walled and exchangeable treatment basin whose outer wall and inner wall are spaced apart to form a gap, and a container arranged below the treatment basin for receiving the gaseous substances and / or treatment liquid discharged from the treatment basin. These gaseous substances and the liquid can be discharged through the intermediate space in the container for receiving. In the present case, the "outer wall" always denotes the wall of the double-walled treatment basin which is arranged at the extreme end. Outside the outer wall is the "environment". The "inner wall" refers to that wall of the treatment basin which forms the actual container for the treatment liquid. Between these walls is the "gap". For clarification, by the way, reference is made at this point to the description of figures below.

Furthermore, the device comprises a seal provided in a transition region between the outer wall of the treatment basin and the receptacle for shielding the gaseous substances and / or the treatment liquid from the environment.

For ease of interchangeability of the pelvis is now provided that the device has a seal, wherein the seal is a liquid-based seal whose formation is made possible by providing a liquid collecting volume in the transition region.

In the following, the feature of the fluid-based seal will be discussed in detail. Initially, three variants relating to the liquid collecting volume according to the invention are presented.

According to one embodiment, the container for receiving a circumferential groove whose width exceeds the thickness of the outer wall of the treatment tank to provide the liquid collecting volume. The recess formed as a groove has an example vertically extending groove inner wall and a groove outer wall. In this way, the said outer wall is adjustable in the groove. The liquid collecting volume is accordingly formed by the fact that between the vertical wall of (treatment tank) outer wall and groove inner wall and / or groove outer wall there is at least one gap of certain width and height, in which liquid can be accommodated.

Preferably, the liquid collecting volume is arranged on the side facing away from the environment of the outer wall. It is therefore in the same as the "interior of the device to be designated area of the same. The o. G. Gap is then formed between the groove inner wall and the inside of the treatment basin outer wall set in the groove. As mentioned, however, it is also possible for the liquid collecting volume to be arranged on the side of the device facing the environment. Then the o. G. Gap between groove outer wall and the outside of the treatment tank outer wall set in the groove. In addition, both options can be combined with each other, so that a first, preferably internal, and a further or second, external liquid collecting volume is present.

It is clear that these liquid collecting volumes must or must have an upper boundary, called the overflow edge. Preferably, this overflow edge faces the side facing away from the environment of the outer wall. Thus, excess liquid that can not be taken up in the liquid collecting volume flows inward and not outwards.

According to another embodiment, the liquid collecting volume is provided in the form of a circumferential groove in the upper region of the container for receiving. This upper region is preferably the cover region, the container for receiving, and particularly preferably a cover plate thereof. The channel thus adjoins the transition region, so that the liquid which can be absorbed in it can flood the transition region and thereby seal it.

Also according to this embodiment, the liquid collecting volume is preferably arranged on the side facing away from the environment of the outer wall. However, it may also be arranged on the other side of the outer wall, and there may be two troughs arranged on both sides (and thus liquid collecting volume).

Preferably, the channel has an overflow edge, which is higher than the transition region (passage between the outer wall of the treatment tank and the upper portion of the container for receiving, "sealing gap"). Accordingly, it is ensured that the liquid which can be received in the liquid collecting volume can flood the transition region.

According to a preferred embodiment, in the transition region, the geometries of the outer wall of the treatment basin (ie, the lower end of the outer wall thereof) and the area of the container contacting the wall for receiving (eg, the upper end of a wall thereof or a region of its possibly Existing cover plate) matched to form the liquid collecting volume. In other words, the formation of the liquid collecting volume is made possible by the fact that the contacting areas of the outer wall and the container for receiving in accordance with their geometry are coordinated so that they give the inventively required liquid collecting volume only in the assembly.

For example, a wall of the liquid collecting volume may be formed by a downwardly facing projection of the outer wall of the treatment basin, and the other wall is formed by an upwardly facing projection of the possibly existing outer wall of the container for receiving. In assembly, the two projections are spaced apart, so that a gap - the liquid collecting volume according to the invention - is formed.

To provide the liquid-based seal, it is necessary to provide a corresponding liquid in the liquid collection volume. In this case, the liquid collecting volume is at least partially filled, namely at least so far that the liquid level in the liquid collecting volume is higher than the gap formed between the outer wall of the treatment tank and the top of the underlying receptacle ("sealing gap"). This "liquid" may consist of condensed gaseous substances, of drained treatment liquid and / or of another liquid. Preference is given to the use of condensed on the inside of the outer wall of gaseous substances and there draining liquid, which under certain circumstances the corresponding sealing effect is provided only during operation, since before the treatment of the substrates still no gaseous substances and thus no condensate formed therefrom , or even no treatment liquid has run down. Alternatively or additionally, therefore, also another, as "sealing liquid" to be designated liquid, eg. As a sealing oil, are submitted, so that the sealing effect is given without a treatment taking place of the substrates. In this case, it is preferred that the sealing liquid is heavier than the condensed gaseous substances or the treatment liquid, so that these substances are effectively kept away from the transition region (sealing gap), which typically runs at the bottom of the liquid collecting volume. However, it must be ensured that at any time a risk of contamination of the process chemistry can occur when using another (sealing) liquid.

