DE19608632B4 - Apparatus for determining the topography of a surface and method for determining the topography of a surface - Google Patents

Apparatus for determining the topography of a surface and method for determining the topography of a surface

Info

Publication number
DE19608632B4
DE19608632B4 DE1996108632 DE19608632A DE19608632B4 DE 19608632 B4 DE19608632 B4 DE 19608632B4 DE 1996108632 DE1996108632 DE 1996108632 DE 19608632 A DE19608632 A DE 19608632A DE 19608632 B4 DE19608632 B4 DE 19608632B4
Authority
DE
Germany
Prior art keywords
surface
projection
topography
light beam
device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1996108632
Other languages
German (de)
Other versions
DE19608632A1 (en
Inventor
Johannes Reichle
Andreas RÖNNER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SCAPS GmbH
Original Assignee
SCAPS GMBH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCAPS GMBH filed Critical SCAPS GMBH
Priority to DE1996108632 priority Critical patent/DE19608632B4/en
Publication of DE19608632A1 publication Critical patent/DE19608632A1/en
Application granted granted Critical
Publication of DE19608632B4 publication Critical patent/DE19608632B4/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical means for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2536Measuring arrangements characterised by the use of optical means for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings with variable grating pitch, projected on the object with the same angle of incidence

Abstract

contraption for determining the topography of a surface, with a projection device (4) projecting a striped pattern on the surface (3), and one Viewing device (5) that projected onto the surface Strip pattern detected at an angle to the projection direction and evaluated in such a way that the Topography is determined, wherein the projection device (4) a mirror chip (10), which by selective deflection of a Lichtstahls (9, 12) generates the stripe pattern.

