DE1564676A1 - Lock device for corpuscular beam devices working on the pump, in particular for introducing objects into the vacuum space of an electron microscope - Google Patents

Description

ΡΛ 66/0568

Schleu.geneinrichtung for corpuscular blasting devices working on the pump, in particular for introducing of objects in the vacuum space of a

Electron microscope

The invention relates to a lock device for at the Pump-working corpuscular beam devices, which are used in particular for the introduction of objects into the vacuum space of an electrical,

electron microscope is intended to serve. The invention can, however, ί also with other corpuscular beam devices, v / ie ion microscopes and diffraction devices, as well as for inward and outward transfer J

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156A676

Use of covers, pole pieces or other parts of the device with advantage.

The lock device according to the invention contains in known A lock chamber that can be closed in a vacuum-tight manner by an inner and an outer lock gate. It is known, Provide a ventilation valve in the outer lock gate to ventilate the lock chamber after it is closed the inner lock gate and before opening the outer lock gate. In known corpuscular beam devices a pressure valve is used for this purpose, i.e. one that, after pressing a valve stem, produces a Establishes connection between the outer atmosphere and the lock chamber. Apart from the fact that with such a Pressure valve easily prevents unintentional ventilation of the lock room and with the inner lock gate open A harmful ingress of air into the vacuum space of the corpuscular beam device can be caused, the known solution requires an additional handle for ventilation the lock chamber.

A similar disadvantage exists in the case of the venting of the lock chamber after the outer lock gate has been closed and vent valves before opening the inner lock gate, the one connection between the lock chamber and, for example, the fore-vacuum container of the vacuum system allow to produce the corpuscular beam device. These vent valves also have to have an additional

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Handle can be operated so that if you forget the Ber Operation Difficulties can occur during the lock process *

The invention is intended to address these difficulties either or at the same time in the vent and vent valve for a lock device constructed in the manner described above, avoid the lock device according to the invention is as far as it relates to the operation of the ventilation valve relates, characterized in that the ventilation valve ale pull valve is formed and a cylindrical part contains the when the outer lock gate is closed pressed by this vacuum-tight against an end face of the lock chamber facing this lock gate and a valve tappet with a vacuum seal in between Receives vacuum-tight, the end protruding from the cylindrical part in the outer lock gate is held so that when the lock gate begins to open until a stop becomes effective the cylindrical part is pulled out, and that the valve stem has a ventilation channel in such an arrangement that the channel when the valve stem is pulled out Vacuum seal bridged, but is ineffective when the outer lock gate is completely closed.

In principle, the ventilation valve according to the invention is therefore mechanically held only at the outer lock gate; the cylindrical part lies down even when the opening of the

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outer lock gates under the external air pressure, if necessary supported by springs, still sealing as an external seal against the lock chamber forming parts. Only when the ventilation duct is grounded in the valve tappet, under the influence of the beginning of the opening of the outer lock gate until a stop becomes effective is pulled out of the cylindrical part, eliminates the pressure difference between the outer space and the lock chamber, so that now the cylindrical part of the ventilation valve is exerted on the outer lock gate when it is opened The tension that is transmitted to the cylindrical part via the valve tappet can follow, accordingly the vacuum tightness The connection between the cylindrical part and the lock chamber is canceled and the outer lock gate is complete opening released v / ird.

The ventilation channel can be formed by a groove or another suitable profile on the surface of the valve stem be formed .. This profiling must be arranged so that it only begins to open when the outer Lock gate bridges the vacuum seal between the valve stem and the cylindrical part.

Often, on the other hand, the ventilation duct is v / ied in this way shape that you can get it from a longitudinal hole in the direction the axis of the ram and one with this longitudinal bore in Connecting transverse bore composed, the so different

is arranged so that it can only be used when the valve tappet is pulled out

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lies outside the vacuum space bounded by the vacuum seal. This constructive training is above all then from Vortoil, for example if you want to shoot a mechanically sensitive object only wants to set a small, adjustable flow. For this purpose, in Means regulating the flow, for example a screw pin with a defined thread clearance, are provided in the longitudinal bore be. You can also insert a normal pin with a predetermined fit into the longitudinal bore.

The construction described is against unintentional actuation protected, as it is constructed in the manner of a pull valve. Sio also has the advantage that ventilation does not require an additional handle, but automatically with the one already required to open the outer lock gate Pulling on this takes place.

This automation can also be carried out according to the invention achieve in a vent valve for the lock chamber in such a way that in the presence of a rotary drive for alternating locking of the inner and outer sluice gate of the plunger of the vent valve with extensions cooperates on the rotary drive in such a way that after the locking of the outer sluice gate, the rotary drive opens the vent valve. This measure can be both be taken on its own as well as simultaneously with the construction of the ventilation valve described above. Here, too, there is automation to the extent that

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the actuation of the locking device at the right time without any additional manipulation and the vent valve opened and thus created a connection between the lock chamber and the vacuum system of the device will.

The port sets are expediently arranged in such a way that that the rotary drive unlocks the inner lock gate only after closing the vent valve, as in Usually the lock chamber is connected to the fore-vacuum container and the device is operated under high vacuum will.

The extensions can be formed by rolling on the rotary drive; however, it is understandably possible to work with crouching or a cam. The use of rollers offers the further advantage that, in the case of a rotary drive for locking that performs a reciprocating movement, a directional selectivity of the action of the rollers on the vent valve can be achieved. For this purpose, the rollers can be resiliently mounted in such a way that they actuate the valve tappet only when the threat drive is rotated in the direction associated with the locking of the outer lock gate, but when the rotary valve is rotated ^; The drive retracts resiliently in the opposite direction when it comes into contact with the valve tappet.

The figures show an embodiment for the invention S7 . -. ORlGiNALlNSPECTED

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appropriate solutions for both a ventilation and a vent valve. Figures 1 and 2 represent the horizontal center through the level plane of the column of an electron microscope; FIG. 3 is a side view, partially in section, and FIG. 4 is a view of the cable, also partially in section _8, in the area of the column of the microscope which has a vent valve for the lock chamber, and FIG. 5 finally shows schematically the directionally unselective arrangement of an actuating roller for aas vent valve.

In the case of the exemplary embodiment, it is assumed that the column of the electron microscope, which encloses the vacuum space 2 of the same, has a deflection system 3 in the illustrated plane, and a deflection of the metal electron beam 4 as well as a locking device 5 for cinema - not shown in the figures - to the finger plate β, for example, contains an ansisschr & u ^ - "- ncie cartridge. The construction of the deflection system 3 äex * lock device 5 _S oils remove the object cartridge from the area of the electron beam 4 see below (Figure 2) into the lock chamber? (outer locks , Figure IJ hz \ i. in reverse seal - CEineciileüsen) zn to move, is not interested in the heating of the invention. Mechanism 8 is also not discussed ₉ which excludes a mutual hindrance of deflection system 3 κηά Sciileuseinriehiung 5 when moving the latter .

The lock chamber 7 is disreli the chamber part 3 in

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binding with the inner lock gate formed by the plate 6 and the pawl 10 so / ie the outer lock gate 11 shown. If one first considers that which is generally designated 12 and which is arranged in the outer lock gate 11 Ventilation valve, this is composed of the cylindrical part 13 and the valve stem 14. Only the valve tappet 14 is otherwise freely movable in a recess of the outer by means of the screw connection 15 Lock gates 11 held mechanically; the cylindrical part 13 sits freely movable on the valve stem 14, which it surrounds with the seal 16 in a vacuum-tight manner. In the closed position shown in Figure 2 of the outer Lock gates 11 is the cylindrical part 13 under Intermediate layer of the seal 17 vacuum-tight on the end face of the lock part facing the outer lock gate 11 9 pressed. As soon as the opening movement of the outer lock gate 11 begins, the screw connection 15 the valve stem 14 from the cylindrical part 13 until the stop 18 and the nose 19 take effect from the The cylindrical part 13 is pulled out, since this remains tightly on the part 9 under the effect of the external air pressure.