According to a preferred embodiment, the liquid collecting volume has a second overflow edge opposite the first overflow edge, which is higher than the first overflow edge. Thus, the direction of outflow of excess liquid from the liquid collection volume is predetermined. It is clear that the lower overflow edge is particularly preferably arranged on that side of the outer wall which faces away from the environment. Thus, excess liquid flows on the inside of the device and can easily be taken up by the container for receiving, which is suitable in this case not only for receiving gaseous substances, but also of liquid such as in particular treatment liquid.

According to a further embodiment, a sealing agent acting opposite treatment liquid is additionally arranged in the transition region. This sealant prevents liquid present in the liquid collection volume from passing from one side of the outer wall to the other side thereof. This is particularly useful if the overflow edge on the outside either not at all present (L-shaped instead of a U-shaped cross-sectional profile of the groove), or lower than an inner overflow edge, so that without the additional sealant liquid could flow uncontrollably to the outside (and not to the inside). However, then the drain is only prevented as long as the sealing means and the associated with him areas of the outer wall and the container for receiving are engaged. It should be recalled that the gas tightness desired according to the invention depends only on the presence of liquid in the transition region or the liquid collecting volume. The control of this liquid, however, is not an object of the invention, although the invention is suitable in a corresponding embodiment for the control of the liquid as in particular their outflow.

As already mentioned above, it can be provided that a liquid collecting volume is provided on both sides of the outer wall. It is clear that the term "on both sides" does not necessarily refer to touching or directly communicating the fluid collection volume with the outer wall. In fact, a liquid collecting volume is always at least or even exclusively constructively connected to the container for receiving. However, the outer wall (which, by definition, refers to the treatment basin) divides the device mentally into two half-spaces, an inner and an outer space (environment). Possibly. Therefore, the outer wall is thought to extend down to correctly implement the above position statement can.

In the case of two liquid collecting volumes, it is preferred that the liquid collecting volume facing the intermediate space is greater than the liquid collecting volume arranged beyond the outer wall. Thus, on the inside of the outer wall, a larger liquid collecting volume than on its outside exists. This also results in a correspondingly lower evaporation on the outside from an optionally upwardly open liquid collecting volume.

According to a further embodiment, the wall of the liquid collecting volume facing the intermediate space has a chamfer or rounding off. Thus, overflow on the typically preferred inside of the device is simplified and the corresponding fluid collection volume further increased. Of course, special drainage channels are conceivable, which allow a particularly controlled removal of the excess liquid from the liquid collecting volume.

The use of the device according to the invention in the context of a process for the wet-chemical treatment of substrates with a treatment liquid will be described below. To avoid repetition, reference is made to the above statements.

Such use includes the treatment related step of passing the gaseous substances and / or the treatment liquid through the gap into an interior of the container for receiving, and the step of forming the seal by providing at least one liquid collection volume in the transition region Filling this liquid collecting volume with a liquid such as in particular the treatment liquid, which is particularly preferably formed from condensed gaseous substances or by draining treatment liquid, or by another (sealing) liquid.

Optionally, the use also includes the pelvic replacement step of separating the treatment pool, preferably using at least two eccentric shafts, lifting it from the receptacle for containment, and then displacing the treatment basin in a raised position.

To replace the treatment tank, the same is first raised.

Then the treatment tank is moved after lifting in the raised position. It is clear that the displacement takes place in such a way that the treatment tank to be exchanged moves away from the area of the treatment station. Preferably, it can be stored after sufficient displacement on a pelvic transport device.

It is also clear that in the reverse manner, the same or another treatment basin is installed in the treatment station. An appropriate description is therefore omitted.

The invention thus provides a device which, due to the provision of a fluid-based seal, enables a simple, safe, quick and cost-effective replacement of a treatment basin for the wet-chemical treatment of substrates.

figure description

1 shows a preferred embodiment of the device according to the invention in a side sectional view.

2 shows the detail of a preferred embodiment of the liquid-based seal.

3 shows the detail of another embodiment of the liquid-based seal.

