DE1589982A1 - Einrichtung zur Intensitaetssteuerung bei Strahlerzeugungssystemen - Google Patents
Einrichtung zur Intensitaetssteuerung bei StrahlerzeugungssystemenInfo
- Publication number
- DE1589982A1 DE1589982A1 DE19671589982 DE1589982A DE1589982A1 DE 1589982 A1 DE1589982 A1 DE 1589982A1 DE 19671589982 DE19671589982 DE 19671589982 DE 1589982 A DE1589982 A DE 1589982A DE 1589982 A1 DE1589982 A1 DE 1589982A1
- Authority
- DE
- Germany
- Prior art keywords
- lens
- intensity
- detector
- current
- docket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000037007 arousal Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
- G11B7/0917—Focus-error methods other than those covered by G11B7/0909 - G11B7/0916
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
- G11C13/048—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using other optical storage elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/52—Arrangements for controlling intensity of ray or beam, e.g. for modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US603556A US3418520A (en) | 1966-12-21 | 1966-12-21 | Intensity control system for a particle beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1589982A1 true DE1589982A1 (de) | 1970-04-09 |
Family
ID=24415941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671589982 Pending DE1589982A1 (de) | 1966-12-21 | 1967-12-01 | Einrichtung zur Intensitaetssteuerung bei Strahlerzeugungssystemen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3418520A (enExample) |
| CH (1) | CH485316A (enExample) |
| DE (1) | DE1589982A1 (enExample) |
| GB (1) | GB1201176A (enExample) |
| SE (1) | SE336409B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3497762A (en) * | 1965-11-03 | 1970-02-24 | Minnesota Mining & Mfg | Electron beam recording system and apparatus |
| US3483427A (en) * | 1967-11-03 | 1969-12-09 | Minnesota Mining & Mfg | Lens for electron beam recorder |
| US3786305A (en) * | 1972-05-15 | 1974-01-15 | Hitachi Ltd | Field emission electron gun |
| FR49798E (fr) * | 1972-12-14 | 1939-07-17 | Régulateur pour l'admission d'air additionnel aux moteurs à combustion interne | |
| US7342817B2 (en) * | 2005-04-06 | 2008-03-11 | Hewlett-Packard Development Company, L.P. | System and method for writing data using an electron beam |
| DE102018120630B3 (de) * | 2018-08-23 | 2019-10-31 | Carl Zeiss Microscopy Gmbh | Verfahren zum Bearbeiten eines Objekts und Programm zur Steuerung eines Partikelstrahlsystems |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2556455A (en) * | 1948-03-02 | 1951-06-12 | Rauland Corp | Cathode-ray tube focusing system |
| US2627589A (en) * | 1950-10-30 | 1953-02-03 | Rca Corp | Focusing of electron optical apparatus |
-
1966
- 1966-12-21 US US603556A patent/US3418520A/en not_active Expired - Lifetime
-
1967
- 1967-11-27 GB GB53759/67A patent/GB1201176A/en not_active Expired
- 1967-12-01 DE DE19671589982 patent/DE1589982A1/de active Pending
- 1967-12-07 SE SE16810/67A patent/SE336409B/xx unknown
- 1967-12-20 CH CH1802167A patent/CH485316A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US3418520A (en) | 1968-12-24 |
| GB1201176A (en) | 1970-08-05 |
| SE336409B (enExample) | 1971-07-05 |
| CH485316A (de) | 1970-01-31 |
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