DE19914681A1 - Miniature polymer electrolyte membrane fuel cell, used in microsystems, has a structure produced by a combination of thin film, microsystem etching and glass-silicon bonding technologies - Google Patents

Miniature polymer electrolyte membrane fuel cell, used in microsystems, has a structure produced by a combination of thin film, microsystem etching and glass-silicon bonding technologies

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Publication number
DE19914681A1
DE19914681A1 DE19914681A DE19914681A DE19914681A1 DE 19914681 A1 DE19914681 A1 DE 19914681A1 DE 19914681 A DE19914681 A DE 19914681A DE 19914681 A DE19914681 A DE 19914681A DE 19914681 A1 DE19914681 A1 DE 19914681A1
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fuel cell
pem fuel
technology according
microsystem technology
microsystem
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DE19914681C2 (en
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Joerg Mueller
Laurent Mex
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MUELLER, JOERG, PROF. DR.-ING., 21244 BUCHHOLZ, DE
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1016—Fuel cells with solid electrolytes characterised by the electrolyte material
    • H01M8/1018—Polymeric electrolyte materials
    • H01M8/102—Polymeric electrolyte materials characterised by the chemical structure of the main chain of the ion-conducting polymer
    • H01M8/1023—Polymeric electrolyte materials characterised by the chemical structure of the main chain of the ion-conducting polymer having only carbon, e.g. polyarylenes, polystyrenes or polybutadiene-styrenes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/2465—Details of groupings of fuel cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1007—Fuel cells with solid electrolytes with both reactants being gaseous or vaporised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1016—Fuel cells with solid electrolytes characterised by the electrolyte material
    • H01M8/1018—Polymeric electrolyte materials
    • H01M8/1039—Polymeric electrolyte materials halogenated, e.g. sulfonated polyvinylidene fluorides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1016—Fuel cells with solid electrolytes characterised by the electrolyte material
    • H01M8/1018—Polymeric electrolyte materials
    • H01M8/1069—Polymeric electrolyte materials characterised by the manufacturing processes
    • H01M8/1072—Polymeric electrolyte materials characterised by the manufacturing processes by chemical reactions, e.g. insitu polymerisation or insitu crosslinking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
    • H01M8/2418—Grouping by arranging unit cells in a plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0082—Organic polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1004—Fuel cells with solid electrolytes characterised by membrane-electrode assemblies [MEA]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fuel Cell (AREA)

Abstract

A microsystem polymer electrolyte membrane (PEM) fuel cell is produced by a combination of thin film, microsystem etching and glass/silicon bonding technology. A microsystem PEM fuel cell comprises a complete fuel cell structure which is produced by a thin film process on porous membranes formed in a silicon substrate by a microsystem technology etching process, and which comprises a plasma polymerized membrane, two catalyst metal-doped porous graphite layers and elements for connecting the structure to parallel produced structures, the structure allowing spatially separate and uniform supply of fuel from both sides by means of a glass/silicon bonding technique.

Description

Die Erfindung betrifft eine miniaturisierte PEM- (Polymer-Elektrolyt-Membran)-Brennstoffzelle in Mikrosystemtechnik, die mit Hilfe von Dünn­ schichtverfahren, insbesondere der Plasmapolyme­ risation zur Herstellung der ionenleitenden Mem­ bran sowie von Plasma-CVD-Verfahren zur Erzeu­ gung leitfähiger poröser und mit Katalysatoren dotierter Kontaktschichten, vorzugsweise in einer Silizium-Glas-Technik aufgebaut wird. Eine solche Struktur erlaubt aufgrund der Kompatibilität mit üblichen Mikrosystemen nicht nur prinzipiell eine Integration in solche Mikrosysteme, infolge der hohen elektrischen und thermischen Leitfähigkeit des Siliziums sowie der erprobten, hermetisch dichten Verbindungstechnik von Silizium-Glas durch anodisches Bonden und die Möglichkeit, Silizium durch trocken- und naßchemische Verfah­ ren kostengünstig, reproduzierbar und mit hoher Genauigkeit zu strukturieren und mit Dünnschicht­ verfahren zu kombinieren, eröffnet diese Technik auch eine einfache Möglichkeiten zur Parallel- und Reihen-Verschaltung sowie zur Brennstoff-Zu- und Abfuhr.The invention relates to a miniaturized PEM (Polymer electrolyte membrane) fuel cell in Microsystem technology using thin Layer process, in particular the plasma polymer rization for the production of the ion-conducting mem bran as well as plasma CVD processes for generating gung conductive porous and with catalysts doped contact layers, preferably in one Silicon glass technology is built. Such Structure allowed due to compatibility with conventional microsystems not just one in principle Integration in such microsystems, as a result of high electrical and thermal conductivity of silicon as well as the tried and tested, hermetic tight connection technology of silicon glass through anodic bonding and the possibility Silicon by dry and wet chemical processes ren inexpensive, reproducible and with high Structure accuracy and with thin film Combining the process opens up this technique also an easy way to parallel and Series connection as well as for fuel connection and Discharge.