In the 1 a preferred embodiment of the apparatus according to the invention for wet chemical treatment is shown in a sectional view. This has a treatment basin in its upper area 1 for objects such as in particular flat substrates (not shown). In the treatment basin 1 is the treatment liquid F. From this occur continuously, but especially during the treatment, gaseous substances G, which in the 1 are indicated by corresponding arrows (only partially provided with reference numerals).

The treatment basin 1 is designed double-walled. His outer wall 2 and inner wall 3 are under formation of a gap 4 spaced apart. Through this gap 4 are the resulting from the treatment liquid F gaseous substances G and possibly overflowing or over-spraying treatment liquid itself downwards derived in order not to escape into the ambient air or contaminate the environment. This also applies to ausgasende from outflowing treatment liquid components.

Below the treatment basin 1 is a container for holding 5 the treatment liquid F and the gaseous substances G originating from the treatment liquid F are arranged. This carries in the illustrated embodiment, the treatment basin 1 and is similar to a frame with substantially gas-tight walls (including the bottom and cover plate) designed. In the border area to the bottom of the treatment tank, the container for recording 5 however, through holes 6 on (only the left provided with reference numerals). Through these passage openings 6 can gaseous substance G and / or the treatment liquid F in the interior 7 of the container for holding 5 reach. There are possibly suction devices or the like (not provided with reference numerals), which provide for the generation of a corresponding negative pressure.

On the inside 8th the outer wall 2 the treatment basin 1 can the leaked gaseous substances G condense because the outer wall 2 typically colder than the air or the gaseous substance G in the space 4 is. The drops of the condensate G 'and from the treatment tank 1 overflowing treatment liquid F (not shown in this figure) run due to the gravity S on the inside 8th down and collect in the border area between the bottom of the treatment tank 1 and top of the container for reception 5 , There, more precisely in the transition area between the outer wall 2 the treatment basin 1 and the container for holding 5 , is a seal 9 for shielding the gaseous substances G and the treatment liquid F from the environment U arranged. This seal 9 is necessary so that the gaseous substances G and the treatment liquid F remain inside the device and can not get into the outside air of the environment U. The seal 9 is, as soon as it is gas-tight according to the invention, typically also liquid-tight at the same time. Depending on the specific embodiment, however, it may be necessary or at least advantageous to make separate structural measures for this purpose.

In the 1 is the seal 9 only indicated in the detail circle K and is shown and described in more detail in the following figure.

The device shown also has in the illustrated embodiment, two eccentric shafts 14 on, with which the treatment basin 1 by lifting from the container to the receptacle 5 is separable, and on which it is displaceable in the raised position in the direction of a removal side of the device. In the illustrated view, the removal side faces the viewer.

The 2 shows a particularly preferred embodiment of the seal 9 , which in the transition area between the outer wall 2 the treatment basin 1 and the container for holding 5 is arranged.

According to the invention is in the seal 9 a liquid-based, gas-tight seal. Their sealing effect is based on the fact that a continuous film of liquid for gaseous substances is substantially impermeable. The essential components of the seal 9 are in the interrupted drawn oval.

Accordingly, the seal 9 formed by the outer wall 2 in a revolving in the container for recording 5 arranged groove 10 the depth T intervenes. Specifically, the groove 10 in the cover plate of the container for receiving 5 brought in; However, it could also be located at the top of the vertical wall of the same (bottom right in the picture). The width B of the groove 10 exceeds the thickness D of the outer wall 2 so that in the groove 10 at least one (first) liquid collecting volume F1 (dotted area) is provided, in which condensed gaseous substances G 'and / or treatment liquid F can be received. As can be seen, these substances run as drops on the inside 8th the outer wall 2 down. It is clear that not necessarily all gaseous substances must condense, which through the gap 4 but that these "excess" gaseous substances preferably by a (not shown), which is arranged above the device or on the interior of the container for receiving 5 acts.

The groove 10 one of the (in the 2 not shown) inner wall 3 facing first overflow edge 11A on. This is the environment U side facing away from the outer wall 2 (Inside 8th the outer wall 2 ). Over this overflow edge 11A can be in the groove 10 collecting liquid (condensed gaseous substances G '/ treatment liquid F, dotted areas) expire. In addition, in the cover plate of the container for recording 5 a passage opening 6 available. Through this, the condensed gaseous substances G 'or treatment liquid F reach the interior 7 of the container for holding 5 where a collection and, if necessary, disposal or reuse takes place.