Description

  • The The invention relates to a device for determining the topography a surface and a method for determining the topography of a surface.
  • One Such a method is generally understood by the terms triangulation, Strip light projection, binary code or moire method known. In the latter three methods, one to be scanned or surface to be measured a striped pattern is projected and viewed by a CCD camera. By Projection of different phase positions (phase shift) or different Lattice constants can provide information about the spatial location of each individual Point of the surface be won.
  • to Generation of fringe projection is usually either on or several line grids with corresponding displacement or rotation mechanisms or an LCD projector used. These known devices However, in terms of stripe contrast, reaction time in the Displacement or rotation, flexibility in relation to different measuring method Size and price not optimal.
  • From JP 57-26706 A, the DE 38 29 925 A1 and from the EP 0 486 219 A2 In each case, a device for determining the topography of a surface with a projection device which projects a light beam onto the surface and a viewing device which detects the light beam projected onto the surface at an angle to the projection direction and evaluates such that the topography is determined are known , In addition, from JP 57-26706 A, the DE 38 29 925 A1 and from the EP 0 486 219 A2 a method is known for determining the topography of a surface in which a light beam is projected onto a scanning region of the surface with a first direction and this scanning region is viewed under a second direction and evaluated in such a way that the topography is determined.
  • From the EP 0 460 889 A2 It is known to use a mirror chip for scanning an optical storage medium.
  • It Object of the invention, an apparatus and a method to determine the topography of a surface, the or significantly improved with regard to the above-mentioned aspects.
  • The The object is achieved by the device of claim 1 or by the The method of claim 9 solved.
  • further developments The invention are specified in the subclaims.
  • One essential aspect of the invention is that the above mentioned known devices for strip projection by a Mirror chip, for example of the DMD type, to be replaced. Such a mirror chip was for example developed for use with projectors, printers and televisions and is described, for example, in the article by Larry J. Hornbeck, "Current Status of the Digital Micromirror Device (DMD) for Projection Television Applications ", International Electron Devices Meeting, 5.-8. December 1993, Washington, US, or in Larry J. Hornbeck, "Deformable Mirror Spatial Light Modulators ", Proceedings of SPIE The International Society for Optical Engineering, Volume 1150, San Diego, US, 6-11. August 1989. A corresponding mirror chip is also in c't 1994, Issue 9, page 38, described.
  • Further Features of the invention will become apparent from the description of an embodiment with reference to the figure, which schematically shows the structure of the device according to the invention represents.
  • The figure shows a measuring head 1 , which is for scanning a scanning area 2 the surface 3 this is positioned opposite. The measuring head 1 has a projection device 4 and a viewing device 5 on. The projection device 4 includes a light source 6 For example, a laser or a white light source in the form of a halogen lamp or a flashlight, the one on an optics 7 bundled and at a mirror 8th reflected light beam 9 at a predetermined angle, for example 20 °, on a mirror chip 10 of the DMD type.
  • This mirror chip 10 is described in detail in the references given above, so that a detailed description is not required here. The known mirror chip has a multiplicity of micromirrors arranged in the form of a matrix, which can be deflected individually by the deflection angle from a first stable position to a second stable position. Typical technical data are: resolution 640 · 480 to 2048 · 1152 pixels (pixels) pixel size 16 x 16 μm pixel pitch 17 μm angle of deflection +/- 10 ° deflection time 10 μs Sensor size about 1 x 1 cm
  • Instead of Such a chip is also a chip with each column jointly deflectable micromirrors or with columnar shaped Micro mirrors can be used. Also, individual micromirrors may be included certain scanning methods such as triangulation.
  • The projection device 4 also has a projection lens 11 on, the one from the mirror chip 10 reflected beam 16 corresponding to the individual deflection of the micromirrors as a striped pattern 12 on the scanning area 2 projected.
  • The viewing device 5 has a camera 13 with CCD chip 14 as well as a viewing lens 15 on; the objective 15 is with its axis angularly opposite to the axis of the projection lens 11 so employed that the camera 13 . 14 over the viewing lens 15 the scanning area 2 considered.
  • It is also a control unit, not shown, for coupling and controlling the projection device 4 , in particular for the selective control of the individual micromirrors of the mirror chip 10 , and the viewing device 5 to carry out the scanning and evaluation described below.
  • In operation, the measuring head 1 opposite a surface to be scanned 3 positioned and the lenses 11 and 15 each on the scanning area 2 aligned. Single selected micromirrors in the mirror chip 10 are then controlled so that they the incident light beam 9 to the lens 11 reflect; For example, each individual columns of the mirror field in the mirror chip 10 be controlled, so that the light beam 9 as a reflected beam 16 is reflected in the form of a stripe pattern to the lens. The portion of the light beam falling on the non-driven micromirrors 9 On the other hand, it is further deflected by an angle corresponding to the deflection angle, so that the corresponding reflected beam 17 not on the lens 11 meets. This is from the lens 11 the stripe pattern 12 on the scanning area 2 projected.
  • That on the scanning area 2 projected stripe pattern is from the camera 13 over the viewing lens 15 considered. This is done in a conventional manner by evaluating the stripe pattern on the surface 3 , For example, by comparison with a stored reference pattern, obtained geometric information about the surface, which can be evaluated in the control unit or a separate computer connected.
  • The Control of the individual micromirrors and thus the projected Stripe patterns, such as the stripe spacing, may be appropriate the surface to be scanned chosen become; This is an adaptation to the surface, such as the gradients the surface, and according to the required accuracy and resolution possible. There the masses moved during the deflection of the micromirrors are very small, is an extremely small deflection time (almost "real time") and thus a fast result of each Measurements or shifted strips possible. By deflection optional single micromirrors or mirror groups, e.g. Columns or rows, For example, a plurality of different measuring methods, such as e.g. Point triangulation, line triangulation, Moire projection, Strip light projection or absolute measurement by binary code method appropriate control of a single device can be performed.
  • Further modifications of the device described are possible. So can the projection device 4 instead of the laser or white light source, any other suitable light source, such as a sodium lamp, included.

Claims (10)