The valve tappet 14 has a ventilation channel, which in this Ausführungsbciopicl from the longitudinal bore 20 and the two transverse bores 21 and 22 is composed. In the position shown in Figure 2, there are both transverse bores 21 and 22 in the area of the evacuated room; BU-

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at least the transverse bore 21 lies within the seal 16, so that the channel is not in communication with the atmosphere. But this is the pail as soon as it is due to a slight Opening of the outer sluice gate 11 of the valve tappet 14 is pulled out of the cylindrical rope so far that the transverse bore 21 is outside the area of the seal 16 lies.

In this exemplary embodiment, the pin 23 is inserted into the longitudinal bore 20 with a fit determined by the desired flow velocity, which, for example, causes such a reduction in the inflow that an object flowing out cannot be damaged.

It is particularly expedient, if only for reasons of material savings, to use the ventilation valve 12 in the manner shown to be arranged in a recess in the outer lock gate 11, which is located in the area of the actuating button 24 for the Lock gate is located. Then one can use the reinforcement of the lock gate cross-section, which is already present by the actuating button 24 to accommodate the ventilation valve 12 use.

With a lead ring 25 is referred to as radiation protection serves. When the outer sluice gate 11 begins to open, it allows the outside air to enter the ventilation valve 12 receiving recess in the lock gate 11, so that in the manner described under the action of

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external air pressure the tight support of the cylindrical part 13 on the seal 17 until the effective Ventilation channel in the valve stem 14 is preserved.

A spring 47 can serve, when the outer lock gate 11 is closed, to ensure that the part 13 is tightly attached to the Chamber part 9 to ensure. You can be so strong that it the outer lock gate 11 after its release until the ventilation channel becomes effective.

In the following, the automation of the operation of the <vent valve B shown in FIGS for the lock chamber 7 received. For this purpose, the one shown in FIGS. 1 and 2, containing the rotary drive 27 Interlocking device used v / earth. As is well known, it must be ensured that the Lock chamber 7, the inner one consisting of parts 6 and 10 in the exemplary embodiment shown in the drawing The lock gate is closed so that there is no intrusion into the vacuum chamber 2 of the device during ventilation. It It is therefore necessary that the inner and outer lock gates only depend on their mutual positions open. For this purpose, the rotating

> drove 27 the two profile girders 28 and 29, of which the former acts on a stop 30 on the outer lock gate 11 and the profile girder 29 acts on the stop 31 on the rope 10, ie the inner lock gate, which acts on a roller.

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In the operating position shown in Figure 2, the profile support 28 locks the outer lock gate 11 while the inner profile support 29 via its recess 32 to open the inner lock gates by releasing the pawl 10 allows. The inner lock gate is opened in a manner that is not of interest here by activating the the rotary drive 33 j assigned to the lock device 5, whereby the part 6 moves out of the position shown in FIG removed and the pawl 10 is moved into the position shown in FIG.

If an object cartridge is now to be ejected, it must first the position of the parts 6 and 10 shown in Figure 1 will be enforced again before the outer lock gate 11 is opened may be. The parts 6 and 10 are in turn moved into their lock chamber 7 by actuating the rotary drive 33 brought vacuum-tight final layer (Figure 1). However, before the rotary drive 27 does not move by 90 ° from the position shown in FIG reproduced position is rotated so that it is then over the Recess 34 to open the outer lock gate 11 through Pivoting around the axis 35 allows (Figure 1), the opening of the outer lock gate is prevented. According to the described Rotation puts the profile 29 under the stop 31 on the pawl 10, so that the outer lock gate 11 only after securing the closed position of the inner lock gate 6, 10 can be opened.

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This rotary drive 27 is used in a manner to be explained with reference to FIGS. 3 to 4 via a roller 36 fastened to it at the same time to actuate the vent valve 26 when both the outer and the inner lock gate are closed after inserting a new specimen cartridge. The roller 36 acts on the tip 37 of the plunger 38 of the vent valve 26 and pushes it so far in Figure 3 in the left direction that the slender area 39 of the The plunger 38 causes the vacuum seal 40 to be bridged. This creates a connection via channels 41 and 42 between the lock chamber 7 and the fore-vacuum container or another suitable pressure stage of the vacuum system leading line 43 created.

