DE1565007A1 - Verfahren und Geraet zur thermischen Materialbearbeitung mittels Laserstrahlen - Google Patents
Verfahren und Geraet zur thermischen Materialbearbeitung mittels LaserstrahlenInfo
- Publication number
- DE1565007A1 DE1565007A1 DE19651565007 DE1565007A DE1565007A1 DE 1565007 A1 DE1565007 A1 DE 1565007A1 DE 19651565007 DE19651565007 DE 19651565007 DE 1565007 A DE1565007 A DE 1565007A DE 1565007 A1 DE1565007 A1 DE 1565007A1
- Authority
- DE
- Germany
- Prior art keywords
- deflector
- light source
- digital
- laser light
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 22
- 230000008569 process Effects 0.000 title description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001421 changed effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/034—Observing the temperature of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEP0036886 | 1965-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1565007A1 true DE1565007A1 (de) | 1970-05-21 |
Family
ID=7374995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19651565007 Pending DE1565007A1 (de) | 1965-05-25 | 1965-05-25 | Verfahren und Geraet zur thermischen Materialbearbeitung mittels Laserstrahlen |
Country Status (7)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2321137A1 (de) * | 1973-04-26 | 1974-11-14 | Messerschmitt Boelkow Blohm | Sicherheitseinrichtung zum schutz vor schaedigungen durch laserstrahlen, insbesondere bei der verwendung von flexiblen lichtleitern |
| FR2466080A1 (fr) * | 1979-09-24 | 1981-03-27 | Rca Corp | Procede de realisation d'un marquage lisible a la machine sur des pieces telles que, notamment, des tubes a rayons cathodiques |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1572642A1 (de) * | 1967-06-26 | 1970-03-26 | Euratom | Laser-Bestrahlungsvorrichtung |
| GB1305605A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1969-03-01 | 1973-02-07 | ||
| US3621180A (en) * | 1969-06-03 | 1971-11-16 | Singer General Precision | System for correcting unbalances on a rotating mass |
| FR2096880A1 (en) * | 1970-06-11 | 1972-03-03 | Mitsubishi Electric Corp | Laser beam machining appts - automatically adjusted using control beam passing through semi-transparent mirrors |
| US3689159A (en) * | 1970-06-11 | 1972-09-05 | Mitsubishi Electric Corp | Laser processing apparatus |
| US3740524A (en) * | 1971-03-26 | 1973-06-19 | Ppg Industries Inc | Method for cutting curved patterns in glass sheets disposed on a fluid air support |
| DE2219317B2 (de) * | 1972-04-20 | 1975-06-12 | Messer Griesheim Gmbh, 6000 Frankfurt | Einrichtung zum Bearbeiten von Werkstücken mit einem Laserstrahl |
| US4151008A (en) * | 1974-11-15 | 1979-04-24 | Spire Corporation | Method involving pulsed light processing of semiconductor devices |
| LU71852A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-02-14 | 1977-01-05 | ||
| US4088890A (en) * | 1976-09-28 | 1978-05-09 | United Technologies Corporation | Optical position detector |
| US4257825A (en) * | 1978-08-30 | 1981-03-24 | U.S. Philips Corporation | Method of manufacturing semiconductor devices having improvements in device reliability by thermally treating selectively implanted test figures in wafers |
| US4545018A (en) * | 1982-09-01 | 1985-10-01 | Westinghouse Electric Corp. | Calibration of automated laser machining apparatus |
| GB2139614B (en) * | 1983-05-13 | 1987-02-04 | Glaverbel | Method and apparatus for cutting glass |
| EP0195825A3 (de) * | 1985-02-20 | 1987-07-29 | Robert Langen | Verfahren zum Entfernen von Verunreinigungen, insbesondere Rost, von einer Metalloberfläche |
| GB2175737A (en) * | 1985-05-09 | 1986-12-03 | Control Laser Limited | Laser material processing |
| DE3733489A1 (de) * | 1987-10-03 | 1989-04-20 | Telemit Electronic Gmbh | Verfahren und vorrichtung zur materialbearbeitung mit hilfe eines lasers |
-
1965
- 1965-05-25 DE DE19651565007 patent/DE1565007A1/de active Pending
-
1966
- 1966-05-20 GB GB2258266A patent/GB1153282A/en not_active Expired
- 1966-05-21 NL NL6607025A patent/NL6607025A/xx unknown
- 1966-05-23 BE BE681468D patent/BE681468A/xx unknown
- 1966-05-23 CH CH739466A patent/CH454302A/de unknown
- 1966-05-23 AT AT484466A patent/AT261076B/de active
- 1966-05-24 FR FR62726A patent/FR1480898A/fr not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2321137A1 (de) * | 1973-04-26 | 1974-11-14 | Messerschmitt Boelkow Blohm | Sicherheitseinrichtung zum schutz vor schaedigungen durch laserstrahlen, insbesondere bei der verwendung von flexiblen lichtleitern |
| FR2466080A1 (fr) * | 1979-09-24 | 1981-03-27 | Rca Corp | Procede de realisation d'un marquage lisible a la machine sur des pieces telles que, notamment, des tubes a rayons cathodiques |
Also Published As
| Publication number | Publication date |
|---|---|
| CH454302A (de) | 1968-04-15 |
| FR1480898A (fr) | 1967-05-12 |
| GB1153282A (en) | 1969-05-29 |
| NL6607025A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-11-28 |
| AT261076B (de) | 1968-04-10 |
| BE681468A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-11-23 |
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