Gegenwärtig werden Brennstoffzellen, insbesonde­ re PEM-Zellen, realisiert auf der Basis von Schichtstapeln aus der ionenleitenden Membran, eingebettet zwischen zwei mit Katalysatoren be­ schichteten porösen Graphitelektroden, die durch Bleche mit Kanälen zur Brennstoffzufuhr abge­ schlossen werden. Während auf diese Weise eine Reihenschaltung von Zellen mit nicht unerhebli­ chem Material- und Montage-Aufwand möglich ist (US 5,858,569), ist eine Reihenschaltung zwar grundsätzlich möglich und auch inzwischen reali­ siert (z. B. DE 44 43 945 C1, DE 195 02 391 C1), allerdings ohne die möglichen technologischen Lösungen integrierter Systeme etwa aus der Mikro­ systemtechnik nutzen zu können.Fuel cells are becoming more and more popular right PEM cells, realized on the basis of Layer stacks from the ion-conducting membrane, embedded between two with catalysts layered porous graphite electrodes through Sheets with channels for fuel supply abge be closed. While this way one Series connection of cells with not inconsiderable chem material and assembly effort is possible (US 5,858,569), is a series connection though basically possible and now reali based (e.g. DE 44 43 945 C1, DE 195 02 391 C1), but without the possible technological Solutions of integrated systems, for example from the micro to be able to use system technology.

In dieser Erfindung werden die Vorteile der Mikro­ systemtechnologie, einer Kombination von Silizi­ um-Mikrostrukturierungstechniken, Dünnschicht­ verfahren, Glasätztechniken sowie der Aufbau- und Verbindungstechnik von Silizium-Glas-Verbin­ dungen kombiniert, um damit ein in einer Ebene liegendes, beliebig parallel und in Reihe verschalt­ bares Brennstoffzellensystem aufzubauen.In this invention, the advantages of micro system technology, a combination of silicon um microstructuring techniques, thin film process, glass etching techniques and the assembly and Connection technology of silicon-glass composite combined to make one in one level horizontal, arbitrarily parallel and connected in series buildable fuel cell system.

Ein solches System, wie es beispielhaft in Abb. 1 dargestellt ist besteht aus einem z. B. n-leitenden Siliziumsubstrat 1 mit einer durch Epitaxie oder Diffusion erzeugten p-leitenden dünnen Deck­ schicht 2. Im Bereich der Fläche der Brennstoff­ zelle 3 ist das n-leitende Substrat z. B. durch eine naßchemische richtungsbevorzugende Ätze bis zur p-dotierten Schicht selektiv entfernt, die p-leitende Schicht ist dort 4 durch entsprechende Ätzverfahren porös gemacht. Auf dieser Membran ist eine eben­ falls poröse und wie anderswo beschrieben mit Katalysatormetallen dotierte Graphitschicht 5, z. B. in einem Plasma-CVD-Verfahren zwischen Elek­ troden aus Katalysatormetall, abgeschieden. Die Membran 6 wird ebenfalls in einem plasmaunter­ stützten Verfahren, einem Plasmapolymersations­ verfahren, durch Kopolymerisation aus z. B. einer teflon-artigen Matrix mit integrierten Ionenleiter­ ketten, z. B. Phophor- oder Schwefelsäure-Gruppen, abgeschieden. Daran schließt sich wiederum eine Schicht aus porösem mit Katalysatormetallen do­ tierten Graphit 7 an. Werden die untere Graphit­ schicht 5 sowie die Membran 6 entsprechend Abb. 1 strukturiert, so läßt sich durch entsprechende Strukturierung der oberen Graphitschicht 7 eine direkte Verschaltung der Zellen in Reihe erreichen. Zur Minimierung des Reihenwiderstandes werden die einzeln Zellen gemäß Abb. 2 vorzugsweise als schmale Steifen ausgeführt. Außerdem können die nicht notwendigerweise porösen Bereiche außer­ halb der aktiven Bereiche der Zelle mit zusätzlichen Metallisierungen 8, in Dünnschichttechik realisiert, versehen werden.Such a system, as exemplified in Fig. 1 consists of a z. B. n-type silicon substrate 1 with a p-type thin cover layer generated by epitaxy or diffusion. 2 In the area of the surface of the fuel cell 3 , the n-type substrate is z. B. selectively removed by a wet chemical directional etching up to the p-doped layer, the p-type layer 4 is made porous there by appropriate etching processes. On this membrane is also a porous and as described elsewhere doped with catalyst metals graphite layer 5 , z. B. in a plasma CVD process between electrodes made of catalyst metal, deposited. The membrane 6 is also in a plasma-assisted process, a plasma polymerisation process, by copolymerization from z. B. chains a Teflon-like matrix with integrated ion conductor, z. B. phophore or sulfuric acid groups, deposited. This is in turn followed by a layer of porous graphite 7 doped with catalyst metals. If the lower graphite layer 5 and the membrane 6 are structured in accordance with FIG. 1, a direct connection of the cells in series can be achieved by appropriate structuring of the upper graphite layer 7 . To minimize the series resistance, the individual cells according to Fig. 2 are preferably designed as narrow strips. In addition, the not necessarily porous areas outside of the active areas of the cell can be provided with additional metallizations 8 , implemented using thin-film technology.

