DE19781847T1 - Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung - Google Patents

Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung

Info

Publication number
DE19781847T1
DE19781847T1 DE19781847T DE19781847T DE19781847T1 DE 19781847 T1 DE19781847 T1 DE 19781847T1 DE 19781847 T DE19781847 T DE 19781847T DE 19781847 T DE19781847 T DE 19781847T DE 19781847 T1 DE19781847 T1 DE 19781847T1
Authority
DE
Germany
Prior art keywords
production
thin film
projection system
optical projection
mirror array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19781847T
Other languages
English (en)
Other versions
DE19781847C2 (de
Inventor
Sang Chol Jung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of DE19781847T1 publication Critical patent/DE19781847T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Overhead Projectors And Projection Screens (AREA)
  • Projection Apparatus (AREA)
  • Transforming Electric Information Into Light Information (AREA)
DE19781847T 1996-06-28 1997-06-26 Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung Pending DE19781847T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960025323A KR980003662A (ko) 1996-06-28 1996-06-28 큰 구동 각도를 가지는 박막형 광로 조절 장치
PCT/KR1997/000125 WO1998000978A1 (en) 1996-06-28 1997-06-26 Thin film actuated mirror array in an optical projection system and method for manufacturing the same

Publications (1)

Publication Number Publication Date
DE19781847T1 true DE19781847T1 (de) 1999-06-17

Family

ID=19464438

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19781847T Pending DE19781847T1 (de) 1996-06-28 1997-06-26 Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung
DE19781847A Expired - Fee Related DE19781847C2 (de) 1996-06-28 1997-06-26 Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19781847A Expired - Fee Related DE19781847C2 (de) 1996-06-28 1997-06-26 Dünnschichtbetätigtes Spiegelarray in einem optischen Projektionssystem und Verfahren zu dessen Herstellung

Country Status (10)

Country Link
US (1) US5877517A (de)
JP (1) JP2000513460A (de)
KR (1) KR980003662A (de)
CN (1) CN1123232C (de)
AR (1) AR007675A1 (de)
AU (1) AU717933B2 (de)
DE (2) DE19781847T1 (de)
GB (1) GB2329975B (de)
ID (1) ID17111A (de)
WO (1) WO1998000978A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1062817B1 (de) * 1998-03-20 2007-01-17 Daewoo Electronics Corporation Angetriebenes dünnfilmspiegelarray für ein optisches projektionssystem
US6491991B2 (en) 2000-02-14 2002-12-10 Southwest Recreational Industries, Inc. Artificial turf system
DE10135962C1 (de) * 2001-07-24 2003-06-26 Fraunhofer Ges Forschung Verfahren zur Herstellung eines kontrolliert deformierbaren Funktionselementes sowie Funktionselement
CN1823290A (zh) * 2003-07-14 2006-08-23 皇家飞利浦电子股份有限公司 激光束扫描器
US6947201B2 (en) * 2003-12-08 2005-09-20 Xinetics, Inc. Transverse electrodisplacive actuator array
JP2009258511A (ja) * 2008-04-18 2009-11-05 Toyota Central R&D Labs Inc 光学素子と光学装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
CA2176111A1 (en) * 1993-11-09 1995-05-18 Jeong Beom Ji Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
PL175809B1 (pl) * 1993-11-16 1999-02-26 Daewoo Electronics Co Ltd Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
KR0131570B1 (ko) * 1993-11-30 1998-04-16 배순훈 투사형 화상표시 장치의 광로 조절 장치구조
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR100213281B1 (ko) * 1994-10-31 1999-08-02 전주범 광로조절장치
KR100229788B1 (ko) * 1996-05-29 1999-11-15 전주범 광로 조절 장치의 제조 방법
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same

Also Published As

Publication number Publication date
GB2329975A (en) 1999-04-07
AU717933B2 (en) 2000-04-06
GB2329975B (en) 2000-07-05
WO1998000978A1 (en) 1998-01-08
KR980003662A (ko) 1998-03-30
CN1123232C (zh) 2003-10-01
JP2000513460A (ja) 2000-10-10
US5877517A (en) 1999-03-02
AR007675A1 (es) 1999-11-10
ID17111A (id) 1997-12-04
CN1226361A (zh) 1999-08-18
GB9828588D0 (en) 1999-02-17
AU3192297A (en) 1998-01-21
DE19781847C2 (de) 2001-08-02

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