DE1565892C3 - Elektronengenerator - Google Patents

Elektronengenerator

Info

Publication number
DE1565892C3
DE1565892C3 DE1565892A DE1565892A DE1565892C3 DE 1565892 C3 DE1565892 C3 DE 1565892C3 DE 1565892 A DE1565892 A DE 1565892A DE 1565892 A DE1565892 A DE 1565892A DE 1565892 C3 DE1565892 C3 DE 1565892C3
Authority
DE
Germany
Prior art keywords
electron
emission cathode
electron generator
platform
shield electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1565892A
Other languages
German (de)
English (en)
Other versions
DE1565892B2 (de
DE1565892A1 (de
Inventor
William Galen South Gate Colemann
John West Covina Stugart Jun.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of DE1565892A1 publication Critical patent/DE1565892A1/de
Publication of DE1565892B2 publication Critical patent/DE1565892B2/de
Application granted granted Critical
Publication of DE1565892C3 publication Critical patent/DE1565892C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE1565892A 1965-03-25 1966-03-23 Elektronengenerator Expired DE1565892C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US442580A US3333136A (en) 1965-03-25 1965-03-25 Electron-beam gun with adjustable filament baffle

Publications (3)

Publication Number Publication Date
DE1565892A1 DE1565892A1 (de) 1970-03-26
DE1565892B2 DE1565892B2 (de) 1973-03-15
DE1565892C3 true DE1565892C3 (de) 1973-09-27

Family

ID=23757341

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1565892A Expired DE1565892C3 (de) 1965-03-25 1966-03-23 Elektronengenerator

Country Status (5)

Country Link
US (2) US3333136A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE (1) BE678411A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1565892C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1129957A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6603676A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3454814A (en) * 1966-07-29 1969-07-08 Atomic Energy Commission Tubular vapor source
JPS6023455B2 (ja) * 1978-10-17 1985-06-07 株式会社東芝 直熱形陰極構体
EP0698907A3 (de) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Elektronenkanone.

Also Published As

Publication number Publication date
US3333136A (en) 1967-07-25
NL6603676A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1966-09-26
DE1565892B2 (de) 1973-03-15
BE678411A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1966-09-26
USB333136I5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB1129957A (en) 1968-10-09
DE1565892A1 (de) 1970-03-26

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)