In the embodiment shown is also a second overflow edge 11B available. This is at the same height as the first overflow edge 11A , Thus, possibly condensed gaseous substances G 'and / or treatment liquid F, from the inside 8th through the groove 10 on the side beyond the outer wall 2 arrive, also flow in this direction, which is undesirable.

According to an embodiment, not shown, this can be prevented, for example, when the second overflow edge 11B higher than the first overflow edge. According to the embodiment shown, however, to prevent the passage of condensed gaseous substances G 'and / or treatment liquid F is a liquid-tight sealant 12 in the groove 10 present (crosshatched area). Thus, condensed gaseous substance G 'and / or treatment liquid F will accumulate only in the first liquid collecting volume F1 shown on the left in the figure. The (second, further) liquid catchment volume F2 shown on the right, on the other hand, remains unfilled. It is preferred, as shown, that the liquid collection volume F1 is greater than the liquid collection volume F2, since then, in the event that liquid flows to the side beyond the outer wall 2 (in the environment U) should arrive - there is only a small surface available for evaporation.

For easier drainage of condensed gaseous substances G 'and / or treatment liquid F and for additional enlargement of the liquid collecting volume F1 closes the gap 4 facing wall of the groove 10 with a chamfer 13 from.

The 3 shows a further embodiment of the seal 9 , which in the transition area between the outer wall 2 the treatment basin and the container for the admission 5 is arranged. Accordingly, the liquid collecting volume F1, F2 is formed by means of a respective circumferential groove, which in the illustrated embodiment on both sides of the outer wall 2 is arranged. Both channels have an overflow edge 11A . 11B on, each higher than the transition area (passage between outer wall 2 the treatment basin and the container for the admission 5 ) lies. This ensures that the liquid F, which can be received in the liquid collecting volume F1, F2, can flood the transition region. In addition, in the 3 another sealant 12 shown the overflow from the interior 7 to the environment U additionally difficult.

LIST OF REFERENCE NUMBERS

1

treatment tank

2

outer wall

3

inner wall

4

gap

5

Container for holding

6

Through openings

7

inner space

8th

inside

9

poetry

10

groove

11A

first overflow edge

11B

second overflow edge

12

sealant

13

chamfer

14

eccentric shaft

15

counter surface

F

Treatment liquid, liquid

F1, F2

Liquid collection volume

G

gaseous substances

U

Surroundings

G'

condensed gaseous substances, gaseous substances after their condensation, condensate

S

gravity

K

detail circle

B

width

D

thickness

T

depth

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 5000827 [0003]
• DE 102007020449 [0003]
• DE 281482 [0007]

Claims (8)

Apparatus for the wet-chemical treatment of substrates with a treatment liquid (F) to form gaseous substances (G) emerging from the treatment liquid (F), comprising a double-walled and exchangeable treatment basin ( 1 ), whose outer wall ( 2 ) and inner wall ( 3 ) forming a gap ( 4 ) are spaced from each other, and one below the treatment tank ( 1 ) arranged container for receiving ( 5 ) from the treatment tank ( 1 ) leaked gaseous substances (G) and / or treatment liquid (F) through the space ( 4 ) in the container for receiving ( 5 ) are derivable, and one in a transition region between the outer wall ( 2 ) of the treatment basin ( 1 ) and the container for receiving ( 5 ) provided seal ( 9 ) for shielding the gaseous substances (G) and / or treatment liquid (F) from the environment (U), wherein the seal ( 9 ) is a liquid-based seal whose formation is made possible by providing a liquid collecting volume (F1; F2) in the transition region. Apparatus according to claim 1, wherein the container for receiving ( 5 ) has a circumferential groove whose width (B) the thickness (D) of the outer wall ( 2 ) to provide the liquid collection volume (F1, F2). Apparatus according to claim 2, wherein the liquid collecting volume (F1) on the side facing away from the environment (U) of the outer wall ( 2 ) is arranged. Apparatus according to claim 1, wherein the liquid collecting volume (E1, F2) is in the form of a circumferential groove in the upper region of the container for receiving ( 5 ). Apparatus according to claim 4, wherein the liquid collecting volume (F1) on the side facing away from the environment (U) of the outer wall ( 2 ) is arranged. Device according to claim 1, wherein in the transition area the geometries of the outer wall and the area of the container for receiving them (FIG. 5 ) are coordinated to form the liquid collecting volume (F1; F2). Device according to one of the preceding claims, wherein the liquid collecting volume (F1, F2) is at least partially filled by condensed gaseous substances (G '), the treatment liquid (F), and / or another liquid. Device according to one of the preceding claims, wherein additionally in the transition region a sealing agent (F) acting opposite to treatment liquid ( 12 ) is arranged.

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