DE1953712C3 - Vorrichtung zum Erzeugen eines Musters auf einem Werkstück mit Hilfe eines Elektronenstrahls - Google Patents

Vorrichtung zum Erzeugen eines Musters auf einem Werkstück mit Hilfe eines Elektronenstrahls

Info

Publication number
DE1953712C3
DE1953712C3 DE19691953712 DE1953712A DE1953712C3 DE 1953712 C3 DE1953712 C3 DE 1953712C3 DE 19691953712 DE19691953712 DE 19691953712 DE 1953712 A DE1953712 A DE 1953712A DE 1953712 C3 DE1953712 C3 DE 1953712C3
Authority
DE
Germany
Prior art keywords
cxl
electron beam
workpiece carrier
workpiece
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19691953712
Other languages
German (de)
English (en)
Other versions
DE1953712A1 (de
DE1953712B2 (de
Inventor
Olivier Cahen
Jean Edgar St. Remy- Les-Chevreuses Picquendar
Georges Pircher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson-Brandt SA
Original Assignee
Thomson-Brandt SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson-Brandt SA filed Critical Thomson-Brandt SA
Publication of DE1953712A1 publication Critical patent/DE1953712A1/de
Publication of DE1953712B2 publication Critical patent/DE1953712B2/de
Application granted granted Critical
Publication of DE1953712C3 publication Critical patent/DE1953712C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE19691953712 1968-10-25 1969-10-24 Vorrichtung zum Erzeugen eines Musters auf einem Werkstück mit Hilfe eines Elektronenstrahls Expired DE1953712C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR171342 1968-10-25

Publications (3)

Publication Number Publication Date
DE1953712A1 DE1953712A1 (de) 1970-06-18
DE1953712B2 DE1953712B2 (de) 1979-09-06
DE1953712C3 true DE1953712C3 (de) 1980-06-26

Family

ID=8656116

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691953712 Expired DE1953712C3 (de) 1968-10-25 1969-10-24 Vorrichtung zum Erzeugen eines Musters auf einem Werkstück mit Hilfe eines Elektronenstrahls

Country Status (4)

Country Link
DE (1) DE1953712C3 (enExample)
FR (1) FR1587573A (enExample)
GB (1) GB1275577A (enExample)
SE (1) SE362987B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8204450A (nl) * 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置
US5140242A (en) * 1990-04-30 1992-08-18 International Business Machines Corporation Servo guided stage system
US5507877A (en) * 1992-11-16 1996-04-16 Winterhalter Gastronom Gmbh Dishwashing machine
US7298495B2 (en) * 2005-06-23 2007-11-20 Lewis George C System and method for positioning an object through use of a rotating laser metrology system
CN107665827B (zh) * 2016-07-29 2020-01-24 上海微电子装备（集团）股份有限公司 芯片键合装置和方法

Also Published As

Publication number Publication date
SE362987B (enExample) 1973-12-27
DE1953712A1 (de) 1970-06-18
FR1587573A (enExample) 1970-03-20
DE1953712B2 (de) 1979-09-06
GB1275577A (en) 1972-05-24

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Legal Events

Date Code Title Description
OGA New person/name/address of the applicant
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee