DE1764756C3 - - Google Patents
Info
- Publication number
- DE1764756C3 DE1764756C3 DE1764756A DE1764756A DE1764756C3 DE 1764756 C3 DE1764756 C3 DE 1764756C3 DE 1764756 A DE1764756 A DE 1764756A DE 1764756 A DE1764756 A DE 1764756A DE 1764756 C3 DE1764756 C3 DE 1764756C3
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6319—Formation by plasma treatments, e.g. plasma oxidation of the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6324—Formation by anodic treatments, e.g. anodic oxidation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/69—Inorganic materials
- H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
- H10P14/6938—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides
- H10P14/6939—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides characterised by the metal
- H10P14/69391—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides characterised by the metal the material containing aluminium, e.g. Al2O3
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65854167A | 1967-08-04 | 1967-08-04 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE1764756A1 DE1764756A1 (de) | 1972-01-13 |
| DE1764756B2 DE1764756B2 (de) | 1973-07-19 |
| DE1764756C3 true DE1764756C3 (https=) | 1974-02-21 |
Family
ID=24641673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681764756 Granted DE1764756B2 (de) | 1967-08-04 | 1968-07-31 | Verfahren zur herstellung eines duennfilm-feldeffekt-bauelementes |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE1764756B2 (https=) |
| FR (1) | FR1572063A (https=) |
| GB (1) | GB1161647A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7608958A (nl) * | 1975-08-29 | 1977-03-02 | Westinghouse Electric Corp | Dunne film transistorinrichting. |
| DE2704312A1 (de) * | 1976-08-20 | 1978-02-23 | Westinghouse Electric Corp | Duennschicht-transistoreinrichtung |
| US4115799A (en) * | 1977-01-26 | 1978-09-19 | Westinghouse Electric Corp. | Thin film copper transition between aluminum and indium copper films |
| JPS58100461A (ja) * | 1981-12-10 | 1983-06-15 | Japan Electronic Ind Dev Assoc<Jeida> | 薄膜トランジスタの製造方法 |
-
1968
- 1968-07-15 GB GB33569/68A patent/GB1161647A/en not_active Expired
- 1968-07-18 FR FR1572063D patent/FR1572063A/fr not_active Expired
- 1968-07-31 DE DE19681764756 patent/DE1764756B2/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE1764756A1 (de) | 1972-01-13 |
| DE1764756B2 (de) | 1973-07-19 |
| FR1572063A (https=) | 1969-06-20 |
| GB1161647A (en) | 1969-08-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |