DE19781747T1 - Elektrischer Kapazitätsmikroströmungssensor, Herstellung für einen elektrischenKapazitätsmikroströmungssensor undaußen passende Halterung für den elektrischen Kapazitätsmikroströmungssensor - Google Patents

Elektrischer Kapazitätsmikroströmungssensor, Herstellung für einen elektrischenKapazitätsmikroströmungssensor undaußen passende Halterung für den elektrischen Kapazitätsmikroströmungssensor

Info

Publication number
DE19781747T1
DE19781747T1 DE19781747T DE19781747T DE19781747T1 DE 19781747 T1 DE19781747 T1 DE 19781747T1 DE 19781747 T DE19781747 T DE 19781747T DE 19781747 T DE19781747 T DE 19781747T DE 19781747 T1 DE19781747 T1 DE 19781747T1
Authority
DE
Germany
Prior art keywords
flow sensor
micro flow
electrical capacitance
capacitance micro
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19781747T
Other languages
English (en)
Inventor
Yoshitaka Kanai
Masanori Anemori
Jun Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Corp
Original Assignee
Zexel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zexel Corp filed Critical Zexel Corp
Publication of DE19781747T1 publication Critical patent/DE19781747T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Volume Flow (AREA)
  • Pressure Sensors (AREA)
  • Weting (AREA)
DE19781747T 1997-09-11 1997-09-25 Elektrischer Kapazitätsmikroströmungssensor, Herstellung für einen elektrischenKapazitätsmikroströmungssensor undaußen passende Halterung für den elektrischen Kapazitätsmikroströmungssensor Withdrawn DE19781747T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26292497A JPH1183886A (ja) 1997-09-11 1997-09-11 静電容量型マイクロフローセンサ及び静電容量型マイクロフローセンサの製造方法並びに静電容量型マイクロフローセンサの外付け用固定具
PCT/JP1997/003398 WO1999013342A1 (fr) 1997-09-11 1997-09-25 Detecteur capacitif de microdebit, son procede de fabrication et son accessoire de fixation exterieure

Publications (1)

Publication Number Publication Date
DE19781747T1 true DE19781747T1 (de) 1999-09-30

Family

ID=17382490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19781747T Withdrawn DE19781747T1 (de) 1997-09-11 1997-09-25 Elektrischer Kapazitätsmikroströmungssensor, Herstellung für einen elektrischenKapazitätsmikroströmungssensor undaußen passende Halterung für den elektrischen Kapazitätsmikroströmungssensor

Country Status (3)

Country Link
JP (1) JPH1183886A (de)
DE (1) DE19781747T1 (de)
WO (1) WO1999013342A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10058378A1 (de) * 2000-11-24 2002-06-06 Fraunhofer Ges Forschung Vorrichtung zur Überwachung der Fluiddurchflußrate in einer Fluidleitung
EP3112819A1 (de) * 2015-06-30 2017-01-04 Commissariat A L'energie Atomique Et Aux Energies Alternatives Miniaturisierter differenzdruck-durchflusssensor

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617098B1 (en) * 1999-07-13 2003-09-09 Input/Output, Inc. Merged-mask micro-machining process
JP4019578B2 (ja) * 1999-12-09 2007-12-12 富士電機機器制御株式会社 静電容量式圧力センサの製造方法
JP4534526B2 (ja) 2004-02-27 2010-09-01 オムロン株式会社 流速測定装置
JP4542397B2 (ja) * 2004-09-02 2010-09-15 キヤノンアネルバ株式会社 静電容量型圧力センサの製造方法
JP6451062B2 (ja) 2014-03-18 2019-01-16 セイコーエプソン株式会社 電子デバイス、電子モジュール、電子機器および移動体
JP6331535B2 (ja) 2014-03-18 2018-05-30 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
CN111999572B (zh) * 2020-06-22 2023-03-31 重庆大学 基于区间电容式传感器的电力设备气液两相流体多参量在线监测装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60262014A (ja) * 1984-06-08 1985-12-25 Ryoichi Endo 流量検知方法
JPH02195941A (ja) * 1989-01-25 1990-08-02 Yamatake Honeywell Co Ltd 呼吸気流量計
FR2687783B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur de pression.
JPH07167725A (ja) * 1993-12-14 1995-07-04 Yazaki Corp 静電容量型圧力センサとその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10058378A1 (de) * 2000-11-24 2002-06-06 Fraunhofer Ges Forschung Vorrichtung zur Überwachung der Fluiddurchflußrate in einer Fluidleitung
DE10058378C2 (de) * 2000-11-24 2003-04-30 Fraunhofer Ges Forschung Vorrichtung zur Überwachung der Fluiddurchflußrate in einer Fluidleitung
EP3112819A1 (de) * 2015-06-30 2017-01-04 Commissariat A L'energie Atomique Et Aux Energies Alternatives Miniaturisierter differenzdruck-durchflusssensor
US10018489B2 (en) 2015-06-30 2018-07-10 Commissariat à l'énergie atomique et aux énergies alternatives Miniature differential pressure flow sensor

Also Published As

Publication number Publication date
WO1999013342A1 (fr) 1999-03-18
JPH1183886A (ja) 1999-03-26

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
8127 New person/name/address of the applicant

Owner name: BOSCH AUTOMOTIVE SYSTEMS CORP., TOKIO/TOKYO, JP

8130 Withdrawal