As already noted, this pre-evacuation of the lock chamber 7 is only required and desired during the introduction process. For this purpose, a clockwise rotation of the rotary drive 27 from the position shown in Figure 1 in the direction indicated in Figure 2 position, ie at 90 °, is required. Thus, the roller 36 drives the plunger 38 only with this rightward movement, it is supported in the position shown in Figure 5 way so that they are at right movement of the rotary drive 27 under 2), the plunger tip 37 smoothly with its axis 44 towards the fixed end of a Slotted hole guide 45 sets, on the other hand, when the rotary drive 27 is rotated in the opposite direction against the action of the tension springs 46, it is slightly pushed away from the Stöflelspitae 38.

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The rotary drive 27 can have a representation for the actuation position of the vent valve.

If one uses the described constructions for the ventilation valve, as a rule, at the same time for the extensive automation of the entire lock process, the application of only one of the constructions can already be advantageous. For example, in the case of a very small lock chamber 7, it is possible to report on a pre-evacuation of the same before the inner lock gate \ ^r opens.

Understandably, the application of the invention is also at a device possible to lock screens, Polschuht3ilen or the like during the operation of the Device should serve.

5 figures
3 claims

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Claims (8)

:: ·: · I "sit '9/710/2725 b patent claims 1. Lock device for corpuscular blasting devices working on the pump, especially for smuggling objects into the vacuum space of an electron microscope, with a, by means of an inner and an outer lock gate, which can be locked in a vacuum-tight manner, as well as a ventilation valve in the outer lock gate, characterized in that the ventilation valve is designed as a pull valve and a cylindrical one Contains part that when the outer lock gate is closed by this vacuum-tight against this lock gate facing end face of the lock chamber is pressed and a valve tappet with the interposition of a vacuum seal Receives vacuum-tight, the end protruding from the cylindrical part in the outer lock gate is held so that it is off at the beginning of the opening of the lock gate until a stop takes effect the cylindrical part is pulled out, and that the valve stem has a Beltiftungskanal in such an arrangement has that the channel bridges the vacuum seal when the valve stem is pulled out, but when it is completely closed outer lock gate is ineffective. 2. Lock device according to claim 1, characterized in that the channel is formed by a groove or the like is formed on the surface of the valve lifter. New documents (Art. 7 S l Abs. 2 Nr. I Clause 3 of the amendment law. V. 4.9.! 0Θ7. - 14 - 909887/0804 • ^: * ·· * '»' ^: JPA 9/710/2725 b 3. Schleuseneinriehtung according to claim 1, characterized in that that the channel comprises a Mngsbohrung and a transverse bore connected to the longitudinal bore and arranged in this way lot that it only works when the valve tappet is pulled out outside of the vacuum space bounded by the vacuum seal lies. 4. Lock device na © h claim 3 _f, characterized in that the flow regulating means such as a screw pin9 are provided in the Längsbohrwag. 5. Grinding device for corpuscular beam devices working on the pump t in particular for the introduction of objects into the vacuum space © Ines electron microscope »with a lock chamber which can be closed vacuum-tight by oin inner and an outer lock gate and a vent valve for this, in particular according to one of claims 1 to 4 _S thereby characterized, daS in the presence of a Drehtriobes sur alternating locking of the inner and the outer sluice gate of the plunger of the vent valve with Fortsätson on the Brehtrieb in the catfish cooperates that after locking the outer sluice gate, the rotary drive opens the vent valve. 6. Schleuoeneinrichtung according to claim 5 »characterized in that that the wire drive the inner lock gate only after Closing of the vent valve unlocked. - 15 - 909887/0804 Irk 9/710/2725 t> 7. Lock device according to claim 5 or 6, characterized characterized in that the port sets are formed by rolling on the rotary drive. 8. Lock device according to claim 7 »characterized in that the rollers are resiliently mounted in such a way» that they only move the valve tappet when the rotary drive is rotated in the locking mechanism of the outer sluice gate Actuate direction, on the other hand when turning the rotary drive In in the opposite direction, on contact with the valve tappet, resiliently withdraw. " ¹⁶ " 909887/0804 Blank page