GB1129957A - Electron beam gun - Google Patents

Electron beam gun

Info

Publication number
GB1129957A
GB1129957A GB13348/66A GB1334866A GB1129957A GB 1129957 A GB1129957 A GB 1129957A GB 13348/66 A GB13348/66 A GB 13348/66A GB 1334866 A GB1334866 A GB 1334866A GB 1129957 A GB1129957 A GB 1129957A
Authority
GB
United Kingdom
Prior art keywords
platform
cathode
blocks
strap
shielded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB13348/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of GB1129957A publication Critical patent/GB1129957A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,129,957. Electron guns. UNITED STATES STEEL CORP. 25 March, 1966 [25 March, 1965], No. 13348/66. Heading H1D. An electron gun for metal evaporating and coating apparatus comprises a cathode 30 in the form of a helix or a zig-zag wire mounted on terminal straps 14, 15 through the intermediary of leaf-springs 28, and a high voltage platform 16 secured to the strap 15 and extending towards but stopping short of the other strap 14. A trough-shaped focusing electrode and baffle 35 surrounding the cathode is adjustably mounted on the platform 16 by cradles 36 upstanding on blocks 37. The blocks 37 fit loosely within boxes 38 carried by the platform and may be adjusted vertically by shafts 39 provided at the ends with eccentrics. The blocks may be adjusted laterally by side screws 42. Clamping screws 41 are also provided. The platform 16 is clamped between an upper, shielded insulator 27, and lower shielded insulators 25 which rest on a spacer block 26 on a bottom plate 12 by means of a cross-beam 22 and a screw plug 24. The free end of the platform 16 is held between shielded insulators 17 bolted at 18 to the arms of a yoke-shaped section 14a of the terminal strap 14. Inwardlyprojecting accelerating electrode plates 34 are adjustably secured to side walls 13 of the structure. The cathode 30 is also supported at its mid-point by an auxiliary support 32. A number of similar gun structures may be assembled in end-to-end relation along a crucible.
GB13348/66A 1965-03-25 1966-03-25 Electron beam gun Expired GB1129957A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US442580A US3333136A (en) 1965-03-25 1965-03-25 Electron-beam gun with adjustable filament baffle

Publications (1)

Publication Number Publication Date
GB1129957A true GB1129957A (en) 1968-10-09

Family

ID=23757341

Family Applications (1)

Application Number Title Priority Date Filing Date
GB13348/66A Expired GB1129957A (en) 1965-03-25 1966-03-25 Electron beam gun

Country Status (5)

Country Link
US (2) US3333136A (en)
BE (1) BE678411A (en)
DE (1) DE1565892C3 (en)
GB (1) GB1129957A (en)
NL (1) NL6603676A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3454814A (en) * 1966-07-29 1969-07-08 Atomic Energy Commission Tubular vapor source
JPS6023455B2 (en) * 1978-10-17 1985-06-07 株式会社東芝 Directly heated cathode structure
EP0698907A3 (en) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Electron gun

Also Published As

Publication number Publication date
USB333136I5 (en)
US3333136A (en) 1967-07-25
BE678411A (en) 1966-09-26
NL6603676A (en) 1966-09-26
DE1565892B2 (en) 1973-03-15
DE1565892C3 (en) 1973-09-27
DE1565892A1 (en) 1970-03-26

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