  1. Device for determining the topography of a surface, comprising a projection device ( 4 ), which has a striped pattern on the surface ( 3 ) and a viewing device ( 5 ) which detects the stripe pattern projected onto the surface at an angle to the direction of projection and evaluates such that the topography is determined, the projection apparatus ( 4 ) a mirror chip ( 10 ), which by selective deflection of a light beam ( 9 . 12 ) generates the stripe pattern.
  2. Apparatus according to claim 1, wherein the mirror chip ( 10 ) has at least one micromirror each having at least two stable layers.
  3. Apparatus according to claim 1, wherein the mirror chip ( 10 ) has a plurality of micromirrors arranged in a row or column and individually controllable in each one of at least two stable layers.
  4. Apparatus according to claim 1, wherein the mirror chip ( 10 ) has a plurality of micromirrors, which are arranged in a matrix and individually, row or column-wise controllable in each case one of at least two stable layers.
  5. Device according to one of claims 1 to 4, wherein the mirror chip ( 10 ) in one of a light source ( 6 ) emitted bundled light beam ( 9 ) is arranged so that in a first stable deflection position of a micromirror of the light beam ( 9 ) is reflected at a first angle of reflection so that it is transmitted through a projection lens ( 11 ) to a scanning area ( 2 ) of the surface ( 3 ), and in a second stable deflection position of the micromirror the light beam ( 9 ) is reflected at a second angle of reflection so that it does not touch the scanning area (FIG. 2 ) of the surface ( 3 ).
  6. Device according to one of claims 1 to 5, wherein the projection device ( 4 ) designed as a laser or white light source light source ( 6 ) having.
  7. Device according to one of claims 1 to 6, wherein the viewing device ( 5 ) a camera ( 13 ) with a CCD chip ( 14 ) having.
  8. Device according to one of claims 1 to 7, wherein the projection device ( 4 ) and the viewing device ( 5 ) together in a relative to the surface ( 3 ) positionable measuring head ( 1 ) are arranged.
  9. Method for determining the topography of a surface by projection of a stripe pattern, in which a stripe pattern is applied to a scanning region ( 2 ) of the surface ( 3 ) is projected by a light beam ( 9 ) on a mirror chip ( 10 ) and the mirror chip ( 10 ) is driven such that in a first stable position of a mirror of the mirror chip ( 10 ) the reflected light beam ( 16 ) is projected onto the scanning area and in a second stable position the reflected light beam ( 17 ) not in the scanning area ( 2 ) and the scanning area ( 2 ) is viewed under a second direction and evaluated so that the topography is determined.
  10. Method according to claim 9, wherein the scanning of the surface ( 3 ) is carried out by triangulation or by evaluation of the stripe pattern is performed.
DE1996108632 1996-03-06 1996-03-06 Apparatus for determining the topography of a surface and method for determining the topography of a surface Expired - Lifetime DE19608632B4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE1996108632 DE19608632B4 (en) 1996-03-06 1996-03-06 Apparatus for determining the topography of a surface and method for determining the topography of a surface

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE1996108632 DE19608632B4 (en) 1996-03-06 1996-03-06 Apparatus for determining the topography of a surface and method for determining the topography of a surface
PCT/EP1997/000898 WO1997033140A1 (en) 1996-03-06 1997-02-25 Device and process for optically scanning surfaces
AU20933/97A AU2093397A (en) 1996-03-06 1997-02-25 Device and process for optically scanning surfaces

Publications (2)

Publication Number Publication Date
DE19608632A1 DE19608632A1 (en) 1997-09-11
DE19608632B4 true DE19608632B4 (en) 2005-12-29

Family

ID=7787378

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996108632 Expired - Lifetime DE19608632B4 (en) 1996-03-06 1996-03-06 Apparatus for determining the topography of a surface and method for determining the topography of a surface

Country Status (3)

Country Link
AU (1) AU2093397A (en)
DE (1) DE19608632B4 (en)
WO (1) WO1997033140A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19742264C2 (en) * 1997-09-25 2001-09-20 Vosseler Erste Patentverwertun Endoscope
DE19748967B4 (en) * 1997-11-06 2009-04-02 Bundesdruckerei Gmbh Method and device for producing a variable security hologram
DE19757773A1 (en) * 1997-12-24 1999-07-01 Bernward Maehner Detailed simulation of plastic changes in human face to prepare cosmetic corrections using plastic surgery
DE19824709A1 (en) * 1998-06-03 1999-12-09 Bundesdruckerei Gmbh Producing luminance distribution array from rays projected onto medium using digital array radiation processors
DE10244819B4 (en) * 2002-09-26 2007-05-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus and method for detecting a fluorescent substance on a technical surface
DE10317018A1 (en) 2003-04-11 2004-11-18 Infineon Technologies Ag Multichip module with several semiconductor chips and printed circuit board with several components
DE10323317A1 (en) * 2003-05-23 2004-12-16 Conti Temic Microelectronic Gmbh Car object detection or distance measurement optical system path folding unit uses silicon micromirror reflectors
US7064810B2 (en) 2003-09-15 2006-06-20 Deere & Company Optical range finder with directed attention
JP5356650B2 (en) * 2004-01-15 2013-12-04 テクニオン リサーチ アンド ディベロップメント ファウンデーション リミテッド 3D video scanner
DE102004050355A1 (en) * 2004-10-15 2006-04-27 Steinbichler Optotechnik Gmbh Method and device for testing the surface of a tire
US8274507B2 (en) * 2009-07-02 2012-09-25 Robert Bosch Gmbh Method and apparatus for obtaining 3-dimensional data with a portable device
US8219274B2 (en) * 2009-07-02 2012-07-10 Robert Bosch Gmbh 3-dimensional perception system and method for mobile platform
DE102010022827A1 (en) 2010-06-05 2011-12-08 TSK Prüfsysteme GmbH Height surveying device for measuring the height of a motor vehicle central electrics
DE102012001307A1 (en) 2012-01-19 2013-07-25 Friedrich-Schiller-Universität Jena Method for three dimensional measurement of objects, particularly under obstructive lighting conditions, involves detecting to be changed or multiple different patterns by detector, where patterns are projected on object surface
DE102012002161A1 (en) 2012-01-31 2013-08-01 Friedrich-Schiller-Universität Jena Method for three-dimensional optical surface measurement of objects by measurement device, involves projecting spectral narrow band optical patterns on object, and detecting patterns as location-differing image pattern of object surface
DE102013200657B4 (en) * 2013-01-17 2015-11-26 Sypro Optics Gmbh Device for generating an optical dot pattern
AT520794B1 (en) * 2017-12-20 2019-11-15 Prinoth Ag snow vehicle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3829925A1 (en) * 1988-09-02 1990-03-15 Kaltenbach & Voigt Optical probe for 3D measurement of teeth in the buccal cavity
EP0460889A2 (en) * 1990-06-06 1991-12-11 Texas Instruments Incorporated Optical tracking system
EP0486219A2 (en) * 1990-11-13 1992-05-20 Hughes Aircraft Company Automated evaluation of painted surface quality

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726706A (en) * 1980-07-24 1982-02-12 Mitsubishi Electric Corp Detector for shape of body

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3829925A1 (en) * 1988-09-02 1990-03-15 Kaltenbach & Voigt Optical probe for 3D measurement of teeth in the buccal cavity
EP0460889A2 (en) * 1990-06-06 1991-12-11 Texas Instruments Incorporated Optical tracking system
EP0486219A2 (en) * 1990-11-13 1992-05-20 Hughes Aircraft Company Automated evaluation of painted surface quality

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
c't (1994) Heft 9, S. 38 "Spieglein, Spieglein auf dem Chip" *
HORNBECK, L.J.: "Current Status of the Digital Micromirror Device (DMD) for Projection Televi- sion Applications" in International Electronics Devices Meeting, 5.-8. Dez. 1993, Washington, USA (IEDM 93-S:381-384) *
HORNBECK, L.J.: "Deformable-Mirror Spatial Light Modulators" in: Proceedings of SPIE THe Interna- tional Society for Optical Engineering, 6.-11. August 1989, San Diego, USA, SPIE Critical Re- views Series, Vol. 1150, S. 86-102 *
JP 57-26706 A in: Patent Abstracts of Japan, Section P, Vol. 6/No. 88 (1982) P-118 *

Also Published As

Publication number Publication date
DE19608632A1 (en) 1997-09-11
AU2093397A (en) 1997-09-22
WO1997033140A1 (en) 1997-09-12

Similar Documents

Publication Publication Date Title
US9683837B2 (en) Optical measurement method and measurement system for determining 3D coordinates on a measurement object surface
CN101821578B (en) Non-contact measurement apparatus and method
TWI290237B (en) Two-dimensional image projection system
US6825454B2 (en) Automatic focusing device for an optical appliance
CN1258694C (en) Pattern recording apparatus and method
KR101407754B1 (en) Writing apparatuses and methods
DK1825217T3 (en) Measuring device and method of the basic principles of confocal microscopy
EP1596158B1 (en) Three-dimensional shape input device
US6081614A (en) Surface position detecting method and scanning exposure method using the same
US6862097B2 (en) Three-dimensional shape measuring method, and three-dimensional shape measuring apparatus
JP5032253B2 (en) Measuring apparatus and method
US5739899A (en) Projection exposure apparatus correcting tilt of telecentricity
EP1579171B1 (en) Laser digitizer system for dental applications
USRE36560E (en) Method and system for high-speed, high-resolution, 3-D imaging of an object at a vision station
US7532333B2 (en) Method and apparatus for determining the shape and the local surface normals of specular surfaces
US5629765A (en) Wavefront measuring system with integral geometric reference (IGR)
CN101790775B (en) Maskless exposure method
US6624879B2 (en) Exposure apparatus and method for photolithography
US8446579B2 (en) Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
DE112012002943T5 (en) Apparatus and method using a spatial light modulator for determining 3D coordinates of an object
EP1597539B1 (en) Method and optical system for measuring the topography of a test object
JP4255918B2 (en) System and method for calibrating a spatial light modulator
US4758093A (en) Apparatus and method for 3-D measurement using holographic scanning
US5173796A (en) Three dimensional scanning system
US6611343B1 (en) Method and device for 3D measurement

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: SCAPS GMBH, 81476 MUENCHEN, DE

8363 Opposition against the patent
8330 Complete disclaimer