DE1765790A1 - Verfahren zur Herstellung eines integrierten Widerstands - Google Patents

Verfahren zur Herstellung eines integrierten Widerstands

Info

Publication number
DE1765790A1
DE1765790A1 DE19681765790 DE1765790A DE1765790A1 DE 1765790 A1 DE1765790 A1 DE 1765790A1 DE 19681765790 DE19681765790 DE 19681765790 DE 1765790 A DE1765790 A DE 1765790A DE 1765790 A1 DE1765790 A1 DE 1765790A1
Authority
DE
Germany
Prior art keywords
layer
metal
tantalum
substrate
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681765790
Other languages
German (de)
English (en)
Inventor
Philippe Basseville
Rene Besamat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUROP COMPOSANTS ELECTRON
Original Assignee
EUROP COMPOSANTS ELECTRON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EUROP COMPOSANTS ELECTRON filed Critical EUROP COMPOSANTS ELECTRON
Publication of DE1765790A1 publication Critical patent/DE1765790A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Physical Vapour Deposition (AREA)
DE19681765790 1967-07-19 1968-07-18 Verfahren zur Herstellung eines integrierten Widerstands Pending DE1765790A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR114759A FR1537897A (fr) 1967-07-19 1967-07-19 Procédé de fabrication de circuits électriques en couches minces

Publications (1)

Publication Number Publication Date
DE1765790A1 true DE1765790A1 (de) 1971-08-26

Family

ID=8635338

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681765790 Pending DE1765790A1 (de) 1967-07-19 1968-07-18 Verfahren zur Herstellung eines integrierten Widerstands

Country Status (6)

Country Link
US (1) US3607476A (enExample)
JP (1) JPS5421538B1 (enExample)
DE (1) DE1765790A1 (enExample)
FR (1) FR1537897A (enExample)
GB (1) GB1238504A (enExample)
NL (1) NL6810247A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1286048B (de) * 1964-09-28 1969-01-02 Buckau Wolf Maschf R Zwanglaufdampferzeuger
DE2847356A1 (de) * 1977-11-14 1979-05-17 Nitto Electric Ind Co Substrat fuer eine gedruckte schaltung mit widerstandselementen

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1424980A (en) * 1973-06-20 1976-02-11 Siemens Ag Thin-film electrical circuits
US4019168A (en) * 1975-08-21 1977-04-19 Airco, Inc. Bilayer thin film resistor and method for manufacture
US4396900A (en) * 1982-03-08 1983-08-02 The United States Of America As Represented By The Secretary Of The Navy Thin film microstrip circuits
US6846991B2 (en) * 1999-01-13 2005-01-25 Applied Kinetics, Inc. Electrical component and a shuntable/shunted electrical component and method for shunting and deshunting

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1286048B (de) * 1964-09-28 1969-01-02 Buckau Wolf Maschf R Zwanglaufdampferzeuger
DE2847356A1 (de) * 1977-11-14 1979-05-17 Nitto Electric Ind Co Substrat fuer eine gedruckte schaltung mit widerstandselementen

Also Published As

Publication number Publication date
GB1238504A (enExample) 1971-07-07
FR1537897A (fr) 1968-08-30
US3607476A (en) 1971-09-21
JPS5421538B1 (enExample) 1979-07-31
NL6810247A (enExample) 1969-01-21

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