DE1539132A1 - Ionenvakuumpumpe - Google Patents
IonenvakuumpumpeInfo
- Publication number
- DE1539132A1 DE1539132A1 DE19661539132 DE1539132A DE1539132A1 DE 1539132 A1 DE1539132 A1 DE 1539132A1 DE 19661539132 DE19661539132 DE 19661539132 DE 1539132 A DE1539132 A DE 1539132A DE 1539132 A1 DE1539132 A1 DE 1539132A1
- Authority
- DE
- Germany
- Prior art keywords
- anode
- vacuum pump
- pump according
- ion vacuum
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010406 cathode material Substances 0.000 claims description 3
- 238000000889 atomisation Methods 0.000 claims 1
- 150000001993 dienes Chemical class 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010405 anode material Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- CZPRKINNVBONSF-UHFFFAOYSA-M zinc;dioxido(oxo)phosphanium Chemical compound [Zn+2].[O-][P+]([O-])=O CZPRKINNVBONSF-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEL0052618 | 1966-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1539132A1 true DE1539132A1 (de) | 1969-09-18 |
Family
ID=7274842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661539132 Pending DE1539132A1 (de) | 1966-01-18 | 1966-01-18 | Ionenvakuumpumpe |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE692751A (enrdf_load_stackoverflow) |
| DE (1) | DE1539132A1 (enrdf_load_stackoverflow) |
| FR (1) | FR1506644A (enrdf_load_stackoverflow) |
| NL (1) | NL6612749A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2580866A1 (fr) * | 1985-04-23 | 1986-10-24 | Novatome | Pompe ionique a courant proportionnel au debit |
-
1966
- 1966-01-18 DE DE19661539132 patent/DE1539132A1/de active Pending
- 1966-09-09 NL NL6612749A patent/NL6612749A/xx unknown
- 1966-11-30 FR FR86227A patent/FR1506644A/fr not_active Expired
-
1967
- 1967-01-17 BE BE692751D patent/BE692751A/xx unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2580866A1 (fr) * | 1985-04-23 | 1986-10-24 | Novatome | Pompe ionique a courant proportionnel au debit |
| EP0200641A1 (fr) * | 1985-04-23 | 1986-11-05 | Novatome | Pompe ionique à courant proportionnel au débit |
Also Published As
| Publication number | Publication date |
|---|---|
| BE692751A (enrdf_load_stackoverflow) | 1967-07-03 |
| FR1506644A (fr) | 1967-12-22 |
| NL6612749A (enrdf_load_stackoverflow) | 1967-07-19 |
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