Die Zufuhr der Brennstoffe erfolgt über Kapillaren 9 in Hohlräume 10, die in dem Silizium im thermi­ schen Ausdehnungskoeffizienten angepaßte Glas­ substrat 11 (Tempax, Pyrex) z. B. naßchemisch eingebracht werden. Die Glassubstrate werden z. B. durch anodisches Bonden auf das Silizium-Substrat hermetisch dicht angeschlossen.The supply of the fuels takes place via capillaries 9 in cavities 10 , which in the silicon in the thermal expansion coefficient's adapted glass substrate 11 (Tempax, Pyrex) z. B. can be introduced wet-chemically. The glass substrates are e.g. B. hermetically sealed by anodic bonding to the silicon substrate.

Aufgrund der hohen Wärmeleitfähigkeit und gerin­ gen Wärmekapazität des Siliziums und der gerin­ gen Wärmeleitung im Glas erreicht eine solche Zelle schnell ihre Betriebstemperatur, ohne daß ihre Umgebung wesentlich davon beeinflußt wird.Due to the high thermal conductivity and low heat capacity of silicon and low heat conduction in the glass achieves such Cell quickly their operating temperature without their Environment is significantly affected.

Claims (19)

1. PEM-Brennstoffzelle in Mikrosystemtechnik, dadurch gekennzeichnet, daß auf mit Hilfe von Ätzverfahren der Mikrosystemtechnik erzeug­ ten porösen Membranen in einem Silizium­ substrat mit Hilfe von Dünnschichtverfahren ein kompletter Zellaufbau von Brennstoffzellen realisiert wird, der eine plasmapolymerisierte Membran sowie zwei mit Katalysatormetallen dotierte poröse Graphitschichten umfaßt, Ele­ mente zur Verschaltung solcher parallel er­ zeugter Strukturen enthält und mit Hilfe einer Glas-Silizium-Verbindungstechnik auch die räumlich getrennte und gleichmäßige Zufuhr der Brennstoffe von beiden Seiten her ermög­ licht.1. PEM fuel cell in microsystem technology, characterized in that on the porous membranes produced with the aid of etching methods of microsystem technology in a silicon substrate with the aid of thin-film processes, a complete cell structure of fuel cells is realized, which has a plasma-polymerized membrane and two porous graphite layers doped with catalyst metals includes, elements for interconnection of such parallel structures he created and with the help of a glass-silicon connection technology also the spatially separated and uniform supply of fuels from both sides enables light. 2. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1, dadurch gekennzeichnet, daß die ionenleitende Polymermembran durch Co- Polymerisation von fluorcarbon-basierenden Präkursoren und ionenleitenden Gruppen reali­ siert wird.2. PEM fuel cell in microsystem technology according to claim 1, characterized in that the ion-conducting polymer membrane through co- Polymerization of fluorocarbon based Precursors and ion-guiding groups reali is settled. 3. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 und 2, dadurch gekennzeich­ net, daß dafür vorzugsweise Fluoräthen und Vinylphosphon-Säure verwendet wird.3. PEM fuel cell in microsystem technology according to claim 1 and 2, characterized net that it is preferably fluorine and Vinylphosphonic acid is used. 4. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 3, dadurch gekennzeichnet, daß zur Herstellung der porösen dotierten Gra­ phitschichten vorzugsweise eine Plasmaab­ scheidung im Regime der Gasphasenreaktionen zwischen mit Katalysatormetallen bedeckten Platten erfolgt.4. PEM fuel cell in microsystem technology according to claim 1 to 3, characterized in that for the production of the porous doped Gra phit layers preferably a plasma divorce in the regime of gas phase reactions between those covered with catalyst metals Plates done. 5. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 4, dadurch gekennzeichnet, daß als Katalysatormetalle vorzugsweise Pt und Pt-Ru verwendet werden.5. PEM fuel cell in microsystem technology according to claim 1 to 4, characterized in that preferably Pt and Pt-Ru can be used. 6. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 5, dadurch gekennzeichnet, daß zur galvanischen Trennung der Einzelzellen in der Ebene ein pn-Übergang im Silizium ver­ wendet wird.6. PEM fuel cell in microsystem technology according to claim 1 to 5, characterized in that for the galvanic separation of the individual cells a pn junction in the silicon ver is applied. 7. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 6, dadurch gekennzeichnet, daß dieser pn-Übergang durch Epitaxie oder Diffusion erzeugt wird.7. PEM fuel cell in microsystem technology according to claim 1 to 6, characterized in that this pn junction through epitaxy or Diffusion is generated. 8. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 7, dadurch gekennzeichnet, daß zur Erzeugung der porösen leitfähigen Membran eine Siliziumätzung genutzt wird.8. PEM fuel cell in microsystem technology according to claim 1 to 7, characterized in that to produce the porous conductive Silicon etching membrane is used. 9. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 8, dadurch gekennzeichnet, daß zur Erzeugung der dünnen Membran eine richtungsbevorzugende Ätzung eingesetzt wird, die am pn-Übergang stoppt.9. PEM fuel cell in microsystem technology according to claim 1 to 8, characterized in that to produce the thin membrane directional etching is used, that stops at the pn junction. 10. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 9, dadurch gekennzeichnet, daß die Zelle nach beiden Seiten durch Glas­ substrate abgedeckt wird.10. PEM fuel cell in microsystem technology according to claim 1 to 9, characterized in that the cell on both sides through glass substrate is covered. 11. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 10, dadurch gekennzeich­ net, daß in diese Glassubstrate Vertiefungen zur Gasführung und Verteilung eingeätzt werden.11. PEM fuel cell in microsystem technology according to claim 1 to 10, characterized in net that wells in these glass substrates Gas flow and distribution are etched. 12. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 11, dadurch gekennzeich­ net, daß die Gläser durch anodisches Bonden mit dem Silizium hermetisch verbunden wer­ den.12. PEM fuel cell in microsystem technology according to claim 1 to 11, characterized in net that the glasses by anodic bonding hermetically bonded to the silicon the. 13. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 12, dadurch gekennzeich­ net, daß die Brennstoffzufuhr durch seitliche Öffnungen im Glas erfolgt, in die vorzugsweise Kapillaren eingefügt werden.13. PEM fuel cell in microsystem technology according to claim 1 to 12, characterized in net that the fuel supply through lateral Openings are made in the glass, preferably in the Capillaries are inserted. 14. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 13, dadurch gekennzeich­ net, daß die Zellen streifenförmig ausgebildet werden.14. PEM fuel cell in microsystem technology according to claim 1 to 13, characterized in net that the cells are strip-shaped become. 15. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 14, dadurch gekennzeich­ net, daß einzelne Zellen in Reihe und parallel verschaltet werden können.15. PEM fuel cell in microsystem technology according to claim 1 to 14, characterized net that individual cells in series and in parallel can be connected. 16. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 15, dadurch gekennzeich­ net, daß die elektrische Kontaktierung für eine Reihenverschaltung entlang der Breitseiten der Zellen erfolgt.16. PEM fuel cell in microsystem technology according to claim 1 to 15, characterized in net that the electrical contact for a Series connection along the broad sides of the Cells. 17. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 16, dadurch gekennzeich­ net, daß die elektrische Kontaktierung zur Par­ allelschaltung entlang der Schmalseiten erfolgt.17. PEM fuel cell in microsystem technology according to claim 1 to 16, characterized in net that the electrical contact to Par allele switching takes place along the narrow sides. 18. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 17, dadurch gekennzeich­ net, daß zur elektrischen Verbindung struktu­ rierte dünne Schichten verwendet werden.18. PEM fuel cell in microsystem technology according to claim 1 to 17, characterized in net that struktu for electrical connection rated thin layers can be used. 19. PEM-Brennstoffzelle in Mikrosystemtechnik nach Anspruch 1 bis 18, dadurch gekennzeich­ net, daß das zum Verschließen verwendete Glas dem Silizium im Ausdehnungskoeffizienten an­ gepaßt ist.19. PEM fuel cell in microsystem technology according to claim 1 to 18, characterized in net that the glass used for closing the silicon in the coefficient of expansion is fit.
DE19914681A 1999-03-31 1999-03-31 Polymer electrolyte membrane Fuel cell system in microsystem technology Expired - Fee Related DE19914681C2 (en)

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EP1258937A1 (en) * 2001-05-17 2002-11-20 STMicroelectronics S.r.l. Micro silicon fuel cell, method of fabrication and self-powered semiconductor device integrating a micro fuel cell
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