DE19980562T1 - Glättmaschine - Google Patents
GlättmaschineInfo
- Publication number
- DE19980562T1 DE19980562T1 DE19980562T DE19980562T DE19980562T1 DE 19980562 T1 DE19980562 T1 DE 19980562T1 DE 19980562 T DE19980562 T DE 19980562T DE 19980562 T DE19980562 T DE 19980562T DE 19980562 T1 DE19980562 T1 DE 19980562T1
- Authority
- DE
- Germany
- Prior art keywords
- smoothing machine
- smoothing
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Machine Tool Units (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10051042A JP2928218B1 (ja) | 1998-03-03 | 1998-03-03 | 平面加工装置 |
JP10/51042 | 1998-03-03 | ||
PCT/JP1999/000491 WO1999044787A1 (fr) | 1998-03-03 | 1999-02-05 | Raboteuse |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19980562T1 true DE19980562T1 (de) | 2000-06-15 |
DE19980562B4 DE19980562B4 (de) | 2007-03-29 |
Family
ID=12875754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19980562T Expired - Lifetime DE19980562B4 (de) | 1998-03-03 | 1999-02-05 | Glättmaschine |
Country Status (5)
Country | Link |
---|---|
US (1) | US6343980B1 (de) |
JP (1) | JP2928218B1 (de) |
DE (1) | DE19980562B4 (de) |
GB (1) | GB2339400B (de) |
WO (1) | WO1999044787A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2928218B1 (ja) | 1998-03-03 | 1999-08-03 | 株式会社スーパーシリコン研究所 | 平面加工装置 |
US6561881B2 (en) * | 2001-03-15 | 2003-05-13 | Oriol Inc. | System and method for chemical mechanical polishing using multiple small polishing pads |
JP4145750B2 (ja) * | 2003-07-15 | 2008-09-03 | 日本電波工業株式会社 | 平面加工装置 |
JP4464779B2 (ja) * | 2004-09-22 | 2010-05-19 | 株式会社ダイヘン | 溶射装置 |
DE102005014588A1 (de) * | 2005-03-24 | 2006-09-28 | Knöll, Herbert | Arbeitsstation |
JP5117030B2 (ja) * | 2006-10-19 | 2013-01-09 | 新日本工機株式会社 | 工作機械 |
JP5342253B2 (ja) * | 2009-01-28 | 2013-11-13 | 株式会社ディスコ | 加工装置 |
JP2012076198A (ja) * | 2010-10-05 | 2012-04-19 | Disco Corp | 加工装置 |
JP5619559B2 (ja) * | 2010-10-12 | 2014-11-05 | 株式会社ディスコ | 加工装置 |
US8968052B2 (en) * | 2011-10-21 | 2015-03-03 | Strasbaugh | Systems and methods of wafer grinding |
US9393669B2 (en) | 2011-10-21 | 2016-07-19 | Strasbaugh | Systems and methods of processing substrates |
US9457446B2 (en) | 2012-10-01 | 2016-10-04 | Strasbaugh | Methods and systems for use in grind shape control adaptation |
US9610669B2 (en) | 2012-10-01 | 2017-04-04 | Strasbaugh | Methods and systems for use in grind spindle alignment |
JP6335596B2 (ja) * | 2014-04-07 | 2018-05-30 | 株式会社ディスコ | 研削装置 |
JP6228349B2 (ja) * | 2015-12-01 | 2017-11-08 | 株式会社東京精密 | 加工装置 |
JP6754272B2 (ja) * | 2016-10-24 | 2020-09-09 | 株式会社ディスコ | 研削装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60155257A (ja) * | 1984-09-14 | 1985-08-15 | 住友ノ−ガタツク株式会社 | メツキ製品 |
US5205082A (en) * | 1991-12-20 | 1993-04-27 | Cybeq Systems, Inc. | Wafer polisher head having floating retainer ring |
JPH0818205B2 (ja) | 1992-05-07 | 1996-02-28 | 敏益 江口 | 工作機械 |
JPH06155257A (ja) | 1992-11-11 | 1994-06-03 | Takahiro Imahashi | 立軸ロータリ平面研磨機及びその構成方法 |
JPH08276358A (ja) | 1995-04-05 | 1996-10-22 | Nippon Steel Corp | 研削装置 |
US5784932A (en) * | 1996-06-20 | 1998-07-28 | Gilberti; Joseph J. | Rotary indexing table |
US5718619A (en) * | 1996-10-09 | 1998-02-17 | Cmi International, Inc. | Abrasive machining assembly |
US5950503A (en) * | 1997-05-30 | 1999-09-14 | Amendolea; Richard Michael | Open center turntable assembly |
JP2928218B1 (ja) | 1998-03-03 | 1999-08-03 | 株式会社スーパーシリコン研究所 | 平面加工装置 |
-
1998
- 1998-03-03 JP JP10051042A patent/JP2928218B1/ja not_active Expired - Lifetime
-
1999
- 1999-02-05 WO PCT/JP1999/000491 patent/WO1999044787A1/ja active Application Filing
- 1999-02-05 US US09/403,961 patent/US6343980B1/en not_active Expired - Lifetime
- 1999-02-05 GB GB9925621A patent/GB2339400B/en not_active Expired - Fee Related
- 1999-02-05 DE DE19980562T patent/DE19980562B4/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2339400A (en) | 2000-01-26 |
US6343980B1 (en) | 2002-02-05 |
GB2339400B (en) | 2002-10-30 |
WO1999044787A1 (fr) | 1999-09-10 |
GB9925621D0 (en) | 1999-12-29 |
JPH11245147A (ja) | 1999-09-14 |
JP2928218B1 (ja) | 1999-08-03 |
DE19980562B4 (de) | 2007-03-29 |
GB2339400A9 (en) | 2000-03-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |