DE1901211A1 - Vorrichtung zur Kathodenzerstaeubung - Google Patents

Vorrichtung zur Kathodenzerstaeubung

Info

Publication number
DE1901211A1
DE1901211A1 DE19691901211 DE1901211A DE1901211A1 DE 1901211 A1 DE1901211 A1 DE 1901211A1 DE 19691901211 DE19691901211 DE 19691901211 DE 1901211 A DE1901211 A DE 1901211A DE 1901211 A1 DE1901211 A1 DE 1901211A1
Authority
DE
Germany
Prior art keywords
axis
cylinders
cylinder
slide
catcher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691901211
Other languages
German (de)
English (en)
Inventor
Georges Dubois
Ghislaine Goupil
Jean Joly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lignes Telegraphiques et Telephoniques LTT SA
Original Assignee
Lignes Telegraphiques et Telephoniques LTT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lignes Telegraphiques et Telephoniques LTT SA filed Critical Lignes Telegraphiques et Telephoniques LTT SA
Publication of DE1901211A1 publication Critical patent/DE1901211A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19691901211 1968-01-11 1969-01-10 Vorrichtung zur Kathodenzerstaeubung Pending DE1901211A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR135568 1968-01-11
FR06009034 1968-02-21
FR161082A FR94900E (fr) 1968-01-11 1968-07-30 Appareil de pulvérisation cathodique a grande capacité.

Publications (1)

Publication Number Publication Date
DE1901211A1 true DE1901211A1 (de) 1970-09-24

Family

ID=27244767

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691901211 Pending DE1901211A1 (de) 1968-01-11 1969-01-10 Vorrichtung zur Kathodenzerstaeubung

Country Status (4)

Country Link
BE (1) BE726267A (US06262066-20010717-C00315.png)
DE (1) DE1901211A1 (US06262066-20010717-C00315.png)
FR (1) FR94900E (US06262066-20010717-C00315.png)
GB (1) GB1257342A (US06262066-20010717-C00315.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720048B (zh) * 2022-06-09 2022-09-02 季华实验室 一种电容薄膜真空计及neg薄膜制备方法

Also Published As

Publication number Publication date
BE726267A (US06262066-20010717-C00315.png) 1969-05-29
GB1257342A (US06262066-20010717-C00315.png) 1971-12-15
FR94900E (fr) 1970-01-16

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